JPS5227368A - Selection etching method - Google Patents

Selection etching method

Info

Publication number
JPS5227368A
JPS5227368A JP10297275A JP10297275A JPS5227368A JP S5227368 A JPS5227368 A JP S5227368A JP 10297275 A JP10297275 A JP 10297275A JP 10297275 A JP10297275 A JP 10297275A JP S5227368 A JPS5227368 A JP S5227368A
Authority
JP
Japan
Prior art keywords
etching method
selection etching
selection
wafer
ensured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10297275A
Other languages
Japanese (ja)
Other versions
JPS5824939B2 (en
Inventor
Masami Usui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10297275A priority Critical patent/JPS5824939B2/en
Publication of JPS5227368A publication Critical patent/JPS5227368A/en
Publication of JPS5824939B2 publication Critical patent/JPS5824939B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Weting (AREA)

Abstract

PURPOSE: An extremely easy etching is ensured for specified area of wafer.
COPYRIGHT: (C)1977,JPO&Japio
JP10297275A 1975-08-27 1975-08-27 Center Questing Hohou Expired JPS5824939B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10297275A JPS5824939B2 (en) 1975-08-27 1975-08-27 Center Questing Hohou

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10297275A JPS5824939B2 (en) 1975-08-27 1975-08-27 Center Questing Hohou

Publications (2)

Publication Number Publication Date
JPS5227368A true JPS5227368A (en) 1977-03-01
JPS5824939B2 JPS5824939B2 (en) 1983-05-24

Family

ID=14341658

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10297275A Expired JPS5824939B2 (en) 1975-08-27 1975-08-27 Center Questing Hohou

Country Status (1)

Country Link
JP (1) JPS5824939B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5457866A (en) * 1977-10-18 1979-05-10 Toshiba Corp Surface-processing method for semiconductor substrate
JPS5887336U (en) * 1981-12-09 1983-06-14 日本電気株式会社 Etching device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5457866A (en) * 1977-10-18 1979-05-10 Toshiba Corp Surface-processing method for semiconductor substrate
JPS5887336U (en) * 1981-12-09 1983-06-14 日本電気株式会社 Etching device

Also Published As

Publication number Publication date
JPS5824939B2 (en) 1983-05-24

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