JPS5242789A - Method of inspecting pinholes of insulating film - Google Patents

Method of inspecting pinholes of insulating film

Info

Publication number
JPS5242789A
JPS5242789A JP50117705A JP11770575A JPS5242789A JP S5242789 A JPS5242789 A JP S5242789A JP 50117705 A JP50117705 A JP 50117705A JP 11770575 A JP11770575 A JP 11770575A JP S5242789 A JPS5242789 A JP S5242789A
Authority
JP
Japan
Prior art keywords
insulating film
inspecting pinholes
pinholes
inspecting
inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50117705A
Other languages
Japanese (ja)
Inventor
Seiichi Iwamatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50117705A priority Critical patent/JPS5242789A/en
Publication of JPS5242789A publication Critical patent/JPS5242789A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
    • G01N23/18—Investigating the presence of flaws defects or foreign matter

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:Electron beams are radiated from the surface of an insulating film and the current having transmitted therethrough is measured, whereby inspection is performed at high accuracy with less number of inspection steps.
JP50117705A 1975-10-01 1975-10-01 Method of inspecting pinholes of insulating film Pending JPS5242789A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50117705A JPS5242789A (en) 1975-10-01 1975-10-01 Method of inspecting pinholes of insulating film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50117705A JPS5242789A (en) 1975-10-01 1975-10-01 Method of inspecting pinholes of insulating film

Publications (1)

Publication Number Publication Date
JPS5242789A true JPS5242789A (en) 1977-04-02

Family

ID=14718258

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50117705A Pending JPS5242789A (en) 1975-10-01 1975-10-01 Method of inspecting pinholes of insulating film

Country Status (1)

Country Link
JP (1) JPS5242789A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5138103A (en) * 1990-08-20 1992-08-11 Tosoh Corporation Process for producing tetrabromobisphenol a
US5635715A (en) * 1993-10-08 1997-06-03 A L'energie Atomique Process for the characterization of an insulator and the corresponding electron microscope

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5138103A (en) * 1990-08-20 1992-08-11 Tosoh Corporation Process for producing tetrabromobisphenol a
US5635715A (en) * 1993-10-08 1997-06-03 A L'energie Atomique Process for the characterization of an insulator and the corresponding electron microscope

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