JPS5282078A - Production of mos transistor - Google Patents

Production of mos transistor

Info

Publication number
JPS5282078A
JPS5282078A JP15688275A JP15688275A JPS5282078A JP S5282078 A JPS5282078 A JP S5282078A JP 15688275 A JP15688275 A JP 15688275A JP 15688275 A JP15688275 A JP 15688275A JP S5282078 A JPS5282078 A JP S5282078A
Authority
JP
Japan
Prior art keywords
production
mos transistor
gate
beforhand
integration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15688275A
Other languages
Japanese (ja)
Other versions
JPS6011472B2 (en
Inventor
Yoshiki Tanigawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15688275A priority Critical patent/JPS6011472B2/en
Publication of JPS5282078A publication Critical patent/JPS5282078A/en
Publication of JPS6011472B2 publication Critical patent/JPS6011472B2/en
Expired legal-status Critical Current

Links

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  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To produce an Si gate MOSFET of high scale of integration and high performance by forming source-drain regions after oxidizing gate beforhand.
COPYRIGHT: (C)1977,JPO&Japio
JP15688275A 1975-12-29 1975-12-29 Manufacturing method of MOS transistor Expired JPS6011472B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15688275A JPS6011472B2 (en) 1975-12-29 1975-12-29 Manufacturing method of MOS transistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15688275A JPS6011472B2 (en) 1975-12-29 1975-12-29 Manufacturing method of MOS transistor

Publications (2)

Publication Number Publication Date
JPS5282078A true JPS5282078A (en) 1977-07-08
JPS6011472B2 JPS6011472B2 (en) 1985-03-26

Family

ID=15637442

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15688275A Expired JPS6011472B2 (en) 1975-12-29 1975-12-29 Manufacturing method of MOS transistor

Country Status (1)

Country Link
JP (1) JPS6011472B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57134971A (en) * 1981-02-16 1982-08-20 Nippon Telegr & Teleph Corp <Ntt> Mis type simiconductor device and manufacture of the same
JPS57210672A (en) * 1981-06-19 1982-12-24 Fujitsu Ltd Semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57134971A (en) * 1981-02-16 1982-08-20 Nippon Telegr & Teleph Corp <Ntt> Mis type simiconductor device and manufacture of the same
JPS57210672A (en) * 1981-06-19 1982-12-24 Fujitsu Ltd Semiconductor device

Also Published As

Publication number Publication date
JPS6011472B2 (en) 1985-03-26

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