JPS5287977A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS5287977A JPS5287977A JP406476A JP406476A JPS5287977A JP S5287977 A JPS5287977 A JP S5287977A JP 406476 A JP406476 A JP 406476A JP 406476 A JP406476 A JP 406476A JP S5287977 A JPS5287977 A JP S5287977A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- implanting
- pit
- electrodes
- alloy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title 1
- 229910021364 Al-Si alloy Inorganic materials 0.000 abstract 1
- 230000001133 acceleration Effects 0.000 abstract 1
- 230000015572 biosynthetic process Effects 0.000 abstract 1
Landscapes
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To prevent the formation of pit-form Al-Si alloy on the junction faces of Al electrodes and Si by implanting Si into an Al wiring layer with suitable acceleration energy.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP406476A JPS5287977A (en) | 1976-01-19 | 1976-01-19 | Semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP406476A JPS5287977A (en) | 1976-01-19 | 1976-01-19 | Semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5287977A true JPS5287977A (en) | 1977-07-22 |
Family
ID=11574400
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP406476A Pending JPS5287977A (en) | 1976-01-19 | 1976-01-19 | Semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5287977A (en) |
-
1976
- 1976-01-19 JP JP406476A patent/JPS5287977A/en active Pending
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