JPS5295181A - Heating table - Google Patents

Heating table

Info

Publication number: JPS5295181A
Authority: JP; Japan
Prior art keywords: heating table; carried objects; overheat; troubles; annealing
Prior art date: 1976-02-06
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP1146076A

Other languages

English (en)

Other versions

JPS6011468B2 (ja

Inventor

Minoru Sakurai

Soichiro Nakamura

Masahiro Horii

Makoto Yoshida

Haruo Amada

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Hitachi Ltd

Original Assignee

Hitachi Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1976-02-06

Filing date

1976-02-06

Publication date

1977-08-10

1976-02-06 Application filed by Hitachi Ltd filed Critical Hitachi Ltd

1976-02-06 Priority to JP1146076A priority Critical patent/JPS6011468B2/ja

1977-08-10 Publication of JPS5295181A publication Critical patent/JPS5295181A/ja

1985-03-26 Publication of JPS6011468B2 publication Critical patent/JPS6011468B2/ja

Status Expired legal-status Critical Current

Links

238000010438 heat treatment Methods 0.000 title abstract 2
238000000137 annealing Methods 0.000 abstract 1
230000001590 oxidative effect Effects 0.000 abstract 1

JP1146076A 1976-02-06 1976-02-06 加熱テ−ブル Expired JPS6011468B2 (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP1146076A JPS6011468B2 (ja)	1976-02-06	1976-02-06	加熱テ−ブル

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP1146076A JPS6011468B2 (ja)	1976-02-06	1976-02-06	加熱テ−ブル

Related Child Applications (1)

Application Number	Title	Priority Date	Filing Date
JP59070884A Division JPS60149140A (ja)	1984-04-11	1984-04-11	半導体装置組立用ボンデイング装置

Publications (2)

Publication Number	Publication Date
JPS5295181A true JPS5295181A (en)	1977-08-10
JPS6011468B2 JPS6011468B2 (ja)	1985-03-26

Family

ID=11778697

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP1146076A Expired JPS6011468B2 (ja)	1976-02-06	1976-02-06	加熱テ−ブル

Country Status (1)

Country	Link
JP (1)	JPS6011468B2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS60149140A (ja) *	1984-04-11	1985-08-06	Hitachi Ltd	半導体装置組立用ボンデイング装置

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS61234093A (ja) *	1985-04-10	1986-10-18	松下電器産業株式会社	配線基板
JPH01145173U (ja) *	1988-03-29	1989-10-05
JPH0416584U (ja) *	1990-05-29	1992-02-12

1976
- 1976-02-06 JP JP1146076A patent/JPS6011468B2/ja not_active Expired

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS60149140A (ja) *	1984-04-11	1985-08-06	Hitachi Ltd	半導体装置組立用ボンデイング装置

Also Published As

Publication number	Publication date
JPS6011468B2 (ja)	1985-03-26

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