JPS53142183A - Silicon wafer jig - Google Patents

Silicon wafer jig

Info

Publication number
JPS53142183A
JPS53142183A JP5739377A JP5739377A JPS53142183A JP S53142183 A JPS53142183 A JP S53142183A JP 5739377 A JP5739377 A JP 5739377A JP 5739377 A JP5739377 A JP 5739377A JP S53142183 A JPS53142183 A JP S53142183A
Authority
JP
Japan
Prior art keywords
silicon wafer
wafer jig
jig
silicon
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5739377A
Other languages
Japanese (ja)
Inventor
Kazunari Ban
Yukitoshi Matsuo
Kazutoshi Meguro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP5739377A priority Critical patent/JPS53142183A/en
Publication of JPS53142183A publication Critical patent/JPS53142183A/en
Pending legal-status Critical Current

Links

JP5739377A 1977-05-18 1977-05-18 Silicon wafer jig Pending JPS53142183A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5739377A JPS53142183A (en) 1977-05-18 1977-05-18 Silicon wafer jig

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5739377A JPS53142183A (en) 1977-05-18 1977-05-18 Silicon wafer jig

Publications (1)

Publication Number Publication Date
JPS53142183A true JPS53142183A (en) 1978-12-11

Family

ID=13054366

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5739377A Pending JPS53142183A (en) 1977-05-18 1977-05-18 Silicon wafer jig

Country Status (1)

Country Link
JP (1) JPS53142183A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61214424A (en) * 1985-03-19 1986-09-24 Ibiden Co Ltd Heat-resisting jig and its manufacture
JPH01130522A (en) * 1987-11-17 1989-05-23 Toshiba Ceramics Co Ltd Manufacture of wafer boat
US4846673A (en) * 1987-12-25 1989-07-11 Ibiden Co., Ltd. Process for preparing heat-resistant composite body

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5185374A (en) * 1974-12-06 1976-07-26 Norton Co

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5185374A (en) * 1974-12-06 1976-07-26 Norton Co

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61214424A (en) * 1985-03-19 1986-09-24 Ibiden Co Ltd Heat-resisting jig and its manufacture
JPH01130522A (en) * 1987-11-17 1989-05-23 Toshiba Ceramics Co Ltd Manufacture of wafer boat
US4846673A (en) * 1987-12-25 1989-07-11 Ibiden Co., Ltd. Process for preparing heat-resistant composite body
US4913738A (en) * 1987-12-25 1990-04-03 Ibiden Co., Ltd. Heat-resistant composite body

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