JPS5321585A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5321585A
JPS5321585A JP9542276A JP9542276A JPS5321585A JP S5321585 A JPS5321585 A JP S5321585A JP 9542276 A JP9542276 A JP 9542276A JP 9542276 A JP9542276 A JP 9542276A JP S5321585 A JPS5321585 A JP S5321585A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
impurity
film
throuhg
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9542276A
Other languages
Japanese (ja)
Inventor
Iwao Higashinakagaha
Shohei Shima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP9542276A priority Critical patent/JPS5321585A/en
Publication of JPS5321585A publication Critical patent/JPS5321585A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To avert the shorting and step cutting at the time of forming wirings throuhg anodization by laminating a first Al film containing an impurity and a second Al film without containing any impurity on a semiconductor substrate formed with elements and selectively anodizing these.
COPYRIGHT: (C)1978,JPO&Japio
JP9542276A 1976-08-12 1976-08-12 Production of semiconductor device Pending JPS5321585A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9542276A JPS5321585A (en) 1976-08-12 1976-08-12 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9542276A JPS5321585A (en) 1976-08-12 1976-08-12 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5321585A true JPS5321585A (en) 1978-02-28

Family

ID=14137246

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9542276A Pending JPS5321585A (en) 1976-08-12 1976-08-12 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5321585A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6047423A (en) * 1983-08-25 1985-03-14 Nippon Telegr & Teleph Corp <Ntt> Method for pattern formation

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6047423A (en) * 1983-08-25 1985-03-14 Nippon Telegr & Teleph Corp <Ntt> Method for pattern formation

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