JPS5321950A - Detection of position - Google Patents

Detection of position

Info

Publication number
JPS5321950A
JPS5321950A JP9635576A JP9635576A JPS5321950A JP S5321950 A JPS5321950 A JP S5321950A JP 9635576 A JP9635576 A JP 9635576A JP 9635576 A JP9635576 A JP 9635576A JP S5321950 A JPS5321950 A JP S5321950A
Authority
JP
Japan
Prior art keywords
substrate
section
electron beam
detection
cleavage cross
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9635576A
Other languages
English (en)
Other versions
JPS5819042B2 (ja
Inventor
Masahiro Okabe
Seigo Igaki
Noriaki Nakayama
Yasuo Furukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP51096355A priority Critical patent/JPS5819042B2/ja
Publication of JPS5321950A publication Critical patent/JPS5321950A/ja
Publication of JPS5819042B2 publication Critical patent/JPS5819042B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP51096355A 1976-08-11 1976-08-11 位置検出法 Expired JPS5819042B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51096355A JPS5819042B2 (ja) 1976-08-11 1976-08-11 位置検出法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51096355A JPS5819042B2 (ja) 1976-08-11 1976-08-11 位置検出法

Publications (2)

Publication Number Publication Date
JPS5321950A true JPS5321950A (en) 1978-02-28
JPS5819042B2 JPS5819042B2 (ja) 1983-04-15

Family

ID=14162675

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51096355A Expired JPS5819042B2 (ja) 1976-08-11 1976-08-11 位置検出法

Country Status (1)

Country Link
JP (1) JPS5819042B2 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6125023U (ja) * 1984-07-20 1986-02-14 日本電信電話株式会社 建物床面の配線収容装置

Also Published As

Publication number Publication date
JPS5819042B2 (ja) 1983-04-15

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