JPS5430773A - Electron-beam device having vacuum isolation film inside sample chamber - Google Patents

Electron-beam device having vacuum isolation film inside sample chamber

Info

Publication number
JPS5430773A
JPS5430773A JP9600877A JP9600877A JPS5430773A JP S5430773 A JPS5430773 A JP S5430773A JP 9600877 A JP9600877 A JP 9600877A JP 9600877 A JP9600877 A JP 9600877A JP S5430773 A JPS5430773 A JP S5430773A
Authority
JP
Japan
Prior art keywords
electron
beam device
sample chamber
isolation film
film inside
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9600877A
Other languages
Japanese (ja)
Inventor
Shinjiro Katagiri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9600877A priority Critical patent/JPS5430773A/en
Publication of JPS5430773A publication Critical patent/JPS5430773A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To make it possible to produce low vacuum at a fixing part and to prevent to prevent a sample mounted on a moving table from being contaminated by vacuum-separating the fixing part of the sample chamber constituting an electron-beam device from the moving table on which a sample is mounted by using an expansible airtight insulation film.
COPYRIGHT: (C)1979,JPO&Japio
JP9600877A 1977-08-12 1977-08-12 Electron-beam device having vacuum isolation film inside sample chamber Pending JPS5430773A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9600877A JPS5430773A (en) 1977-08-12 1977-08-12 Electron-beam device having vacuum isolation film inside sample chamber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9600877A JPS5430773A (en) 1977-08-12 1977-08-12 Electron-beam device having vacuum isolation film inside sample chamber

Publications (1)

Publication Number Publication Date
JPS5430773A true JPS5430773A (en) 1979-03-07

Family

ID=14153141

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9600877A Pending JPS5430773A (en) 1977-08-12 1977-08-12 Electron-beam device having vacuum isolation film inside sample chamber

Country Status (1)

Country Link
JP (1) JPS5430773A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006202654A (en) * 2005-01-21 2006-08-03 Horon:Kk Stage
JP2012064567A (en) * 2010-08-03 2012-03-29 Ebara Corp Electron beam inspection device having foreign substance attachment prevention function, and method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006202654A (en) * 2005-01-21 2006-08-03 Horon:Kk Stage
JP2012064567A (en) * 2010-08-03 2012-03-29 Ebara Corp Electron beam inspection device having foreign substance attachment prevention function, and method

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