JPS546171A - Dryer - Google Patents

Dryer

Info

Publication number
JPS546171A
JPS546171A JP7124577A JP7124577A JPS546171A JP S546171 A JPS546171 A JP S546171A JP 7124577 A JP7124577 A JP 7124577A JP 7124577 A JP7124577 A JP 7124577A JP S546171 A JPS546171 A JP S546171A
Authority
JP
Japan
Prior art keywords
dryer
substrates
revolver
damaging
atmospheric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7124577A
Other languages
Japanese (ja)
Inventor
Masaki Nakajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP7124577A priority Critical patent/JPS546171A/en
Publication of JPS546171A publication Critical patent/JPS546171A/en
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
  • Drying Of Solid Materials (AREA)

Abstract

PURPOSE: To dry semiconductor substrates sufficiently, without damaging them, by rotating the substrates on a high-speed revolver and reducing the pressure inside the dryer down below the atmospheric.
COPYRIGHT: (C)1979,JPO&Japio
JP7124577A 1977-06-15 1977-06-15 Dryer Pending JPS546171A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7124577A JPS546171A (en) 1977-06-15 1977-06-15 Dryer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7124577A JPS546171A (en) 1977-06-15 1977-06-15 Dryer

Publications (1)

Publication Number Publication Date
JPS546171A true JPS546171A (en) 1979-01-18

Family

ID=13455108

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7124577A Pending JPS546171A (en) 1977-06-15 1977-06-15 Dryer

Country Status (1)

Country Link
JP (1) JPS546171A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6415926A (en) * 1987-07-09 1989-01-19 Nec Corp Forming method of fine pattern
JPH0629278A (en) * 1992-04-27 1994-02-04 Chuo Riken:Kk Method of washing substrate and low pressure drier

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6415926A (en) * 1987-07-09 1989-01-19 Nec Corp Forming method of fine pattern
JPH0629278A (en) * 1992-04-27 1994-02-04 Chuo Riken:Kk Method of washing substrate and low pressure drier

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