JPS5483681A - Treating liquid circulation mechanism for coupled chemical treatment apparatus - Google Patents

Treating liquid circulation mechanism for coupled chemical treatment apparatus

Info

Publication number
JPS5483681A
JPS5483681A JP15053977A JP15053977A JPS5483681A JP S5483681 A JPS5483681 A JP S5483681A JP 15053977 A JP15053977 A JP 15053977A JP 15053977 A JP15053977 A JP 15053977A JP S5483681 A JPS5483681 A JP S5483681A
Authority
JP
Japan
Prior art keywords
liquid
receiver
circulation
treatment apparatus
coupled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15053977A
Other languages
Japanese (ja)
Other versions
JPS6041981B2 (en
Inventor
Masao Kaneko
Shozo Nohara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15053977A priority Critical patent/JPS6041981B2/en
Publication of JPS5483681A publication Critical patent/JPS5483681A/en
Publication of JPS6041981B2 publication Critical patent/JPS6041981B2/en
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

PURPOSE: To provide the title circulation mechanism by which sufficient circulation of a chemically treating liquid can be carried out by placing a receiver for the liquid sprayed in two or more chamical treatment apparatus coupled, and feeding the liquid in the receiver to other apparatus through circulation piping owing to a difference in liquid surface.
CONSTITUTION: Receiver 9 for chemically treating liquid 2 sprayed 5 is placed in coupled chemical treatment apparatus 1 at a position higher than the surface of liquid 2. Circulation piping 10 is extended from receiver 9 to other coupled apparatus 1 through connection pipe 6. With the constitution, liquid 2 is fed from receiver 9 to apparatus 1 owing to a difference in liquid surface and liquid 2 of the same amt. can be returned through pipe 6. Since spray pump 3 can also be used as a circulation pump, any circulation pump is not required. Piping 10 is all arranged in apparatus 1, and hence the apparatus can be made compact and a liquid leak does not occur.
COPYRIGHT: (C)1979,JPO&Japio
JP15053977A 1977-12-16 1977-12-16 Processing liquid circulation mechanism of connected chemical processing equipment Expired JPS6041981B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15053977A JPS6041981B2 (en) 1977-12-16 1977-12-16 Processing liquid circulation mechanism of connected chemical processing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15053977A JPS6041981B2 (en) 1977-12-16 1977-12-16 Processing liquid circulation mechanism of connected chemical processing equipment

Publications (2)

Publication Number Publication Date
JPS5483681A true JPS5483681A (en) 1979-07-03
JPS6041981B2 JPS6041981B2 (en) 1985-09-19

Family

ID=15499070

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15053977A Expired JPS6041981B2 (en) 1977-12-16 1977-12-16 Processing liquid circulation mechanism of connected chemical processing equipment

Country Status (1)

Country Link
JP (1) JPS6041981B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5876135A (en) * 1981-11-02 1983-05-09 Hitachi Ltd Mechanism for supplying chemical liquid

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6440891U (en) * 1987-09-05 1989-03-10

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5876135A (en) * 1981-11-02 1983-05-09 Hitachi Ltd Mechanism for supplying chemical liquid

Also Published As

Publication number Publication date
JPS6041981B2 (en) 1985-09-19

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