JPS5521156A - Electronic beam exposing system - Google Patents

Electronic beam exposing system

Info

Publication number
JPS5521156A
JPS5521156A JP9420278A JP9420278A JPS5521156A JP S5521156 A JPS5521156 A JP S5521156A JP 9420278 A JP9420278 A JP 9420278A JP 9420278 A JP9420278 A JP 9420278A JP S5521156 A JPS5521156 A JP S5521156A
Authority
JP
Japan
Prior art keywords
signal
rom
letter
computer
electronic beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9420278A
Other languages
Japanese (ja)
Other versions
JPS5726408B2 (en
Inventor
Toshihiko Osada
Haruo Tsuchikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP9420278A priority Critical patent/JPS5521156A/en
Publication of JPS5521156A publication Critical patent/JPS5521156A/en
Publication of JPS5726408B2 publication Critical patent/JPS5726408B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. program control

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE:To raise a drawing speed in reduction of the data amount transfered from an electronic computer by using for an electronic beam exposing device a read-only memory (ROM) for generating a letter signal or a mark signal. CONSTITUTION:A ROM 16 for generating a letter and mark signal is provided in an electronic beam exposing device, the address of a desired letter or mark is addressed by a signal from the computer and a signal for selecting the column and low of the letter and mark is generated by decoding the output from a counter 8 provided in a clock 7 to be applied to the ROM 16, a blanker 21 is operated by that output to achieve an on-off control for the electronic beam. According to such a process, the data amount to be obtained from the computer is remarkably reduced, the development of a computer soft phase is not necessary, and a hard ware with a high reliability and well simplification can be developed by utilizing the ROM.
JP9420278A 1978-08-02 1978-08-02 Electronic beam exposing system Granted JPS5521156A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9420278A JPS5521156A (en) 1978-08-02 1978-08-02 Electronic beam exposing system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9420278A JPS5521156A (en) 1978-08-02 1978-08-02 Electronic beam exposing system

Publications (2)

Publication Number Publication Date
JPS5521156A true JPS5521156A (en) 1980-02-15
JPS5726408B2 JPS5726408B2 (en) 1982-06-04

Family

ID=14103705

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9420278A Granted JPS5521156A (en) 1978-08-02 1978-08-02 Electronic beam exposing system

Country Status (1)

Country Link
JP (1) JPS5521156A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01130445U (en) * 1988-02-23 1989-09-05

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5333584A (en) * 1973-09-19 1978-03-29 Ibm Device for controlling charged beam

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5333584A (en) * 1973-09-19 1978-03-29 Ibm Device for controlling charged beam

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01130445U (en) * 1988-02-23 1989-09-05

Also Published As

Publication number Publication date
JPS5726408B2 (en) 1982-06-04

Similar Documents

Publication Publication Date Title
JPS52123137A (en) Duplication memory control unit
JPS5521156A (en) Electronic beam exposing system
JPS5412641A (en) Input method for computer numeral controller
JPS5250641A (en) Character pattern generating device
JPS5232647A (en) Interruption system of electronic computer
JPS57182869A (en) Document processing device
JPS52155518A (en) Electronic musical instrument
JPS5416957A (en) Computer system for process control
JPS53141611A (en) Keying system of electronic musical instrument
JPS5386541A (en) Control unit
JPS57157165A (en) Pattern generator
JPS5576438A (en) Display unit
JPS5372545A (en) Information processor
JPS5383608A (en) Wave generator for electronic musical instruments
JPS5453835A (en) Character pattern generation system
JPS53142137A (en) Memory control unit
JPS524226A (en) Keyboard input unit
JPS6482147A (en) Memory access control system
JPS5418628A (en) Display signal generating method other than numerical value
JPS5515509A (en) Cursor controller for document editing process
JPS5374856A (en) Data process system
JPS6453861A (en) Character data output apparatus
JPS5374023A (en) Play control system
JPS52156526A (en) Controller of externally connected arithmetic circuit
JPS54152440A (en) Microprogram controller