JPS5559435A - Electrochromic display device - Google Patents
Electrochromic display deviceInfo
- Publication number
- JPS5559435A JPS5559435A JP13195178A JP13195178A JPS5559435A JP S5559435 A JPS5559435 A JP S5559435A JP 13195178 A JP13195178 A JP 13195178A JP 13195178 A JP13195178 A JP 13195178A JP S5559435 A JPS5559435 A JP S5559435A
- Authority
- JP
- Japan
- Prior art keywords
- film
- display device
- resist
- insulation film
- tungsten oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009413 insulation Methods 0.000 abstract 4
- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 abstract 3
- 229910001930 tungsten oxide Inorganic materials 0.000 abstract 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 229910003437 indium oxide Inorganic materials 0.000 abstract 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 abstract 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
- 238000007740 vapor deposition Methods 0.000 abstract 1
Landscapes
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
Abstract
PURPOSE: To eliminate blackening, disconnection, etc. of transparent conductive films and form the EC display device of superior display grade by providing an insulation film on the EC film interface in the electrochromic (EC) display device.
CONSTITUTION: A tungsten oxide film 4 of about 5000Å in film thickness is formed through vapor deposition, sputtering, etc. on a glass substrate formed with the patterns of a transparent conductive film 2 composed of indium oxide, after which rerist 5 of display pattern shape is formed thereon. Next, with resist 5 as a mask, the tungsten oxide film 4 is etched, after which an insulation film 3 composed of SiO2, MgF2, etc. of about 3000W5000Å in film thickness is formed over the entire surface of the substrate 1. Next, the insulation film 3 is selectively removed by making combined use of the resist for etching the tungsten oxide also as resist for lifting the insulation film, whereby the ED display device is obtained.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13195178A JPS5559435A (en) | 1978-10-25 | 1978-10-25 | Electrochromic display device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13195178A JPS5559435A (en) | 1978-10-25 | 1978-10-25 | Electrochromic display device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5559435A true JPS5559435A (en) | 1980-05-02 |
| JPS6327691B2 JPS6327691B2 (en) | 1988-06-03 |
Family
ID=15070014
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13195178A Granted JPS5559435A (en) | 1978-10-25 | 1978-10-25 | Electrochromic display device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5559435A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05917U (en) * | 1990-12-03 | 1993-01-08 | 保昭 木村 | Exhaust gas purifier |
-
1978
- 1978-10-25 JP JP13195178A patent/JPS5559435A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05917U (en) * | 1990-12-03 | 1993-01-08 | 保昭 木村 | Exhaust gas purifier |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6327691B2 (en) | 1988-06-03 |
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