JPS5583227A - Epitaxial growing - Google Patents

Epitaxial growing

Info

Publication number: JPS5583227A
Authority: JP; Japan
Prior art keywords: layer; epitaxial; epitaxial growing; conventional method; growing
Prior art date: 1978-12-20
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

JP15972078A

Other languages

English (en)

Inventor

Masahiro Kuwagata

Katsufumi Kaminuma

Toshio Kimura

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Panasonic Holdings Corp

Original Assignee

Matsushita Electronics Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1978-12-20

Filing date

1978-12-20

Publication date

1980-06-23

1978-12-20 Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp

1978-12-20 Priority to JP15972078A priority Critical patent/JPS5583227A/ja

1980-06-23 Publication of JPS5583227A publication Critical patent/JPS5583227A/ja

Status Pending legal-status Critical Current

Links

239000000758 substrate Substances 0.000 abstract 3
238000007796 conventional method Methods 0.000 abstract 2
239000012535 impurity Substances 0.000 abstract 1
238000002955 isolation Methods 0.000 abstract 1

Landscapes

Semiconductor Integrated Circuits (AREA)

JP15972078A 1978-12-20 1978-12-20 Epitaxial growing Pending JPS5583227A (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP15972078A JPS5583227A (en)	1978-12-20	1978-12-20	Epitaxial growing

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP15972078A JPS5583227A (en)	1978-12-20	1978-12-20	Epitaxial growing

Publications (1)

Publication Number	Publication Date
JPS5583227A true JPS5583227A (en)	1980-06-23

Family

ID=15699798

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP15972078A Pending JPS5583227A (en)	1978-12-20	1978-12-20	Epitaxial growing

Country Status (1)

Country	Link
JP (1)	JPS5583227A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5927521A (ja) *	1982-08-06	1984-02-14	Hitachi Ltd	半導体基体の製法
JPH01318265A (ja) *	1988-05-02	1989-12-22	Delco Electron Corp	モノリシック感圧集積回路及びその製造方法

1978
- 1978-12-20 JP JP15972078A patent/JPS5583227A/ja active Pending

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5927521A (ja) *	1982-08-06	1984-02-14	Hitachi Ltd	半導体基体の製法
JPH01318265A (ja) *	1988-05-02	1989-12-22	Delco Electron Corp	モノリシック感圧集積回路及びその製造方法

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