JPS5595263A - X-ray analyzer - Google Patents

X-ray analyzer

Info

Publication number
JPS5595263A
JPS5595263A JP131779A JP131779A JPS5595263A JP S5595263 A JPS5595263 A JP S5595263A JP 131779 A JP131779 A JP 131779A JP 131779 A JP131779 A JP 131779A JP S5595263 A JPS5595263 A JP S5595263A
Authority
JP
Japan
Prior art keywords
dispersion type
incident
energy dispersion
characteristic
ray quantity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP131779A
Other languages
Japanese (ja)
Inventor
Tadashi Otaka
Kimio Kanda
Minoru Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP131779A priority Critical patent/JPS5595263A/en
Publication of JPS5595263A publication Critical patent/JPS5595263A/en
Pending legal-status Critical Current

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  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE: To enable at the same time the energy dispersion type detection and the wavelength dispersion type detection, by providing a stop means for limiting the incident X-ray quantity in the energy dispersion type detector and making the sensitivities equal for the energy dispersion type and wavelength dispersion type detectors.
CONSTITUTION: Characteristic X-rays 3 emitted from a specimen 2 irradiated by an electron beam 1 are detected by a wavelength dispersion type detector consisting of a spectroscopic crystal 4, a slit 5, and a proportional counter 6. On the other hand, the characteristic X-rays 3 are detected by an energy dispersion type detector consisting of a stop means 8 for limiting the incident X-ray quantity and a semiconductor detector 7. Thus, when the electron beam 1 is adjusted to provide a suitable electron current, the energy dispersion type detection and the wavelength dispersion type detection can simultaneously be carried out by suitably adjusting the characteristic X-ray quantity incident on the semiconductor detector 7 using the stop means 8 for limiting the incident X-ray quantity.
COPYRIGHT: (C)1980,JPO&Japio
JP131779A 1979-01-12 1979-01-12 X-ray analyzer Pending JPS5595263A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP131779A JPS5595263A (en) 1979-01-12 1979-01-12 X-ray analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP131779A JPS5595263A (en) 1979-01-12 1979-01-12 X-ray analyzer

Publications (1)

Publication Number Publication Date
JPS5595263A true JPS5595263A (en) 1980-07-19

Family

ID=11498110

Family Applications (1)

Application Number Title Priority Date Filing Date
JP131779A Pending JPS5595263A (en) 1979-01-12 1979-01-12 X-ray analyzer

Country Status (1)

Country Link
JP (1) JPS5595263A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5764155A (en) * 1980-10-07 1982-04-19 Rigaku Denki Kogyo Kk Fluorescent x-ray analyzer
JPS6193938A (en) * 1984-10-13 1986-05-12 Jeol Ltd Analysis of sample by electron microscope for analysis or the like
JPS62149157U (en) * 1986-03-14 1987-09-21

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5764155A (en) * 1980-10-07 1982-04-19 Rigaku Denki Kogyo Kk Fluorescent x-ray analyzer
JPS6193938A (en) * 1984-10-13 1986-05-12 Jeol Ltd Analysis of sample by electron microscope for analysis or the like
JPS62149157U (en) * 1986-03-14 1987-09-21

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