JPS5596710A - Production of crystal vibrator - Google Patents
Production of crystal vibratorInfo
- Publication number
- JPS5596710A JPS5596710A JP457979A JP457979A JPS5596710A JP S5596710 A JPS5596710 A JP S5596710A JP 457979 A JP457979 A JP 457979A JP 457979 A JP457979 A JP 457979A JP S5596710 A JPS5596710 A JP S5596710A
- Authority
- JP
- Japan
- Prior art keywords
- metallic thin
- thin films
- resistor
- etching
- vibrator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 title abstract 5
- 239000010409 thin film Substances 0.000 abstract 8
- 239000000463 material Substances 0.000 abstract 5
- 238000005530 etching Methods 0.000 abstract 3
- 230000008020 evaporation Effects 0.000 abstract 2
- 238000001704 evaporation Methods 0.000 abstract 2
- 239000007788 liquid Substances 0.000 abstract 2
- 238000000059 patterning Methods 0.000 abstract 1
- 238000001259 photo etching Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
PURPOSE:To mass-produce minute electrode patterns precisely with a good yield by using a resistor material at an etching time of a crystal wafer as a mask for electrode forming. CONSTITUTION:Etching-proof metallic thin films 6 and 7 are formed on crystal wafer 5 by evaporation, etc., and this wafer is subjected to photo etching into a tuning fork vibrator form, and after that, metallic thin films 6 and 7 in the part other than this form are removed, and resistor liquid 8 is applied to left metallic thin films 6 and 7, and patterning is so performed that the resistor may be left in the part where the crystal material is exposed finally, and the obtained material is soaked into etching liquid to obtain a tuning fork crystal vibrator 1. Next, metallic thin films 6 and 7 are removed, and metallic thin films 10 and 11 for electrode and material 12 (different from metallic thin film 7 in etching characteristic) are caused to adhere to vibrator 1 by evaporation, and resistor 8 and the thin film on resistor 8 are removed by lift-off, and finally, metallic thin films 6 and 7 and material 12 are removed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP457979A JPS5596710A (en) | 1979-01-17 | 1979-01-17 | Production of crystal vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP457979A JPS5596710A (en) | 1979-01-17 | 1979-01-17 | Production of crystal vibrator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5596710A true JPS5596710A (en) | 1980-07-23 |
Family
ID=11587936
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP457979A Pending JPS5596710A (en) | 1979-01-17 | 1979-01-17 | Production of crystal vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5596710A (en) |
-
1979
- 1979-01-17 JP JP457979A patent/JPS5596710A/en active Pending
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