JPS56130066A - Photographing method of microscope image on electron microscope - Google Patents

Photographing method of microscope image on electron microscope

Info

Publication number
JPS56130066A
JPS56130066A JP3353680A JP3353680A JPS56130066A JP S56130066 A JPS56130066 A JP S56130066A JP 3353680 A JP3353680 A JP 3353680A JP 3353680 A JP3353680 A JP 3353680A JP S56130066 A JPS56130066 A JP S56130066A
Authority
JP
Japan
Prior art keywords
electron ray
target field
test specimen
irradiation
switch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3353680A
Other languages
English (en)
Other versions
JPS6120108B2 (ja
Inventor
Yukihisa Ishida
Yoshiyasu Harada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP3353680A priority Critical patent/JPS56130066A/ja
Publication of JPS56130066A publication Critical patent/JPS56130066A/ja
Publication of JPS6120108B2 publication Critical patent/JPS6120108B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP3353680A 1980-03-17 1980-03-17 Photographing method of microscope image on electron microscope Granted JPS56130066A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3353680A JPS56130066A (en) 1980-03-17 1980-03-17 Photographing method of microscope image on electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3353680A JPS56130066A (en) 1980-03-17 1980-03-17 Photographing method of microscope image on electron microscope

Publications (2)

Publication Number Publication Date
JPS56130066A true JPS56130066A (en) 1981-10-12
JPS6120108B2 JPS6120108B2 (ja) 1986-05-20

Family

ID=12389276

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3353680A Granted JPS56130066A (en) 1980-03-17 1980-03-17 Photographing method of microscope image on electron microscope

Country Status (1)

Country Link
JP (1) JPS56130066A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6800853B2 (en) 2000-11-16 2004-10-05 Jeol Ltd. Electron microscope and method of photographing TEM images

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6800853B2 (en) 2000-11-16 2004-10-05 Jeol Ltd. Electron microscope and method of photographing TEM images

Also Published As

Publication number Publication date
JPS6120108B2 (ja) 1986-05-20

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