JPS5651823A - Liquid-phase growth apparatus - Google Patents

Liquid-phase growth apparatus

Info

Publication number
JPS5651823A
JPS5651823A JP12812879A JP12812879A JPS5651823A JP S5651823 A JPS5651823 A JP S5651823A JP 12812879 A JP12812879 A JP 12812879A JP 12812879 A JP12812879 A JP 12812879A JP S5651823 A JPS5651823 A JP S5651823A
Authority
JP
Japan
Prior art keywords
liquid
substrates
chamber
growth
growth apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12812879A
Other languages
Japanese (ja)
Inventor
Toshio Sogo
Susumu Yoshida
Kotaro Mitsui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP12812879A priority Critical patent/JPS5651823A/en
Publication of JPS5651823A publication Critical patent/JPS5651823A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00—Liquid-phase epitaxial-layer growth
    • C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
    • C30B19/063—Sliding boat system

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Led Devices (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

PURPOSE:To permit a large number of substrates to be produced at a time by providing upper and lower slide plate each slidably penetrating a liquid growth apparatus body, and a mounting portion on which a plurality of substrates are placed in parallel in the space inside the apparatus body between the slide plates. CONSTITUTION:A plurality of substrates 3 are placed in parallel on a substrate holder 13 in a growth chamber. Sliders 7 and 8 are penetrated through a boat body, and a liquid chamber 10 is filled with a liquid. Then, this liquid growth apparatus is heated to a given temperature. A control rod 14 is pulled in the direction of an arrow so that slits 7a are right below the liquid chamber 10 in order to allow the liquid to drop into a growth chamber 11 and to contact with the substrates 3. When the liquid growth is finished, the control rod 14 is moreover pulled in the arrow direction. This causes a hook-shaped end 7c of the slider 7 to hook and move the slider 8, so that a hole 8a is right below the growth chamber 11. During said operation, all of the liquid in the growth chamber 11 drop in a receiving chamber 12. Thus, a large number of substrates can be produced at a time.
JP12812879A 1979-10-04 1979-10-04 Liquid-phase growth apparatus Pending JPS5651823A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12812879A JPS5651823A (en) 1979-10-04 1979-10-04 Liquid-phase growth apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12812879A JPS5651823A (en) 1979-10-04 1979-10-04 Liquid-phase growth apparatus

Publications (1)

Publication Number Publication Date
JPS5651823A true JPS5651823A (en) 1981-05-09

Family

ID=14977079

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12812879A Pending JPS5651823A (en) 1979-10-04 1979-10-04 Liquid-phase growth apparatus

Country Status (1)

Country Link
JP (1) JPS5651823A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57159565A (en) * 1981-02-25 1982-10-01 Nordson Corp Electrostatic powder coating method and its device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57159565A (en) * 1981-02-25 1982-10-01 Nordson Corp Electrostatic powder coating method and its device

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