JPS5687442A - Centrifugal dryer - Google Patents
Centrifugal dryerInfo
- Publication number
- JPS5687442A JPS5687442A JP16410679A JP16410679A JPS5687442A JP S5687442 A JPS5687442 A JP S5687442A JP 16410679 A JP16410679 A JP 16410679A JP 16410679 A JP16410679 A JP 16410679A JP S5687442 A JPS5687442 A JP S5687442A
- Authority
- JP
- Japan
- Prior art keywords
- rotary cage
- substances
- substance
- semiconductor wafer
- rotating speed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Centrifugal Separators (AREA)
Abstract
PURPOSE: To lessen the disintegration of substances as well as easily attain rotation balance with less vibration by attaching an air blower to a centrifugal dryer to dry moisture contained in substances and lowering the rotating speed of the dryer.
CONSTITUTION: A carrier on which a substance, e.g., semiconductor wafer, etc., is loaded is set on a setting base 6, a cover 10 is closed, and a rotary cage 3 is turned at a turning rate of 1,000times/min or so by rotating a driving motor 1. Thereby, liquid ahered to the substance is scattered and drying is performed. On the other hand, clean air passing through a filter 9 is sent through an inlet pipe 5 by an air blower 4 to the center of the rotary cage 3, where the clean air delivers a large amount of moisture and fine dust and then is discharged through an exhaust port 8 after being rectified by an air rectifying plate 7. Thus, since drying efficiency is raised and the rotary cage 3 is lowered in its rotating speed, damage, e.g., destruction, etc., to semiconductor wafer, etc., can be lessened.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16410679A JPS5687442A (en) | 1979-12-19 | 1979-12-19 | Centrifugal dryer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16410679A JPS5687442A (en) | 1979-12-19 | 1979-12-19 | Centrifugal dryer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5687442A true JPS5687442A (en) | 1981-07-16 |
Family
ID=15786865
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16410679A Pending JPS5687442A (en) | 1979-12-19 | 1979-12-19 | Centrifugal dryer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5687442A (en) |
-
1979
- 1979-12-19 JP JP16410679A patent/JPS5687442A/en active Pending
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