JPS5736761A - Scan type electron microscope - Google Patents

Scan type electron microscope

Info

Publication number
JPS5736761A
JPS5736761A JP11028080A JP11028080A JPS5736761A JP S5736761 A JPS5736761 A JP S5736761A JP 11028080 A JP11028080 A JP 11028080A JP 11028080 A JP11028080 A JP 11028080A JP S5736761 A JPS5736761 A JP S5736761A
Authority
JP
Japan
Prior art keywords
point
bright
line
specimen
display
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11028080A
Other languages
Japanese (ja)
Other versions
JPS6016062B2 (en
Inventor
Osamu Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP55110280A priority Critical patent/JPS6016062B2/en
Publication of JPS5736761A publication Critical patent/JPS5736761A/en
Publication of JPS6016062B2 publication Critical patent/JPS6016062B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To enable the X-ray analysis by scanning the specific area on the surface of a specimen and indicating the image while indicating the bright point or the bright line on the display face thus enabling the analysis of the corresponding portion of the specimen thereby setting the analyzing point correctly with high efficiency. CONSTITUTION:The specific area in the scanning region on the surface of a specimen is scanned to display the image in said specific region at the corresponding specific portion of the display face 1 while to display the bright point or line having variable position at the specific portion on the display face 1. Furthermore the analysis such as the characteristic X-ray analysis is performed on the point or line on the surface of the specimen corresponding with said bright point or line. For example, an elongated or rectangular display area as shown by the hatched section is formed on the image face 1 of a cathode ray tube for displaying the specimen image, then the horizontal blight lines 2 or 2' and the vertical bright lines 3 or 3' are set in said region. Then the bright line 2 and the cross point of the bright lines are corresponded respectively to the line analyzing position and the point analyzing position.
JP55110280A 1980-08-13 1980-08-13 scanning electron microscope Expired JPS6016062B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55110280A JPS6016062B2 (en) 1980-08-13 1980-08-13 scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55110280A JPS6016062B2 (en) 1980-08-13 1980-08-13 scanning electron microscope

Publications (2)

Publication Number Publication Date
JPS5736761A true JPS5736761A (en) 1982-02-27
JPS6016062B2 JPS6016062B2 (en) 1985-04-23

Family

ID=14531681

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55110280A Expired JPS6016062B2 (en) 1980-08-13 1980-08-13 scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS6016062B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6193938A (en) * 1984-10-13 1986-05-12 Jeol Ltd Analysis of sample by electron microscope for analysis or the like

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61161475U (en) * 1985-03-29 1986-10-06

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6193938A (en) * 1984-10-13 1986-05-12 Jeol Ltd Analysis of sample by electron microscope for analysis or the like

Also Published As

Publication number Publication date
JPS6016062B2 (en) 1985-04-23

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