JPS5763765A - Super-high voltage discharge lamp - Google Patents

Super-high voltage discharge lamp

Info

Publication number
JPS5763765A
JPS5763765A JP13588680A JP13588680A JPS5763765A JP S5763765 A JPS5763765 A JP S5763765A JP 13588680 A JP13588680 A JP 13588680A JP 13588680 A JP13588680 A JP 13588680A JP S5763765 A JPS5763765 A JP S5763765A
Authority
JP
Japan
Prior art keywords
mercury
contracted
discharge
enclosed
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13588680A
Other languages
Japanese (ja)
Inventor
Takashi Fujimura
Yoshifumi Tomita
Kiyoshi Saruwatari
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FUJI KOKEN KK
Hitachi Ltd
Original Assignee
FUJI KOKEN KK
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FUJI KOKEN KK, Hitachi Ltd filed Critical FUJI KOKEN KK
Priority to JP13588680A priority Critical patent/JPS5763765A/en
Priority to US06/306,714 priority patent/US4482842A/en
Publication of JPS5763765A publication Critical patent/JPS5763765A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/82—Lamps with high-pressure unconstricted discharge having a cold pressure > 400 Torr
    • H01J61/822—High-pressure mercury lamps

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)

Abstract

PURPOSE:To set an exact amount of the enclosed mercury so as to stabilize a discharge, by forming a contracted area of smaller diameter on the inside walls of both ends of an arc-shaped glass tube and enclosing mercury in the space toward the end from the contracted areas. CONSTITUTION:A discharge portion 1a is provided by forming about 130 deg. range of a quartz made glass tube 1 into a circular arc shape, and electrode portions 1b are formed on its both ends. Furthermore, a contracted portion 1c projecting to the circumferential direaction is formed on the predetermined position of the inside wall of each electrode portion 1b, mercury 3 is enclosed in a section toward each end of the tube 1 from each contracted portion 1c, and an electrode 2 is provided, while allowing it to project by 0.7-1.0mm. into the inside of the tube from each surface of mercury 3. Then, plasma arc is generated to carry on discharge, by applying an electric field of 20-100V/mm. potential gradient to the space between electrodes 2, 2. Thereby, the quantity of enclosed mercury 3 can be set exactly by the contracted portions 1c, and the lamp current can be stabilized during a discharge.
JP13588680A 1980-10-01 1980-10-01 Super-high voltage discharge lamp Pending JPS5763765A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP13588680A JPS5763765A (en) 1980-10-01 1980-10-01 Super-high voltage discharge lamp
US06/306,714 US4482842A (en) 1980-10-01 1981-09-29 Curved tube type ultra high pressure mercury arc discharge lamp device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13588680A JPS5763765A (en) 1980-10-01 1980-10-01 Super-high voltage discharge lamp

Publications (1)

Publication Number Publication Date
JPS5763765A true JPS5763765A (en) 1982-04-17

Family

ID=15162079

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13588680A Pending JPS5763765A (en) 1980-10-01 1980-10-01 Super-high voltage discharge lamp

Country Status (1)

Country Link
JP (1) JPS5763765A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006335534A (en) * 2005-06-03 2006-12-14 Chugoku Electric Power Co Inc:The Mounting vehicle equipped with telescopic boom

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006335534A (en) * 2005-06-03 2006-12-14 Chugoku Electric Power Co Inc:The Mounting vehicle equipped with telescopic boom

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