JPS6020276Y2 - Sample position detection device for electron microscopes, etc. - Google Patents

Description

[Detailed Description of the Invention] The present invention relates to an apparatus that can accurately detect the position of a sample in an electron microscope or the like.

To find the sample position in an electron microscope, you can either read the scale engraved on the knob of the sample moving mechanism, or introduce the position signal from the potentiometer linked to the knob into the oscilloscope, and check the bright spot on the screen of the oscilloscope. Judgment is made based on location.

However, in such a detection method, the amount of rotation of the knob and the actual amount of movement of the sample moving stage do not accurately match due to backlash in the sample moving mechanism, and therefore, the exact position of the sample cannot be determined.

The present invention aims to solve such inconveniences, and will be explained in detail below with reference to the drawings.

The attached drawings are schematic diagrams showing an embodiment of the present invention.
is a sample moving table placed in the mirror body 2 so as to be horizontally movable.

A sample cylinder 3 holding a sample is detachably attached to the center of the sample moving stage 1.

4 is a sample moving mechanism for moving the sample moving table 1 in the X and Y directions, and a manual knob 5X.

Motors 7X, 7 via 5Y and clutches 6X, 6Y
Y is provided.

Reference numerals 8 and 9 indicate leaf springs whose one ends are respectively fixed to the mirror body 2, and the other ends of the leaf springs are brought into contact with contact surfaces 10 and 11 provided on the sample moving stage 1, respectively.

The contact surface 10 is located in a plane y-y' that includes the optical axis 2, and the contact surface 11 is located in a plane X-X' that intersects the plane y-y' at right angles on the optical axis Z. .

Semiconductor strain detection elements 12 and 13 whose resistance changes according to applied strain are attached to the side surfaces of both leaf springs 8 and 9, respectively, and changes in internal resistance of the two-handed conductor strain detection elements 12 and 13 are attached. is detected by detection circuits 14.15.

The obtained detection signal is supplied to the X and Y direction deflection plates 17 and 18 of the oscilloscope 16.

On the other hand, the detection signal is also supplied to the computer 19, which refers to the detection signal and controls the motor 7 of the sample moving mechanism 4 according to a predetermined program.
Controls X and 7Y.

In such an apparatus, the knobs 5X, 5 of the sample moving mechanism 4
Y (at this time, sample moving mechanism 4 and motors 7X, 7
If the sample moving stage 1 is moved, for example, in the X direction by
It bends as it moves.

At this time, only slippage occurs between the leaf spring 9 and the contact surface 11, and no force that causes the leaf spring 9 to bend is applied.

As a result, a strain corresponding to the deflection of the leaf spring 8 is applied to the semiconductor strain detection element, so that a resistance change occurs in the semiconductor strain detection element according to the strain (amount of movement), and this resistance change is detected by the detection circuit 14. Ru.

Furthermore, when the sample moving table 1 is moved in the Y direction, the plate spring 9 is bent, so that a resistance change occurs in the semiconductor strain detection element 13, and the resistance change is detected by the detection circuit 15.

Here, since the amount of deflection of the leaf springs 8 and 9 is considered to be proportional to the amount of movement of the sample moving table in a small range, it can be said that the detection signal corresponds to the amount of movement of the sample moving table (sample position). .

That is, the detection signals of the detection circuits 14 and 15 give the sample position in the X and Y directions, respectively, and if these detection signals are supplied to the X and Y direction deflection plates 17 and 18 of the oscilloscope, the sample will be located on both sides. A bright spot is displayed at a position corresponding to the position.

Therefore, the operator can accurately move the sample to a desired position by operating the knobs 5X and 5Y of the sample moving mechanism 4 while observing the bright spot on the screen of the oscilloscope 16.

On the other hand, when automatically setting the sample position, motor 7X
and 7Y to the sample moving mechanism 4 via clutches 6X and 6Y.
If the computer 19 controls the motors 7X and 7Y based on the detection signal, the sample can be accurately moved to a pre-stored sample position.

As described above, the present invention has an extremely simple configuration, can accurately detect the position of a sample, and is highly practical.

In the above explanation, the contact surfaces 10 and 11 formed on the sample moving stage 1 were placed within the planes X-X' and y-y', respectively, which include the optical axis 2, but they do not necessarily have to coincide with each other and can be placed within the plane. It may be anywhere as long as it is parallel to the planes X-X' and y-y', respectively.

In addition, although it has been described that one end of the leaf springs 8 and 9 is fixed to the mirror body 2 side, and the other end is brought into contact with the contact surface formed on the sample moving table,
This relationship may be reversed, that is, one end of the leaf spring may be fixed to the sample moving table side, and the other end may be brought into contact with a contact surface formed on the mirror body.

Furthermore, although a sample device of the type in which the sample is inserted from the optical axis direction has been shown, the present invention can also be implemented in a sample device of the type in which the sample is inserted from the direction perpendicular to the optical axis.

[Brief explanation of the drawing]

The accompanying drawings are schematic diagrams showing an embodiment of the present invention. 1: Sample moving table, 2: Mirror body, 3: Sample tube, 4: Sample moving mechanism, 5X and 5Y: Knob, 6X, 6Y: Clutch,
7X and 7Y: Motor, 8 and 9: Leaf spring, 10 and 11: Contact surface, 12 and 13: Semiconductor strain detection element, 14
and 15: detection circuit, 16: oscilloscope, 17 and 18: X and Y direction deflection plate, 19: computer.

Claims (1)

[Scope of utility model registration request] a moving member that holds the sample and is horizontally movable;
two sets of sample moving mechanisms for respectively moving the moving member in two orthogonal directions about the optical axis, the moving member or the mirror being parallel to the two orthogonal moving directions of the moving member. Two plate-shaped elastic bodies are provided, each of which has a plane shape and are arranged parallel to each plane, one end of each lateral body is fixed to one of the mirror body or the movable member, and the other end is fixed to the mirror body or one of the movable members. By attaching an element whose internal resistance changes according to the strain applied to each of the elastic bodies in contact with the plane of the body or the movable member, and causing each of the elastic bodies to bend as the movable member moves. A sample position detection device for an electron microscope, etc., which is provided with means for detecting changes in internal resistance of an element.