JPS60261016A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPS60261016A JPS60261016A JP59115925A JP11592584A JPS60261016A JP S60261016 A JPS60261016 A JP S60261016A JP 59115925 A JP59115925 A JP 59115925A JP 11592584 A JP11592584 A JP 11592584A JP S60261016 A JPS60261016 A JP S60261016A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic recording
- recording medium
- present
- magnetic
- tape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Compositions Of Macromolecular Compounds (AREA)
- Magnetic Record Carriers (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
産業上の利用分野
本発明は高密度磁気記録に適する磁気記録媒体に関する
。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a magnetic recording medium suitable for high-density magnetic recording.
従来例の構成とその問題点
近年、磁気記録の高密度化は狭トラツク化と、同時に記
録波長の短縮化により進められてきているが、記録波長
が短かくなり、1μm以下になり、スペーシング損失が
大きく影響するようになるため、表面粗さに制約が生じ
、最大でも500八以下にする必要が生じると共に、短
波長での損失を減らすために磁気記録媒体は、磁気記録
層を薄膜化することと、強磁硅金属で構成することが不
可欠となってきfcため、かかる媒体の開発が各方面で
進められるようになった。Conventional structure and its problems In recent years, advances in increasing the density of magnetic recording have been made by narrowing the track and at the same time shortening the recording wavelength. As loss becomes a significant influence, surface roughness is restricted and needs to be less than 500 octane at most, and in order to reduce loss at short wavelengths, the magnetic recording layer of magnetic recording media must be made thinner. Since it has become essential to use ferromagnetic silica metal, the development of such media has progressed in various fields.
その中にちって、現在量も磁気テープとしての性能にま
とまりのあるものは、斜め蒸着法により得られft−C
o系の部分酸化膜を磁気記録層とするものであるが、高
密度化を進める前提となる合金系ヘッドとの相性が必ず
しも十分とはいえない0即ち、耐湿テスト後の磁気テー
プをセンダスト合金ヘッドや、アモルファス合金ヘッド
で記録再生すると、フェライトヘッドで記録再生するよ
うに安定に再生出力が得られないことがあり、改良が望
まれていた。Among them, the current amount of ft-C tape with consistent performance as a magnetic tape is obtained by oblique evaporation method.
The magnetic recording layer is an o-based partial oxide film, but it is not necessarily compatible with alloy heads, which are a prerequisite for increasing density. When recording and reproducing with a head or an amorphous alloy head, a stable reproduction output may not be obtained as with recording and reproducing with a ferrite head, and an improvement has been desired.
発明の目的
本発明は上記事情に鑑みなされたものであり、高密度領
域で安定した再生出力を得ることができる磁気記録媒体
を提供することを目的とする。OBJECTS OF THE INVENTION The present invention has been made in view of the above circumstances, and an object thereof is to provide a magnetic recording medium that can obtain stable reproduction output in a high-density region.
発明の構成
本発明の磁気記録媒体は、部分酸化膜を磁気記録層とし
、且つ表面にCrが偏在していることを特徴とし、高密
度領域での再生出力が安定しているものである。Structure of the Invention The magnetic recording medium of the present invention is characterized in that the magnetic recording layer is a partially oxidized film, and Cr is unevenly distributed on the surface, and the reproduction output in a high density region is stable.
実施例の説明
以下図面を参照しながら本発明を説明する0第1図は、
本発明の磁気記録媒体の部分拡大断面図、第2図は本発
明の磁気記録媒体を得るために用いた蒸着装置の要部構
成図である。DESCRIPTION OF THE EMBODIMENTS The present invention will be described below with reference to the drawings.
FIG. 2 is a partially enlarged cross-sectional view of the magnetic recording medium of the present invention, and is a diagram showing the main part of a vapor deposition apparatus used to obtain the magnetic recording medium of the present invention.
第1図で1は高分子基板、2はミミズ状隆起層、3は磁
気記録層を構成する強磁性薄膜で、部分酸化された微結
晶4と、Crが偏析した微結晶5と 。In FIG. 1, 1 is a polymer substrate, 2 is a worm-like raised layer, and 3 is a ferromagnetic thin film constituting a magnetic recording layer, which includes partially oxidized microcrystals 4 and Cr-segregated microcrystals 5.
から成、っている0
第2図で、6は円筒状キャン、了は基板、8は送り出し
軸、9は巻取り軸、10は蒸発源容器、11は蒸着材料
で、12はCr供給用イオン源、13はマスクで、14
は模式的に示した入射角900からθmipまでの蒸気
流である。In Fig. 2, 6 is a cylindrical can, 9 is a substrate, 8 is a delivery shaft, 9 is a winding shaft, 10 is an evaporation source container, 11 is a vapor deposition material, and 12 is for Cr supply. ion source, 13 is a mask, 14
is a steam flow schematically shown from an incident angle of 900 to θmip.
本発明で用いることの出来る高分子基板は、ポリエチレ
ンテレフタレート等のポリエステル類。The polymer substrate that can be used in the present invention is polyester such as polyethylene terephthalate.
ポリプロピレン等のポリオレフィン類、セルローストリ
アセテート等のセルロース誘導体、ポリアミドイミド、
ポリアミド、ポリエーテルスルフォン、ポリバラパニッ
ク酸、ポリイミド等で、あらかじめミミズ状の塗布層を
一方又は両面に配したものも含まれる。Polyolefins such as polypropylene, cellulose derivatives such as cellulose triacetate, polyamideimide,
Also included are polyamides, polyethersulfones, polybalaponic acids, polyimides, etc., which have a worm-shaped coating layer placed on one or both sides in advance.
本発明に用いることの出来る磁気記録層は、Co 、C
o−Ni 、Co−Fe 、Co −B 、Go−Cu
、Go −Cd。Magnetic recording layers that can be used in the present invention include Co, C
o-Ni, Co-Fe, Co-B, Go-Cu
, Go-Cd.
Co−0r 、Co −F 、 Co −Ge 、 C
o−Hf 、 Go−La 、 C。Co-0r, Co-F, Co-Ge, C
o-Hf, Go-La, C.
−Mn 、 Co−Mo 、 Co −Mg 、 Co
−P 、 Co−Ru 、 Co −Rh 、Co−
3n 、Go −3i 、Go −5m 、Co−Ta
、Co −T i 、Co −V 、Co−W、Co
−Zn 、Co−Ni−Fe 、C。-Mn, Co-Mo, Co-Mg, Co
-P, Co-Ru, Co-Rh, Co-
3n, Go-3i, Go-5m, Co-Ta
, Co -T i , Co -V , Co-W, Co
-Zn, Co-Ni-Fe, C.
−N i −P 、 Co −N 1−Mg等の部分酸
化膜であって、第1図に模式的に示したように、一部は
、Crが高濃度で含まれていることを要件とするもので
ある。Crの高濃度部分は記録波長、記録トランク幅の
スケールで、みれば均一であづて、さらに微視的にみる
と不均一であることが必要である。-N i -P, Co -N 1-Mg, etc., some of which require a high concentration of Cr, as schematically shown in Figure 1. It is something to do. It is necessary that the high concentration portion of Cr be uniform in appearance on the scale of the recording wavelength and recording trunk width, but microscopically non-uniform.
即ち、後述するように、Crの高濃度部は、環境変化に
強く、一定の研摩性を保持できるものと予測される効果
を常に得るためには、恐らく、上面からみて、比率的に
1/100から1/10QoOを占めていればよいもの
と思われる。That is, as will be described later, in order to always obtain the expected effect of being resistant to environmental changes and maintaining a certain level of abrasiveness, the high Cr concentration area must probably be reduced to 1/2% in proportion when viewed from the top. It seems that it is sufficient if it occupies 1/10 QoO from 100.
このことから逆に、全てが、CIの高濃度部、例えば、
イオン注入等で表面にCrを全面に打ち込んで得た媒体
は、磁気ヘッドを摩耗させる速度が太きすぎて、かえっ
て実用性を阻害することが起る0
かかる媒体を得るひとつの方法は、第2図の装置を用い
るものである。This means that, conversely, all of the high concentration areas of CI, e.g.
A medium obtained by implanting Cr into the entire surface by ion implantation etc. wears out the magnetic head at an excessively high rate, which actually impedes practical use.One method for obtaining such a medium is The apparatus shown in Figure 2 is used.
第2図に示したように蒸着材料11の中に、イオン源1
2よりクロムイオンを注入しフラノ′ンユ蒸発させ、且
つ、基板温度をあげて1、クロムの表面易動度を大きく
してやることで実験的に良好な媒体を得ることのできる
条件を見出し、くり返せば良い。As shown in FIG.
Experimentally find the conditions under which a good medium can be obtained by injecting chromium ions and evaporating the furanium ions from step 2, and increasing the substrate temperature to increase the surface mobility of chromium. Good.
本発明の効果は、磁気テープ表面の硬さが微視的に異な
ることの作用と、クロムの特に酸化状態にあるクロムの
研摩作用の太きさがあいまって生れているものと推察さ
れるが、その効果は特に、磁気テープが恐らく、磁束量
の変化では認められない程度の腐食を受けても、再生出
力低下現象を引き起さない点で顕著である。It is presumed that the effects of the present invention are due to a combination of the microscopic difference in hardness of the magnetic tape surface and the sharpness of the abrasive action of chromium, especially in its oxidized state. The effect is particularly remarkable in that even if the magnetic tape undergoes corrosion to a degree that cannot be recognized by changes in the amount of magnetic flux, it does not cause a reduction in reproduction output.
以下、さらに具体的に一実施例を説明する。An example will be described in more detail below.
(実施例)
第2図で、円筒状キャン(直径60 cm )の直下に
26crn離して電子ビーム蒸発源を配して、かつ、蒸
発面に立てた法線から46°傾斜した軸に光軸を有する
走査型のデコオプラズマトロン型のクロムイオン源を配
し、マスクは、θ朋が44度になる位置にセントした。(Example) In Fig. 2, an electron beam evaporation source is arranged 26 crn directly below a cylindrical can (diameter 60 cm), and the optical axis is inclined at 46 degrees from the normal to the evaporation surface. A scanning deco-plasmatron type chromium ion source having a chromium ion source of the scanning type was arranged, and the mask was centered at a position where θ was 44 degrees.
厚み15μmのポリイミドフィルムを207rL/mm
テ移動サセナカら、CoCo−N1(Ni20 %)を
I X 10−6Torrの酸素中で0.1μm電子ビ
ーム蒸着した。207 rL/mm of polyimide film with a thickness of 15 μm
CoCo-N1 (20% Ni) was electron beam evaporated to 0.1 μm in oxygen at I×10 −6 Torr.
それと同時に、10mAのCr+ ビームを蒸発面の中
心に照射し、Crをフラゾンユ蒸発させたOCr+ ビ
ームハ、パルス走査し、ランダムに磁気テープ面で面分
布するように調節した。At the same time, a 10 mA Cr+ beam was applied to the center of the evaporation surface, and the OCr+ beam, in which Cr was evaporated, was pulse-scanned and adjusted so that it was randomly distributed on the magnetic tape surface.
基板温度は160’Cから240°Cの範囲で調節した
。The substrate temperature was controlled in the range of 160'C to 240°C.
得られた8悲幅の磁気テープを0.6μmの波長を記録
し、各環境に保存してから再生した時の再手出力の最も
低かった値を夫々のテープ、ヘッド系での初期値をo
[dBlとして相対比較した。Record a wavelength of 0.6 μm on the obtained 8-wavelength magnetic tape, store it in each environment, and then use the lowest value of replay output when playing back as the initial value for each tape and head system. o
[Relatively compared as dBl.
Cr高濃度部はX線分析により面積比率で、全表面を1
として比率で示した。The area ratio of the high Cr concentration area was determined by X-ray analysis to be 1% of the entire surface.
It is expressed as a ratio.
テープの条件と結果を表にまとめて示したが、用いた比
較テープは、Cr+ イオンを照射しなかったもので、
測定したテープの長さは1巻80mで、夫々の条件で5
巻ずつテストして一番結果の悪かったもので代表させた
。The tape conditions and results are summarized in the table, but the comparison tape used was not irradiated with Cr+ ions.
The length of the tape measured was 80 m per roll, and under each condition 5
I tested each volume and selected the one with the worst results as a representative.
以 下 余 白
表より明らかなように、本発明品は、従来品に比べて極
めて、短波長再生出力は安定しているO他の材料の組み
合わせでも、本発明の実施例に示したものと同等の安定
性を確認した。As is clear from the margin table below, the product of the present invention has extremely stable short wavelength reproduction output compared to conventional products. Equivalent stability was confirmed.
勿論、磁化容易軸の方向とも関係なかったし、他の薄膜
ヘッドや、リング型ヘッド以外のシングルポール型など
でも同様にその結果は確認された。Of course, there was no relation to the direction of the axis of easy magnetization, and the same result was confirmed with other thin film heads and single-pole heads other than ring-type heads.
発明の効果
本発明の磁気記録媒体は、Crの高濃度部分を偏在させ
た強磁性金属の部分醸化膜を磁気記録層とすることで、
磁気ヘッドによらず、短波長出力を安定に再生できるも
ので、その実用的効果は太きい。Effects of the Invention The magnetic recording medium of the present invention has a partially fermented film of ferromagnetic metal in which a high concentration portion of Cr is unevenly distributed as a magnetic recording layer.
It can stably reproduce short wavelength output regardless of the magnetic head, and its practical effects are significant.
第1図は、本発明の磁気記録媒体の部分拡大断面図、第
2図は本発明の磁気記録媒体を得るのに用いた蒸着装置
の要部構成図である。
1・・・・高分子基板、4・・・部分酸化された微結晶
、6・・・・Or高濃度微、結晶。
代理人の氏名 弁理士 中 尾 敏 男 はが1名第2
図FIG. 1 is a partially enlarged sectional view of the magnetic recording medium of the present invention, and FIG. 2 is a diagram showing the main part of a vapor deposition apparatus used to obtain the magnetic recording medium of the present invention. 1...Polymer substrate, 4...Partially oxidized microcrystal, 6...Or high concentration microcrystal. Name of agent: Patent attorney Toshio Nakao, 1st person, 2nd person
figure
Claims (1)
均一で、Crが偏在していることを特徴とする磁気記録
媒体。1. A magnetic recording medium comprising a partial oxide film as a magnetic recording layer, the element distribution on the surface being non-uniform, and Cr being unevenly distributed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59115925A JPS60261016A (en) | 1984-06-06 | 1984-06-06 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59115925A JPS60261016A (en) | 1984-06-06 | 1984-06-06 | Magnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60261016A true JPS60261016A (en) | 1985-12-24 |
| JPH0565926B2 JPH0565926B2 (en) | 1993-09-20 |
Family
ID=14674586
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59115925A Granted JPS60261016A (en) | 1984-06-06 | 1984-06-06 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60261016A (en) |
-
1984
- 1984-06-06 JP JP59115925A patent/JPS60261016A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0565926B2 (en) | 1993-09-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5418059A (en) | Magnetic recording medium and method for producing the same | |
| JPH06150289A (en) | Magnetic recording medium and its manufacture | |
| JPS60261016A (en) | Magnetic recording medium | |
| US7713591B2 (en) | Longitudinal patterned media with circumferential anisotropy for ultra-high density magnetic recording | |
| JPS6199922A (en) | magnetic recording medium | |
| JPH0552566B2 (en) | ||
| JPS60261017A (en) | Magnetic recording medium | |
| JP2605803B2 (en) | Magnetic recording media | |
| JPH0559570B2 (en) | ||
| JPH0479043B2 (en) | ||
| JPS618719A (en) | magnetic recording medium | |
| JPH0687306B2 (en) | Method of manufacturing magnetic recording medium | |
| JP2512490B2 (en) | Thin film magnetic tape | |
| JPS6199938A (en) | Method for manufacturing magnetic recording media | |
| EP0653747A1 (en) | Magnetic recording medium and manufacturing method thereof | |
| JPH0393024A (en) | Metallic thin film type magnetic recording medium | |
| JPS63206909A (en) | magnetic recording medium | |
| JPS6050717A (en) | Metal thin film magnetic tape | |
| JPH05159267A (en) | Magnetic recording medium and production of the medium | |
| JPH0799578B2 (en) | Method of manufacturing magnetic recording medium | |
| JPH04195924A (en) | Magnetic recording media manufacturing equipment | |
| JPH0622056B2 (en) | Method of manufacturing magnetic recording medium | |
| JPS6378340A (en) | Method for manufacturing magnetic recording media | |
| JPS6199924A (en) | magnetic recording medium | |
| JPS619823A (en) | magnetic recording medium |