JPS61139661A - 真空蒸着方法 - Google Patents

真空蒸着方法

Info

Publication number
JPS61139661A
JPS61139661A JP26238884A JP26238884A JPS61139661A JP S61139661 A JPS61139661 A JP S61139661A JP 26238884 A JP26238884 A JP 26238884A JP 26238884 A JP26238884 A JP 26238884A JP S61139661 A JPS61139661 A JP S61139661A
Authority
JP
Japan
Prior art keywords
plastic film
deposited
film
vacuum
vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP26238884A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6312937B2 (2
Inventor
Yasuzumi Oki
沖 安純
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Reiko Co Ltd
Original Assignee
Reiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Reiko Co Ltd filed Critical Reiko Co Ltd
Priority to JP26238884A priority Critical patent/JPS61139661A/ja
Publication of JPS61139661A publication Critical patent/JPS61139661A/ja
Publication of JPS6312937B2 publication Critical patent/JPS6312937B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP26238884A 1984-12-11 1984-12-11 真空蒸着方法 Granted JPS61139661A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26238884A JPS61139661A (ja) 1984-12-11 1984-12-11 真空蒸着方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26238884A JPS61139661A (ja) 1984-12-11 1984-12-11 真空蒸着方法

Publications (2)

Publication Number Publication Date
JPS61139661A true JPS61139661A (ja) 1986-06-26
JPS6312937B2 JPS6312937B2 (2) 1988-03-23

Family

ID=17375065

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26238884A Granted JPS61139661A (ja) 1984-12-11 1984-12-11 真空蒸着方法

Country Status (1)

Country Link
JP (1) JPS61139661A (2)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100311796B1 (ko) * 1997-12-20 2001-11-15 이구택 철 증착 합금화 용융아연도금 강판의 제조방법

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5782475A (en) * 1980-11-12 1982-05-22 Toshiba Corp Dry etching method

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5782475A (en) * 1980-11-12 1982-05-22 Toshiba Corp Dry etching method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100311796B1 (ko) * 1997-12-20 2001-11-15 이구택 철 증착 합금화 용융아연도금 강판의 제조방법

Also Published As

Publication number Publication date
JPS6312937B2 (2) 1988-03-23

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