JPS61236659A - Manufacture of electroconductive ceramics - Google Patents
Manufacture of electroconductive ceramicsInfo
- Publication number
- JPS61236659A JPS61236659A JP7450685A JP7450685A JPS61236659A JP S61236659 A JPS61236659 A JP S61236659A JP 7450685 A JP7450685 A JP 7450685A JP 7450685 A JP7450685 A JP 7450685A JP S61236659 A JPS61236659 A JP S61236659A
- Authority
- JP
- Japan
- Prior art keywords
- ceramic
- parts
- weight
- pulp
- present
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Paper (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〈産業上の利用分野〉
本発明は電気および熱の伝導性にすぐれた新規な導電性
セラミックの製造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a method for manufacturing a novel conductive ceramic having excellent electrical and thermal conductivity.
〈従来の技術〉
従来から知られている導電性セラミックの製造方法とし
ては、(A)セラミック原料と導電性材料の粉末を混合
して金型成型した後、真空又は不活性ガス雰囲気中でホ
ットプレスで焼結する方法とか、(B)セラミック焼結
板の上に結着剤を含有する導電性材料の塗布液を塗布し
たり、あるいは(C)該セラミック焼結板の表面に導電
性材料を真空蒸着、メッキもしくは印刷等の手法を使っ
て付着する方法などがある。<Prior art> Conventionally known methods for producing conductive ceramics include (A) mixing ceramic raw materials and conductive material powder, molding the mixture, and then hot heating in a vacuum or inert gas atmosphere; (B) applying a conductive material coating solution containing a binder onto the ceramic sintered plate; or (C) applying a conductive material to the surface of the ceramic sintered plate. There are methods of attaching the material using methods such as vacuum deposition, plating, or printing.
これらの方法の中で(A)は導電性材料が粉末状で配合
されているため電気および熱伝導性が不十分となりやす
く、又、多量に導電材料を配合するとセラミック成型体
の機械的強度が低下する。又、(B)は塗布層に有機質
の結着剤を含有するため耐熱性に問題を有し、さらに又
、(B)、(C)ともセラミック焼結体の表面との接着
性もしくは密着性に問題を生じやすく用途範囲が限定さ
れてしまう。Among these methods, method (A) tends to have insufficient electrical and thermal conductivity because the conductive material is blended in the form of powder, and if a large amount of conductive material is blended, the mechanical strength of the ceramic molded body decreases. descend. In addition, (B) has a problem with heat resistance because the coating layer contains an organic binder, and both (B) and (C) have poor adhesion or adhesion to the surface of the ceramic sintered body. This tends to cause problems and limits the range of applications.
従来技術にある製造方法の問題点は上記のごとき特性上
の問題にかぎらず、製造」−においても装置が高価で連
続生産が難しく、生産性が著しく悪いものであって工業
上大きな課題になっている。Problems with conventional manufacturing methods are not limited to the above-mentioned problems with characteristics, but also in manufacturing, the equipment is expensive, continuous production is difficult, and productivity is extremely poor, which has become a major industrial issue. ing.
〈発明が解決しようとする問題点〉
本発明は」二足の事情に鑑みてなされたものであり、従
来技術では得られなかった電気および熱伝導や機械的特
性にすぐれた、しかも生産性においてもすぐれたセラミ
ックを製造する方法を提供するものである。<Problems to be Solved by the Invention> The present invention has been made in view of the two circumstances. The present invention provides a method for manufacturing excellent ceramics.
〈問題点を解決するための手段〉
本発明の最大の特徴は、導電材料として繊維状の金属、
すなわち繊維径4〜8ums繊維長3〜6mmの金属繊
維を使うこと、および焼結前の中間体シートを得る手段
として湿式抄紙法を採用することにあり、これによりセ
ラミック焼結体への導電性付与に効果的な繊維状の金属
をセラミック粉末に均一に分散することが可能となった
。<Means for solving the problems> The greatest feature of the present invention is that a fibrous metal,
That is, the use of metal fibers with a fiber diameter of 4 to 8 um and a fiber length of 3 to 6 mm, and the adoption of a wet papermaking method as a means of obtaining an intermediate sheet before sintering, thereby improving the electrical conductivity of the ceramic sintered body. It has become possible to uniformly disperse fibrous metal, which is effective for application, into ceramic powder.
すなわち、本発明はセラミック粉末100重量部に対し
てパルプ5〜15重量部、金属繊維3〜35重量部を配
合してなる水性スラリーを湿式抄−3=
紙性にて抄造してシートを形成し、これを所要の厚味に
なるまて複数枚積層したものを加圧処理により一体化し
て成型体となし、しかるのち60000以下の酸素雰囲
気中で仮焼することにより、該成型体に内在する有機物
を燃焼除去し、さらに真空又は不活性ガス雰囲気又は還
元性の活性ガス雰囲気中で焼成して焼結体とすることを
特徴とする導電性セラミックの製造方法を提供するもの
である。That is, in the present invention, an aqueous slurry containing 5 to 15 parts by weight of pulp and 3 to 35 parts by weight of metal fibers to 100 parts by weight of ceramic powder is formed into a sheet by wet papermaking-3 = paper quality. Then, a plurality of these layers are laminated to the required thickness and then integrated by pressure treatment to form a molded body.Then, by calcining in an oxygen atmosphere of 60,000 or less, the internal properties of the molded body are removed. The present invention provides a method for producing a conductive ceramic, which comprises burning and removing organic matter, and further sintering it in a vacuum, an inert gas atmosphere, or a reducing active gas atmosphere to form a sintered body.
本発明でいうセラミック粉末は、従来のセラミック材料
やファインセラミック材料のいずれも使用できるが、と
くに本発明では磁気質タイル用坏土が好適に使用される
。The ceramic powder referred to in the present invention may be any conventional ceramic material or fine ceramic material, but magnetic tile clay is particularly preferably used in the present invention.
また、本発明でいう金属繊維とはステンレス、真ちゅう
、銅、アルミニウム等の材料からなる繊維で、とくにス
テンレス繊維が細線が得られる、耐錆性、耐熱性、抄紙
性がすぐれているとの理由で本発明に好適に使用される
。In addition, the metal fibers referred to in the present invention are fibers made of materials such as stainless steel, brass, copper, and aluminum, and the reason is that stainless steel fibers in particular can produce fine wires and have excellent rust resistance, heat resistance, and paper-making properties. are preferably used in the present invention.
又、本発明を構成するパルプとは、通常のセルロースか
らなる木材パルプのほか、ポリエチレン等の合成繊維パ
ルプ、無機繊維、人造繊維をいうムのである。これらの
パルプは各々単独でも使用可能であるが、次の理由によ
り木材パルプと合成繊維パルプのブレンドが好ましい。Further, the pulp constituting the present invention includes not only ordinary wood pulp made of cellulose, but also synthetic fiber pulp such as polyethylene, inorganic fiber, and artificial fiber. Although each of these pulps can be used alone, a blend of wood pulp and synthetic fiber pulp is preferred for the following reasons.
つまり、これらのパルプは湿式抄紙法でのシートの製造
過程におけるセラミックと金属繊維間の結着剤としての
機能と、焼結工程における良好な燃焼性を保持していな
ければならない。従って、木材パルプの有する結着剤と
しての機能、合成パルプの有する燃焼性の利点に着目し
、両者のブレンド系が本発明に好適に使用される。In other words, these pulps must function as a binder between ceramic and metal fibers during the sheet manufacturing process in the wet papermaking process, and have good combustibility during the sintering process. Therefore, focusing on the function of wood pulp as a binder and the advantages of synthetic pulp in combustibility, a blend system of both is preferably used in the present invention.
上記の材料を使用して本発明の導電性セラミックを製造
する方法は次のとおりである。The method for manufacturing the conductive ceramic of the present invention using the above materials is as follows.
まず、セラミック粉末100重量部に対し5〜15重量
部のパルプおよび3〜35重量部の金属繊維からなる水
性スラリーを作製する。パルプの配合量を5〜15重量
部に規定した理由は、5重量部以下では湿式抄紙可能な
湿紙強度が得られず、又、15重量部以上だと焼成時に
収縮が生じたり、ガスが発生したり、又、焼結体の機械
的強度の低下をまねく。一方、金属繊維の配合率を3〜
35重量部にした理由は、3重量部以下ではセラミック
焼結体内で導電性に必要な金属繊維同志の接触が生しに
くく、また35重量部以上では焼結体の機械的強度の低
下をまねくことによる。First, an aqueous slurry consisting of 5 to 15 parts by weight of pulp and 3 to 35 parts by weight of metal fibers is prepared based on 100 parts by weight of ceramic powder. The reason why the amount of pulp is specified to be 5 to 15 parts by weight is that if it is less than 5 parts by weight, wet paper paper strength that can be used for wet paper making cannot be obtained, and if it is more than 15 parts by weight, shrinkage may occur during baking or gas may be released. This may lead to a decrease in the mechanical strength of the sintered body. On the other hand, the blending ratio of metal fibers is 3~
The reason for using 35 parts by weight is that if it is less than 3 parts by weight, it is difficult to form contact between the metal fibers necessary for conductivity within the ceramic sintered body, and if it is more than 35 parts by weight, it will lead to a decrease in the mechanical strength of the sintered body. It depends.
本発明で使用する金属繊維の形態はとくに限定されず、
一般に流通している繊維径2〜16U1繊維長2〜12
mmのものが使用可能であるが、水性スラリー中での分
散性を考慮すると繊維径4〜8μ、繊維長3〜6mmの
ものが好適に使われる。The form of the metal fiber used in the present invention is not particularly limited,
Generally available fiber diameter 2-16U1 fiber length 2-12
Although fibers with a fiber diameter of 4 to 8 μm and a fiber length of 3 to 6 mm are preferably used, considering dispersibility in an aqueous slurry.
水性スラリーを作るには、主成分であるセラミックを歩
留りよくパルプに凝集定着するため、パルプ表面にカチ
オン化処理を施す。具体的には水に分散したパルプに対
しカチオン性樹脂を添加した後で、セラミック粉末を混
合し、更に定着剤として硫酸バンドを加える。しかるの
ち、金属繊維を混合して得た水性スラリーに抄紙直前に
高分子凝集剤を添加し、適当な大きさのフロックに形成
して抄紙しシートを作製する。この場合の湿式抄紙機は
長網式でも丸網式でも適用できる。To make an aqueous slurry, the surface of the pulp is cationized in order to coagulate and fix the main component, ceramic, into the pulp with a good yield. Specifically, after a cationic resin is added to pulp dispersed in water, ceramic powder is mixed, and sulfate is added as a fixing agent. Thereafter, a polymer flocculant is added to the aqueous slurry obtained by mixing metal fibers immediately before paper making, and the paper is formed into flocs of an appropriate size to produce a sheet. In this case, the wet paper machine can be either a Fourdrinier type or a circular screen type.
このようにして得られた金属繊維を含むセラミックシー
トを所要の厚さになるまで複数枚積層したものを加圧処
理により一体化し成型体を作製する。この場合の加圧は
プレス機で500kg1b度の圧力で成型し、又連続成
型の場合、ロール型プレス機によっても成型体を得るこ
とができる。A plurality of ceramic sheets containing metal fibers obtained in this manner are laminated to a desired thickness and then integrated by pressure treatment to produce a molded body. In this case, the molding is carried out using a press at a pressure of 500 kg 1b degrees, and in the case of continuous molding, the molded body can also be obtained using a roll press.
次に該成型体を焼成工程に供するものであるが、この場
合焼結に必要な本焼成をおこなう前に6000C以下の
酸素雰囲気中で仮焼をおこなう。すなわち成型体に内在
している有機質のパルプ繊維を仮焼により燃焼除去する
ことが必要である。しかるのち真空又は窒素等の不活性
ガスや水素等の還元性の活性ガス雰囲気中で焼成し、本
発明の導電性セラミックを得る。この場合の真空焼結条
件としては例えば真空度I C1″2torr、焼成温
度1200℃、焼成時間2時間が適用される。本発明で
焼成条件を真空又は不活性ガス雰囲気中と規定した理由
は、酸素存在下で焼成した場合、金属繊維表面が酸化さ
れ、その結果として導電性が低下し、かつ粒界腐蝕性か
ら飽性的となり物理強度が低下するからである。Next, the molded body is subjected to a firing process, but in this case, calcination is performed in an oxygen atmosphere at 6000 C or less before performing the main firing required for sintering. That is, it is necessary to burn and remove the organic pulp fibers present in the molded body by calcining. Thereafter, it is fired in a vacuum or in an atmosphere of an inert gas such as nitrogen or a reducing active gas such as hydrogen to obtain the conductive ceramic of the present invention. In this case, the vacuum sintering conditions are, for example, a vacuum degree of I C1''2 torr, a firing temperature of 1200°C, and a firing time of 2 hours.The reason why the firing conditions are specified as vacuum or in an inert gas atmosphere in the present invention is as follows. This is because when fired in the presence of oxygen, the surface of the metal fiber is oxidized, resulting in a decrease in electrical conductivity and a decrease in physical strength due to grain boundary corrosion becoming saturated.
〈実施例〉
以下本発明を実施例および比較例をもって詳細に説明す
る。<Examples> The present invention will be described in detail below with reference to Examples and Comparative Examples.
実施例1
ポリエチレン合成パルプ(SWP E−400、三片
石油化学社製)6重量部と叩解度30°SRのNBKP
木材バルブ4重量部を固型分濃度0.05%になるよう
水に分散して得た水性スラリーに、カチオン性樹脂溶液
(ポリフィックス301、昭和高分子社製)をパルプに
対して固型分比で3%添加してパルプ繊維をカチオン化
した。Example 1 6 parts by weight of polyethylene synthetic pulp (SWP E-400, manufactured by Mikata Petrochemical Co., Ltd.) and NBKP with a beating degree of 30°SR
A cationic resin solution (Polyfix 301, manufactured by Showa Kobunshi Co., Ltd.) was added to the aqueous slurry obtained by dispersing 4 parts by weight of wood bulbs in water to a solid content concentration of 0.05%. The pulp fibers were cationized by adding 3% in proportion.
次にこの合成パルプおよび木材パルプからなるパルプ繊
維10重量部に対しセラミック粉末を90重量部配合す
るために下記の操作をおこなった。Next, the following operation was performed to mix 90 parts by weight of ceramic powder with 10 parts by weight of pulp fibers made of the synthetic pulp and wood pulp.
すなわち、上記スラリーを撹拌しながら磁気タイル用坏
土221 <成分5I0273 、94、A I203
15.32、Fe2030.70、Ca0O,23、M
gO0,1?、K2O3,70、Na20 1 、85
、各%を含む)のセラミック粉末を前記配合比で添加し
、セラミックをパルプ繊維に吸着させた後、硫酸バンド
をパルプに対して5%添加し、セラミックをパルプ表面
に凝集定着させた。このスラリー中に繊維径8μ川、繊
維長6 mmのステンレス繊維(サスミック、東京製綱
社製)を、セラミック粉末上パルプ繊維の合計重量10
0重量部に対して10重量部混合して均一に分散させた
。That is, while stirring the slurry, the magnetic tile clay 221 <components 5I0273, 94, A I203
15.32, Fe2030.70, Ca0O,23, M
gO0,1? , K2O3,70, Na20 1,85
, each percentage) was added at the above mixing ratio to adsorb the ceramic to the pulp fibers, and then 5% of sulfate was added to the pulp to coagulate and fix the ceramic on the surface of the pulp. In this slurry, stainless steel fibers with a fiber diameter of 8 μg and a fiber length of 6 mm (Susmic, manufactured by Tokyo Seikosha Co., Ltd.) were added, and the total weight of pulp fibers on ceramic powder was 10
10 parts by weight were mixed to 0 parts by weight and uniformly dispersed.
このスラリーに抄紙直前にアニオン性高分子凝集剤(サ
ンフロック、三洋化成社製)溶液を適当なフロックの大
きさになるように添加してセラミック粒子をパルプ繊維
に凝集定着させ、長網抄紙機により抄紙し秤量1.3k
g/J のシートを作製した。Immediately before paper making, an anionic polymer flocculant (Sunfloc, manufactured by Sanyo Kasei Co., Ltd.) solution is added to this slurry to form an appropriate floc size, and the ceramic particles are coagulated and fixed on the pulp fibers. The paper is made with a weight of 1.3k.
A sheet of g/J was produced.
該シートを4枚重ね合せプレス機で500kg/C−の
圧力で一体化し成型体上した。この成型体を600℃の
焼成炉中で仮焼することによりまず成型体中の有機物か
らなるパルプ繊維を燃焼除去し、しかるのち真空焼却炉
に入れ、真空度1O−2〜10−3torrの減圧下で
焼結し本発明の導電性セラミックを得た。この場合の焼
成条件は、1200℃の温度で2時間焼成ののち、室温
になるまで除冷するものとし、この間ずっと真空状態を
保持する。Four of the sheets were stacked together in a press at a pressure of 500 kg/C- to form a molded product. This molded body is calcined in a kiln at 600°C to first burn and remove pulp fibers made of organic matter in the molded body, and then placed in a vacuum incinerator to reduce the pressure to a degree of vacuum of 10-2 to 10-3 torr. The conductive ceramic of the present invention was obtained by sintering. The firing conditions in this case are that after firing at a temperature of 1200° C. for 2 hours, it is slowly cooled to room temperature, and a vacuum state is maintained throughout this time.
得られた導電性セラミックの体積固有抵抗は、1.2X
l’00Ω・cmであり、又、ステップ状加熱法による
熱伝導度は0 、566 W/m−にてあってすぐれた
電気、熱伝導性が確認された。The volume resistivity of the obtained conductive ceramic is 1.2X
1'00 Ω·cm, and the thermal conductivity measured by the step heating method was 0.566 W/m-, confirming excellent electrical and thermal conductivity.
この場合、セラミックに対するステンレス金属繊維の配
合量と体積固有抵抗との関係は第1図のとおりであり、
金属繊維の配合量を導電性セラミックの機械的強度を害
わない範囲内で適宜選択することにより1(13〜l0
−2Ω・cmの範囲で電気抵抗を任意に得ることができ
る。In this case, the relationship between the amount of stainless metal fiber mixed with the ceramic and the volume resistivity is as shown in Figure 1.
1 (13 to 10
The electrical resistance can be arbitrarily obtained within the range of -2 Ω·cm.
実施例2
実施例1におけるステンレス繊維の形態を繊維径4I7
、繊維長4mmにしたほかは全て実施例1と同じ方法で
本発明の導電性セラミックを得た。このセラミックの電
気抵抗は3.1XlO−’Ω・Cl11であり、又、熱
伝導率は0 、610 W/m−にてあってすぐれた電
気、熱伝導性を確認した。Example 2 The shape of the stainless steel fiber in Example 1 was changed to a fiber diameter of 4I7.
A conductive ceramic of the present invention was obtained in the same manner as in Example 1 except that the fiber length was changed to 4 mm. The electrical resistance of this ceramic was 3.1XlO-'Ω·Cl11, and the thermal conductivity was 0.610 W/m-, confirming excellent electrical and thermal conductivity.
比較例
実施例1て得られた成型体を通常の大気雰囲気中で12
00℃、20分の条件で焼成処理をおこなった。Comparative Example The molded product obtained in Example 1 was heated for 12 hours in a normal atmospheric atmosphere.
Firing treatment was performed at 00°C for 20 minutes.
得られた導電性セラミックの物理強度は実用に耐え得る
十分なものであったが、電気抵抗は3.6XIOIIΩ
・ctnであった。これは酸素雰囲気での焼成の結果、
金属繊維表面に酸化皮膜が形成され導電性が失われたこ
とによるものであった。The physical strength of the obtained conductive ceramic was sufficient for practical use, but the electrical resistance was 3.6XIOIIΩ.
・It was ctn. This is the result of firing in an oxygen atmosphere.
This was due to the formation of an oxide film on the surface of the metal fibers and loss of conductivity.
〈発明の効果〉
本発明は上記の構成から明らかなとおり、セラミックの
導電化の手段として極細の金属繊維の採用、およびセラ
ミックと金属繊維の混和に湿式抄紙法の採用により、従
来技術では得られなかった高度の導電性および熱伝導性
を得ることができた。<Effects of the Invention> As is clear from the above structure, the present invention achieves advantages that could not be obtained with the prior art by employing ultrafine metal fibers as a means of making ceramic conductive and by adopting a wet papermaking method for mixing the ceramic and metal fibers. We were able to obtain a high degree of electrical and thermal conductivity that was previously unavailable.
第1図は本発明の導電性セラミックの体積固有抵抗とス
テンレス繊維の配合量との関係を示す図である。FIG. 1 is a diagram showing the relationship between the volume resistivity of the conductive ceramic of the present invention and the blending amount of stainless fiber.
Claims (1)
重量部、金属繊維3〜35重量部を配合してなる水性ス
ラリーを湿式抄紙法にて抄造してシートを形成し、これ
を所要の厚味になるまで複数枚積層したものを加圧処理
により一体化して成型体となし、しかるのち600℃以
下の酸素雰囲気中で仮焼することにより、該成型体に内
在する有機物を燃焼除去し、さらに真空又は不活性ガス
雰囲気又は還元性の活性ガス雰囲気で焼成して焼結体と
することを特徴とする導電性セラミックの製造方法。5-15 parts of pulp per 100 parts by weight of ceramic powder
Aqueous slurry containing 3 to 35 parts by weight of metal fibers is made into a sheet using a wet paper-making method, and multiple sheets of this are laminated to the required thickness and then subjected to pressure treatment. The molded product is integrated into a molded product, and then calcined in an oxygen atmosphere at 600°C or lower to burn and remove the organic matter inherent in the molded product, and then heated in a vacuum, an inert gas atmosphere, or a reducing active gas atmosphere. A method for producing a conductive ceramic, the method comprising: firing the conductive ceramic to form a sintered body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7450685A JPS61236659A (en) | 1985-04-10 | 1985-04-10 | Manufacture of electroconductive ceramics |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7450685A JPS61236659A (en) | 1985-04-10 | 1985-04-10 | Manufacture of electroconductive ceramics |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61236659A true JPS61236659A (en) | 1986-10-21 |
| JPH0463035B2 JPH0463035B2 (en) | 1992-10-08 |
Family
ID=13549273
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7450685A Granted JPS61236659A (en) | 1985-04-10 | 1985-04-10 | Manufacture of electroconductive ceramics |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61236659A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01164770A (en) * | 1987-12-18 | 1989-06-28 | Tanaka Seishi Kogyo Kk | Production of ceramic sintered body |
-
1985
- 1985-04-10 JP JP7450685A patent/JPS61236659A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01164770A (en) * | 1987-12-18 | 1989-06-28 | Tanaka Seishi Kogyo Kk | Production of ceramic sintered body |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0463035B2 (en) | 1992-10-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CA2405351C (en) | Conductive sheet material | |
| JPS59100182A (en) | Non-asbestos flexible sheet material and gasket thereof | |
| CN102137885A (en) | metal semi-finished products | |
| JPH0140128B2 (en) | ||
| JPS61236659A (en) | Manufacture of electroconductive ceramics | |
| JPS6189400A (en) | Paper | |
| WO2025052802A1 (en) | Inorganic fiber sheet | |
| JPS61236665A (en) | Manufacture of porous carbon sheet | |
| JPH0656551A (en) | Production of cordierite porous heat resistant material | |
| JPH0641603B2 (en) | Manufacturing method of sintered metal fiber sheet | |
| JPS62170185A (en) | Ceramic heater | |
| JPH0223505B2 (en) | ||
| JPS6119820A (en) | Production of porous carbon plate | |
| JPS63303855A (en) | Production of low-expansion substrate | |
| JPH0411498B2 (en) | ||
| JPH0627026B2 (en) | Ceramic substrate firing sheet | |
| JP2685365B2 (en) | Manufacturing method of porous carbon plate | |
| JPS59165614A (en) | Method of molding raw pottery board | |
| JPH0816320B2 (en) | Heat-resistant sheet and manufacturing method thereof | |
| JPS60180299A (en) | Diaphragm of acoustic device and its production method | |
| JPS62268898A (en) | Conductive paper and its production | |
| JPH0931884A (en) | Heat-resistant and insulating sheet and its production | |
| JPH08119720A (en) | Alumina ceramic and its production | |
| JP2811923B2 (en) | Calcium silicate heating element and method for producing the same | |
| JPH0376821A (en) | Manufacturing method of porous carbon plate |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |