JPS6185853U - - Google Patents
Info
- Publication number
- JPS6185853U JPS6185853U JP1984171792U JP17179284U JPS6185853U JP S6185853 U JPS6185853 U JP S6185853U JP 1984171792 U JP1984171792 U JP 1984171792U JP 17179284 U JP17179284 U JP 17179284U JP S6185853 U JPS6185853 U JP S6185853U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- transmission device
- motion transmission
- vacuum flange
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005540 biological transmission Effects 0.000 claims description 6
- 210000002445 nipple Anatomy 0.000 claims 1
- 238000005086 pumping Methods 0.000 claims 1
- 239000003566 sealing material Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Sealing Devices (AREA)
Description
第１図は本考案の運動伝達軸の実施例を示す図
で、第２図は大気における従来技術による運動伝
達手段を示す図である。
１……容器、２……駆動伝達軸、３……真空用
フランジ(1)、４……ベローズ、５……差動排気
ポート、６……シール材、７……金具、８……ネ
ジ軸、９……ナツト、１０……真空用フランジ(2
)、１１……内部接続部品、１２……非駆動体、
１３……非駆動体台、１４……ベースプレート、
１５……テーブル、１６……駆動源、１７……伝
達軸、１８……接続部品、１９……架台。
FIG. 1 is a diagram showing an embodiment of the motion transmitting shaft of the present invention, and FIG. 2 is a diagram showing a prior art motion transmitting means in the atmosphere. 1... Container, 2... Drive transmission shaft, 3... Vacuum flange (1), 4... Bellows, 5... Differential exhaust port, 6... Seal material, 7... Metal fittings, 8... Screw Shaft, 9... Nut, 10... Vacuum flange (2
), 11... Internal connection parts, 12... Non-driver,
13...Non-driver stand, 14...Base plate,
15... Table, 16... Drive source, 17... Transmission shaft, 18... Connecting parts, 19... Frame.
Claims (1)
搬送及び運動伝達装置において、真空容器に固定
された真空用フランジと、この真空用フランジに
溶接された伸縮自在のベローズ、及び、この真空
用フランジ部の一部に形成されたシール材と、差
動排気用のポートを備えたニツプル、及び前記真
空用フランジに螺合された位置決め及び固定用の
ボルト、ナツトを備え、前記運動伝達装置は外部
駆動により真空容器内のステージの駆動を行なえ
る様に構成した運動伝達装置。 A conveyance and motion transmission device used in the vacuum section of a semiconductor mask repair device includes a vacuum flange fixed to a vacuum container, a telescopic bellows welded to the vacuum flange, and a part of the vacuum flange. The motion transmission device is equipped with a sealing material formed in the part, a nipple with a port for differential pumping, and bolts and nuts for positioning and fixing screwed into the vacuum flange, and the motion transmission device is externally driven to pump the vacuum. A motion transmission device configured to drive a stage inside a container.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984171792U JPS6185853U (en) | 1984-11-13 | 1984-11-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984171792U JPS6185853U (en) | 1984-11-13 | 1984-11-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6185853U true JPS6185853U (en) | 1986-06-05 |
Family
ID=30729472
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984171792U Pending JPS6185853U (en) | 1984-11-13 | 1984-11-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6185853U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100680054B1 (en) * | 2000-02-24 | 2007-02-07 | 엘지.필립스 엘시디 주식회사 | Mask carrier and method |
-
1984
- 1984-11-13 JP JP1984171792U patent/JPS6185853U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100680054B1 (en) * | 2000-02-24 | 2007-02-07 | 엘지.필립스 엘시디 주식회사 | Mask carrier and method |
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