JPS6192533U - - Google Patents

Info

Publication number: JPS6192533U
Authority: JP; Japan
Prior art keywords: substrate; hole; suction; groove; rotation bearing
Prior art date: 1984-11-22
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP17807984U

Other languages

English (en)

Japanese (ja)

Other versions

JPH042754Y2 (

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1984-11-22

Filing date

1984-11-22

Publication date

1986-06-16

1984-11-22 Application filed filed Critical

1984-11-22 Priority to JP1984178079U priority Critical patent/JPH042754Y2/ja

1986-06-16 Publication of JPS6192533U publication Critical patent/JPS6192533U/ja

1992-01-30 Application granted granted Critical

1992-01-30 Publication of JPH042754Y2 publication Critical patent/JPH042754Y2/ja

Status Expired legal-status Critical Current

Links

239000000758 substrate Substances 0.000 claims description 11
210000000078 claw Anatomy 0.000 description 1
239000011521 glass Substances 0.000 description 1

Landscapes

Jigs For Machine Tools (AREA)

JP1984178079U 1984-11-22 1984-11-22 Expired JPH042754Y2 ( )

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP1984178079U JPH042754Y2 ( )	1984-11-22	1984-11-22

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP1984178079U JPH042754Y2 ( )	1984-11-22	1984-11-22

Publications (2)

Publication Number	Publication Date
JPS6192533U true JPS6192533U ( )	1986-06-16
JPH042754Y2 JPH042754Y2 ( )	1992-01-30

Family

ID=30735646

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP1984178079U Expired JPH042754Y2 ( )	1984-11-22	1984-11-22

Country Status (1)

Country	Link
JP (1)	JPH042754Y2 ( )

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2004327927A (ja) *	2003-04-28	2004-11-18	Matsushita Electric Ind Co Ltd	薬液処理装置と薬液処理方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS58150402U (ja) *	1982-04-02	1983-10-08	三菱電機株式会社	チヤツク

1984
- 1984-11-22 JP JP1984178079U patent/JPH042754Y2/ja not_active Expired

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS58150402U (ja) *	1982-04-02	1983-10-08	三菱電機株式会社	チヤツク

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2004327927A (ja) *	2003-04-28	2004-11-18	Matsushita Electric Ind Co Ltd	薬液処理装置と薬液処理方法

Also Published As

Publication number	Publication date
JPH042754Y2 ( )	1992-01-30

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