JPS62177033U - - Google Patents
Info
- Publication number
- JPS62177033U JPS62177033U JP4306186U JP4306186U JPS62177033U JP S62177033 U JPS62177033 U JP S62177033U JP 4306186 U JP4306186 U JP 4306186U JP 4306186 U JP4306186 U JP 4306186U JP S62177033 U JPS62177033 U JP S62177033U
- Authority
- JP
- Japan
- Prior art keywords
- ray
- soft
- shutter
- extraction window
- beams
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000605 extraction Methods 0.000 claims description 6
- 230000002452 interceptive effect Effects 0.000 claims description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4306186U JPS62177033U (2) | 1986-03-26 | 1986-03-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4306186U JPS62177033U (2) | 1986-03-26 | 1986-03-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62177033U true JPS62177033U (2) | 1987-11-10 |
Family
ID=30859567
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4306186U Pending JPS62177033U (2) | 1986-03-26 | 1986-03-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62177033U (2) |
-
1986
- 1986-03-26 JP JP4306186U patent/JPS62177033U/ja active Pending
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