JPS6247125U - - Google Patents

Info

Publication number
JPS6247125U
JPS6247125U JP13960485U JP13960485U JPS6247125U JP S6247125 U JPS6247125 U JP S6247125U JP 13960485 U JP13960485 U JP 13960485U JP 13960485 U JP13960485 U JP 13960485U JP S6247125 U JPS6247125 U JP S6247125U
Authority
JP
Japan
Prior art keywords
wafer
vertically moving
heat treatment
moving beam
insulating material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13960485U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13960485U priority Critical patent/JPS6247125U/ja
Publication of JPS6247125U publication Critical patent/JPS6247125U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Reciprocating Conveyors (AREA)
  • Intermediate Stations On Conveyors (AREA)

Description

【図面の簡単な説明】
第１図および第２図はこの考案の一実施例によ
るウエハ搬送装置の平面図と正面図、第３図は熱
処理プレートとアームの拡大図、第４図は上下移
動ビームの他の実施例を示すウエハ搬送装置の平
面図、第５図および第６図は上下移動ビームの２
つの結合方法を示す拡大図である。 図において、１，２は熱処理プレート、５は上
下移動ビーム、５ａは断熱材、７ａ，７ｂ，７ｃ
はアーム、１６ａ，１６ｂ，１６ｃはウエハであ
る。なお、図中同一符号は同一又は相当部分を示
す。

Claims (1)

    【実用新案登録請求の範囲】
  1. 半導体ウエハの熱処理プレートにおける搬送装
    置において、搬送アームにウエハを乗せ変える上
    下移動ビームを有し、ビームは分割され、断熱材
    を介して結合したことを特徴とするウエハ搬送装
    置。
JP13960485U 1985-09-12 1985-09-12 Pending JPS6247125U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13960485U JPS6247125U (ja) 1985-09-12 1985-09-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13960485U JPS6247125U (ja) 1985-09-12 1985-09-12

Publications (1)

Publication Number Publication Date
JPS6247125U true JPS6247125U (ja) 1987-03-23

Family

ID=31045665

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13960485U Pending JPS6247125U (ja) 1985-09-12 1985-09-12

Country Status (1)

Country Link
JP (1) JPS6247125U (ja)

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