JPS6265546U - - Google Patents
Info
- Publication number
- JPS6265546U JPS6265546U JP15669985U JP15669985U JPS6265546U JP S6265546 U JPS6265546 U JP S6265546U JP 15669985 U JP15669985 U JP 15669985U JP 15669985 U JP15669985 U JP 15669985U JP S6265546 U JPS6265546 U JP S6265546U
- Authority
- JP
- Japan
- Prior art keywords
- optical axis
- mounting member
- substrate
- light
- irradiated light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 3
- 230000003287 optical effect Effects 0.000 claims 2
- 230000007547 defect Effects 0.000 claims 1
- 238000007689 inspection Methods 0.000 claims 1
- 210000000078 claw Anatomy 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Description
第１図は本考案の一実施例を示す概略図、第２
図はその上面図である。 １……検体、２……ツメ、３……試料台、４…
…投光機、５……拡大鏡。
図はその上面図である。 １……検体、２……ツメ、３……試料台、４…
…投光機、５……拡大鏡。
Claims (1)
- 一面が開放面とされ内面に反射防止処理が施さ
れた中空体と、上記開放面に被観測透明基板を取
付ける取付け部材と、コリメートされた照射光を
上記取付部材により取付けられた基板表面に対し
斜め上方より照射する手段と、該照射光の反射光
軸と異なる光軸を有し、上記照射光の照射点を俯
瞰するデフエクト観察用の拡大鏡とを有する基板
表面検査機。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15669985U JPS6265546U (ja) | 1985-10-14 | 1985-10-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15669985U JPS6265546U (ja) | 1985-10-14 | 1985-10-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6265546U true JPS6265546U (ja) | 1987-04-23 |
Family
ID=31078562
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15669985U Pending JPS6265546U (ja) | 1985-10-14 | 1985-10-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6265546U (ja) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58184116A (ja) * | 1982-04-21 | 1983-10-27 | Matsushita Electric Ind Co Ltd | 透光性物体表面の欠陥検査方法 |
-
1985
- 1985-10-14 JP JP15669985U patent/JPS6265546U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58184116A (ja) * | 1982-04-21 | 1983-10-27 | Matsushita Electric Ind Co Ltd | 透光性物体表面の欠陥検査方法 |