JPS6285332U - - Google Patents
Info
- Publication number
- JPS6285332U JPS6285332U JP17797785U JP17797785U JPS6285332U JP S6285332 U JPS6285332 U JP S6285332U JP 17797785 U JP17797785 U JP 17797785U JP 17797785 U JP17797785 U JP 17797785U JP S6285332 U JPS6285332 U JP S6285332U
- Authority
- JP
- Japan
- Prior art keywords
- air supply
- supply passage
- movable table
- supply hole
- clamped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Machine Tool Units (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Description
第１図はこの考案のスライドテーブル装置を示
す斜面図、第２図及び第３図は第１図のＡ―Ａ線
及びＢ―Ｂ線に於ける断面図、第４図は移動テー
ブルの側板の平面図、第５図及び第６図はその側
面図及び正面図、第７図は移動テーブルの上下の
板の平面図、第８図及び第９図はその側面図及び
正面図、第１０図はこの考案と従来のスライドテ
ーブルの軸受剛性の測定結果を示す線図、第１１
図は従来のスライドテーブル装置を示す斜面図、
第１２図及び第１３図は第１１図のＣ―Ｃ線及び
Ｄ―Ｄ線に於ける縦断面図、第１４図は移動テー
ブルが変形した状態を示す縦断面図である。
２０……テーブルガイド、２１……ガイド部、
２２……第１給気通路、２３……第１給気孔、２
４……移動テーブル、２５……側板、２６……上
下の板、２７，２８……軸受スキマ、２９……中
央溝、３０……第２給気孔、３１……第２給気通
路、３２……軸受溝、３３……連絡溝、３４……
第３給気通路、３５……排気溝、３６……軸受部
、３７……第４給気通路、３８……第５給気通路
、３９……第３給気孔、４０……オリフイス、４
１……第４給気孔、４２……軸受溝、４３……補
助溝、４４……エアーホース。
Figure 1 is a perspective view showing the slide table device of this invention, Figures 2 and 3 are sectional views taken along lines AA and B-B in Figure 1, and Figure 4 is a side plate of the movable table. 5 and 6 are its side and front views; FIG. 7 is a plan view of the upper and lower plates of the moving table; FIGS. 8 and 9 are its side and front views; Figure 11 is a diagram showing the measurement results of the bearing rigidity of this invention and the conventional slide table.
The figure is a perspective view showing a conventional slide table device.
12 and 13 are longitudinal sectional views taken along lines CC and DD in FIG. 11, and FIG. 14 is a longitudinal sectional view showing the moving table in a deformed state. 20... table guide, 21... guide section,
22...First air supply passage, 23...First air supply hole, 2
4...Moving table, 25...Side plate, 26...Upper and lower plates, 27, 28...Bearing gap, 29...Central groove, 30...Second air supply hole, 31...Second air supply passage, 32 ... Bearing groove, 33 ... Communication groove, 34 ...
3rd air supply passage, 35...exhaust groove, 36...bearing section, 37...4th air supply passage, 38...5th air supply passage, 39...3rd air supply hole, 40...orifice, 4
1... Fourth air supply hole, 42... Bearing groove, 43... Auxiliary groove, 44... Air hose.
Claims (1)
形状に形成した移動テーブルをテーブルガイドに
抱持させたスライドテーブル装置であつて、テー
ブルガイドの中心部に給気通路を形成し、この給
気通路から分岐してテーブルガイドの移動テーブ
ルの被挾持板に対向する表面に開口する給気孔を
形成すると共に前記移動テーブルの被挾持板表面
に前記給気孔を形成し、かつ、前記移動テーブル
の被挾持板表面に前記給気孔と対向させて、該給
気孔の直径より僅かに広い幅で、移動テーブルの
移動ストロールと同等或いはそれより僅かに長い
長さの溝を形成し、この溝と連通する表面絞り用
の浅い軸受溝を被挾持板表面全域に沿つて形成す
ると共に、前記溝と連通する給気通路を移動テー
ブルの被挾持板内部に形成し、この給気通路と連
通する給気通路を移動テーブルの移動方向に沿つ
て移動テーブルの挾持板内部に形成し、更にこの
給気通路の数個所に該給気通路から分岐して移動
テーブルの挾持板内面に開口され、その内端部に
絞りを設けた給気孔を形成したことを特徴とする
スライドテーブル装置。 A slide table device in which a table guide holds a movable table formed into a rectangular shape by sandwiching a pair of clamped plates between a pair of clamping plates, and an air supply passage is formed in the center of the table guide, An air supply hole is formed that branches from the air supply passage and opens on a surface of the table guide facing the clamped plate of the movable table, and the air supply hole is formed on the surface of the clamped plate of the movable table, and A groove is formed on the surface of the clamped plate of the table, facing the air supply hole, and has a width slightly wider than the diameter of the air supply hole and a length equal to or slightly longer than the moving stroll of the moving table. A shallow bearing groove for surface aperture communicating with is formed along the entire surface of the clamped plate, and an air supply passage communicating with the groove is formed inside the clamped plate of the movable table, and communicates with the air supply passage. An air supply passage is formed inside the clamping plate of the movable table along the moving direction of the movable table, and the air supply passage branches off from the air supply passage at several places and is opened on the inner surface of the clamping plate of the movable table. A slide table device characterized by forming an air supply hole with a throttle at the inner end.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17797785U JPH0230186Y2 (en) | 1985-11-19 | 1985-11-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17797785U JPH0230186Y2 (en) | 1985-11-19 | 1985-11-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6285332U true JPS6285332U (en) | 1987-05-30 |
| JPH0230186Y2 JPH0230186Y2 (en) | 1990-08-14 |
Family
ID=31119677
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17797785U Expired JPH0230186Y2 (en) | 1985-11-19 | 1985-11-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0230186Y2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6451241A (en) * | 1987-08-20 | 1989-02-27 | Toyoda Machine Works Ltd | Hydrostatic supporting device for slider |
| JPH02209620A (en) * | 1989-02-04 | 1990-08-21 | Toyoda Mach Works Ltd | Pivotally mounting device for angular slide static pressure |
| JP2009209962A (en) * | 2008-02-29 | 2009-09-17 | Nikon Corp | Fluid bearing, stage apparatus, exposure device, and device manufacturing method |
| JP2010161926A (en) * | 2010-04-21 | 2010-07-22 | Seiko Instruments Inc | Actuator and table device |
| JP2011510229A (en) * | 2008-01-14 | 2011-03-31 | ユーピーエム リミテッド | Hydrostatic air bearing |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101857272B1 (en) * | 2017-04-26 | 2018-05-14 | 덕흥 주식회사 | Clamping structure of screw processing apparatus |
-
1985
- 1985-11-19 JP JP17797785U patent/JPH0230186Y2/ja not_active Expired
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6451241A (en) * | 1987-08-20 | 1989-02-27 | Toyoda Machine Works Ltd | Hydrostatic supporting device for slider |
| JPH02209620A (en) * | 1989-02-04 | 1990-08-21 | Toyoda Mach Works Ltd | Pivotally mounting device for angular slide static pressure |
| JP2011510229A (en) * | 2008-01-14 | 2011-03-31 | ユーピーエム リミテッド | Hydrostatic air bearing |
| JP2009209962A (en) * | 2008-02-29 | 2009-09-17 | Nikon Corp | Fluid bearing, stage apparatus, exposure device, and device manufacturing method |
| JP2010161926A (en) * | 2010-04-21 | 2010-07-22 | Seiko Instruments Inc | Actuator and table device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0230186Y2 (en) | 1990-08-14 |
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