JPS63173374U - - Google Patents

Info

Publication number
JPS63173374U
JPS63173374U JP6751987U JP6751987U JPS63173374U JP S63173374 U JPS63173374 U JP S63173374U JP 6751987 U JP6751987 U JP 6751987U JP 6751987 U JP6751987 U JP 6751987U JP S63173374 U JPS63173374 U JP S63173374U
Authority
JP
Japan
Prior art keywords
elastic body
base
outer edge
shaped
edge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6751987U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6751987U priority Critical patent/JPS63173374U/ja
Publication of JPS63173374U publication Critical patent/JPS63173374U/ja
Pending legal-status Critical Current

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Landscapes

  • Coating Apparatus (AREA)

Description

【図面の簡単な説明】
第1図は、本考案吸引固定具の縦断面図、第2
図は同平面図である。 1…基台、3…弾性体の帯状片、4…真空引き
用溝、5…連通孔、6…吸引孔。

Claims (1)

    【実用新案登録請求の範囲】
  1. 板状の回転自在の基台の外縁上面に沿つて帯状
    の弾性体が装着され、この弾性体の内側縁は、基
    台上に載置される板状被塗布物の外縁寄り部を弾
    性体上に載置できるように、被塗布物の外縁より
    内側に形成され、弾性体の内側縁より内側にそれ
    に沿つて、基台上面に真空引き用溝が形成され、
    この溝が真空源に接続されていることを特徴とす
    る被膜塗布装置用吸引固定具。
JP6751987U 1987-05-06 1987-05-06 Pending JPS63173374U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6751987U JPS63173374U (ja) 1987-05-06 1987-05-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6751987U JPS63173374U (ja) 1987-05-06 1987-05-06

Publications (1)

Publication Number Publication Date
JPS63173374U true JPS63173374U (ja) 1988-11-10

Family

ID=30906503

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6751987U Pending JPS63173374U (ja) 1987-05-06 1987-05-06

Country Status (1)

Country Link
JP (1) JPS63173374U (ja)

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