JPS6396884A - セラミツクヒ−タ− - Google Patents

セラミツクヒ−タ−

Info

Publication number
JPS6396884A
JPS6396884A JP24271886A JP24271886A JPS6396884A JP S6396884 A JPS6396884 A JP S6396884A JP 24271886 A JP24271886 A JP 24271886A JP 24271886 A JP24271886 A JP 24271886A JP S6396884 A JPS6396884 A JP S6396884A
Authority
JP
Japan
Prior art keywords
potential
ionized component
component retention
ceramic
ceramic heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24271886A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0578916B2 (2
Inventor
孝夫 小島
神　嘉秀
石黒　宏之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Niterra Co Ltd
Original Assignee
NGK Spark Plug Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Spark Plug Co Ltd filed Critical NGK Spark Plug Co Ltd
Priority to JP24271886A priority Critical patent/JPS6396884A/ja
Publication of JPS6396884A publication Critical patent/JPS6396884A/ja
Publication of JPH0578916B2 publication Critical patent/JPH0578916B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Surface Heating Bodies (AREA)
  • Resistance Heating (AREA)
JP24271886A 1986-10-13 1986-10-13 セラミツクヒ−タ− Granted JPS6396884A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24271886A JPS6396884A (ja) 1986-10-13 1986-10-13 セラミツクヒ−タ−

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24271886A JPS6396884A (ja) 1986-10-13 1986-10-13 セラミツクヒ−タ−

Publications (2)

Publication Number Publication Date
JPS6396884A true JPS6396884A (ja) 1988-04-27
JPH0578916B2 JPH0578916B2 (2) 1993-10-29

Family

ID=17093206

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24271886A Granted JPS6396884A (ja) 1986-10-13 1986-10-13 セラミツクヒ−タ−

Country Status (1)

Country Link
JP (1) JPS6396884A (2)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04101381A (ja) * 1990-08-17 1992-04-02 Ngk Insulators Ltd 半導体ウエハー加熱装置
JPH0543495U (ja) * 1991-11-12 1993-06-11 日本特殊陶業株式会社 セラミツクヒータ

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5634282B2 (ja) * 2011-01-31 2014-12-03 日本特殊陶業株式会社 セラミックヒータ及びグロープラグ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60212986A (ja) * 1984-04-06 1985-10-25 日本特殊陶業株式会社 直流電圧印加用セラミツクヒ−タ−

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60212986A (ja) * 1984-04-06 1985-10-25 日本特殊陶業株式会社 直流電圧印加用セラミツクヒ−タ−

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04101381A (ja) * 1990-08-17 1992-04-02 Ngk Insulators Ltd 半導体ウエハー加熱装置
JPH0543495U (ja) * 1991-11-12 1993-06-11 日本特殊陶業株式会社 セラミツクヒータ

Also Published As

Publication number Publication date
JPH0578916B2 (2) 1993-10-29

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term