JPS6421916A - Vapor growth apparatus - Google Patents

Vapor growth apparatus

Info

Publication number
JPS6421916A
JPS6421916A JP17802587A JP17802587A JPS6421916A JP S6421916 A JPS6421916 A JP S6421916A JP 17802587 A JP17802587 A JP 17802587A JP 17802587 A JP17802587 A JP 17802587A JP S6421916 A JPS6421916 A JP S6421916A
Authority
JP
Japan
Prior art keywords
susceptor
liner
bell jar
vapor growth
length
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17802587A
Other languages
Japanese (ja)
Inventor
Hiroharu Kawai
Fumihiko Nakamura
Masahisa Enomoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP17802587A priority Critical patent/JPS6421916A/en
Publication of JPS6421916A publication Critical patent/JPS6421916A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To make it possible to introduce reacting gas uniformly to a substrate and to change the composition of the gas steeply, by arranging a liner and a bell jar so as to face each other at the upper stream of a susceptor in an approximately cylindrical form in a barrel type vapor growth apparatus. CONSTITUTION:In a barrel type vapor growth apparatus, a liner 33 and a bell jar 32 are arranged in an approximately cylindrical shape at the upper stream of a susceptor 16. For example, in a reacting tube 31, the following parts are provided: the cylindrical bell jar 32, which has a gas introducing port 19 at the upper end part and has an inner diameter of 160mm; and the cylindrical liner 33, which has the closed upper end, an outer diameter of 110mm and a length of 120mm. The liner 33 and the bell jar 32 are concentrically arranged so as to face each other. A gas introducing path 34 having the uniform cross section is formed along the length of 120mm directly on the susceptor 16. A heating means is arranged at the inside of the susceptor 16. The tilt angle thetaof the susceptor 16 is 5 deg.. The length of the susceptor is 180mm. A substrate 18, which undergoes vapor growth, is arranged on the susceptor 16.
JP17802587A 1987-07-16 1987-07-16 Vapor growth apparatus Pending JPS6421916A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17802587A JPS6421916A (en) 1987-07-16 1987-07-16 Vapor growth apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17802587A JPS6421916A (en) 1987-07-16 1987-07-16 Vapor growth apparatus

Publications (1)

Publication Number Publication Date
JPS6421916A true JPS6421916A (en) 1989-01-25

Family

ID=16041267

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17802587A Pending JPS6421916A (en) 1987-07-16 1987-07-16 Vapor growth apparatus

Country Status (1)

Country Link
JP (1) JPS6421916A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01140816U (en) * 1988-03-22 1989-09-27

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01140816U (en) * 1988-03-22 1989-09-27

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