JPS6422086A - Control equipment for laser wavelength - Google Patents

Control equipment for laser wavelength

Info

Publication number
JPS6422086A
JPS6422086A JP17732087A JP17732087A JPS6422086A JP S6422086 A JPS6422086 A JP S6422086A JP 17732087 A JP17732087 A JP 17732087A JP 17732087 A JP17732087 A JP 17732087A JP S6422086 A JPS6422086 A JP S6422086A
Authority
JP
Japan
Prior art keywords
wavelength
selection element
narrow
laser beam
beam whose
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17732087A
Other languages
Japanese (ja)
Inventor
Osamu Wakabayashi
Yasuo Itakura
Masahiko Kowaka
Yoshio Amada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Komatsu Ltd
Original Assignee
Komatsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Komatsu Ltd filed Critical Komatsu Ltd
Priority to JP17732087A priority Critical patent/JPS6422086A/en
Priority to DE883891284T priority patent/DE3891284T1/en
Priority to PCT/JP1988/000713 priority patent/WO1989000779A1/en
Publication of JPS6422086A publication Critical patent/JPS6422086A/en
Priority to US07/721,929 priority patent/US5373515A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
    • H01S3/136—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling devices placed within the cavity
    • H01S3/137—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling devices placed within the cavity for stabilising of frequency
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

PURPOSE:To enable the highly accurate control of an narrow band oscillation excimer laser for a long time, by making the oscillation bandwidth narrow, by arranging a wavelength selection element, applying an etalon or diffraction grating type spectroscope to a wavelength detector, and performing the feedback control of a selected wavelength. CONSTITUTION:The resonator of a narrow band oscillation excimer laser is constituted by arranging a wavelength selection element 2 and a laser chamber 3 between a rear mirror 1 and a front mirror 5. A wavelength detector 8 detects the respective wavelengths of a reference light and a laser beam whose bandwidth is made narrow, and the detected outputs are delivered to a wavelength controller 9, which calculates the absolute value of the laser beam whose bandwidth is made narrow, according to the wavelength of a reference light, and calculates the difference between a set wavelength and a laser beam whose bandwidth is made narrow. In order to change the selection wavelength of the wavelength selection element 2 by the amount of the above-mentioned difference, a signal is sent from the wavelength controller 9 to a wavelength selection element driver 10, which makes the wavelength selection element 2 change the selection wavelength.
JP17732087A 1987-07-17 1987-07-17 Control equipment for laser wavelength Pending JPS6422086A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP17732087A JPS6422086A (en) 1987-07-17 1987-07-17 Control equipment for laser wavelength
DE883891284T DE3891284T1 (en) 1987-07-17 1988-07-18 LASER SHAFT LENGTH CONTROL DEVICE
PCT/JP1988/000713 WO1989000779A1 (en) 1987-07-17 1988-07-18 Apparatus for controlling laser wavelength
US07/721,929 US5373515A (en) 1987-07-17 1991-06-21 Laser wavelength controlling apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17732087A JPS6422086A (en) 1987-07-17 1987-07-17 Control equipment for laser wavelength

Publications (1)

Publication Number Publication Date
JPS6422086A true JPS6422086A (en) 1989-01-25

Family

ID=16028919

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17732087A Pending JPS6422086A (en) 1987-07-17 1987-07-17 Control equipment for laser wavelength

Country Status (1)

Country Link
JP (1) JPS6422086A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01101683A (en) * 1987-10-14 1989-04-19 Mitsubishi Electric Corp Stabilization of laser wavelength and wavelength stabilized laser
JPH0312975A (en) * 1989-06-12 1991-01-21 Nikon Corp Laser oscillator and exposure device using same
JPH0364084A (en) * 1989-08-02 1991-03-19 Kokusai Denshin Denwa Co Ltd <Kdd> Frequency stabilized light source
US5243614A (en) * 1990-11-28 1993-09-07 Mitsubishi Denki Kabushiki Kaisha Wavelength stabilizer for narrow bandwidth laser
WO1999001890A1 (en) * 1997-07-03 1999-01-14 Hamamatsu Photonics K.K. Discharge tube and method of calibrating laser wavelength by using the same
JP2014016247A (en) * 2012-07-09 2014-01-30 Shimadzu Corp Wavelength variable monochromatic light source
JP2018503872A (en) * 2014-12-29 2018-02-08 エーエスエムエル ホールディング エヌ．ブイ． Feedback control system for alignment system

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01101683A (en) * 1987-10-14 1989-04-19 Mitsubishi Electric Corp Stabilization of laser wavelength and wavelength stabilized laser
JPH0312975A (en) * 1989-06-12 1991-01-21 Nikon Corp Laser oscillator and exposure device using same
JPH0364084A (en) * 1989-08-02 1991-03-19 Kokusai Denshin Denwa Co Ltd <Kdd> Frequency stabilized light source
US5243614A (en) * 1990-11-28 1993-09-07 Mitsubishi Denki Kabushiki Kaisha Wavelength stabilizer for narrow bandwidth laser
WO1999001890A1 (en) * 1997-07-03 1999-01-14 Hamamatsu Photonics K.K. Discharge tube and method of calibrating laser wavelength by using the same
JP2014016247A (en) * 2012-07-09 2014-01-30 Shimadzu Corp Wavelength variable monochromatic light source
JP2018503872A (en) * 2014-12-29 2018-02-08 エーエスエムエル ホールディング エヌ．ブイ． Feedback control system for alignment system
US10082740B2 (en) 2014-12-29 2018-09-25 Asml Holding N.V. Feedback control system of an alignment system

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