JPS6425541A - Vertical cvd reaction apparatus - Google Patents
Vertical cvd reaction apparatusInfo
- Publication number
- JPS6425541A JPS6425541A JP18285387A JP18285387A JPS6425541A JP S6425541 A JPS6425541 A JP S6425541A JP 18285387 A JP18285387 A JP 18285387A JP 18285387 A JP18285387 A JP 18285387A JP S6425541 A JPS6425541 A JP S6425541A
- Authority
- JP
- Japan
- Prior art keywords
- tube
- cooling tube
- reaction
- supporting body
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 abstract 9
- 238000010438 heat treatment Methods 0.000 abstract 3
- 239000012495 reaction gas Substances 0.000 abstract 3
- 239000007789 gas Substances 0.000 abstract 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 1
- 229910002804 graphite Inorganic materials 0.000 abstract 1
- 239000010439 graphite Substances 0.000 abstract 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18285387A JPS6425541A (en) | 1987-07-22 | 1987-07-22 | Vertical cvd reaction apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18285387A JPS6425541A (en) | 1987-07-22 | 1987-07-22 | Vertical cvd reaction apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6425541A true JPS6425541A (en) | 1989-01-27 |
Family
ID=16125601
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18285387A Pending JPS6425541A (en) | 1987-07-22 | 1987-07-22 | Vertical cvd reaction apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6425541A (ja) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004507898A (ja) * | 2000-09-01 | 2004-03-11 | アイクストロン、アーゲー | 特に結晶質の基板上に、特に結晶質の層を沈積する装置および方法 |
| JP2006080196A (ja) * | 2004-09-08 | 2006-03-23 | Taiyo Nippon Sanso Corp | 気相成長装置 |
| JP2012144386A (ja) * | 2011-01-07 | 2012-08-02 | Denso Corp | 炭化珪素単結晶の製造装置 |
-
1987
- 1987-07-22 JP JP18285387A patent/JPS6425541A/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004507898A (ja) * | 2000-09-01 | 2004-03-11 | アイクストロン、アーゲー | 特に結晶質の基板上に、特に結晶質の層を沈積する装置および方法 |
| JP2006080196A (ja) * | 2004-09-08 | 2006-03-23 | Taiyo Nippon Sanso Corp | 気相成長装置 |
| JP2012144386A (ja) * | 2011-01-07 | 2012-08-02 | Denso Corp | 炭化珪素単結晶の製造装置 |
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