JPS6426368U - - Google Patents
Info
- Publication number
- JPS6426368U JPS6426368U JP11984487U JP11984487U JPS6426368U JP S6426368 U JPS6426368 U JP S6426368U JP 11984487 U JP11984487 U JP 11984487U JP 11984487 U JP11984487 U JP 11984487U JP S6426368 U JPS6426368 U JP S6426368U
- Authority
- JP
- Japan
- Prior art keywords
- heated
- heating surface
- substrate
- heating
- linear
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims 5
- 239000000758 substrate Substances 0.000 claims 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は、本考案の一実施例としての亜鉛真空
蒸着装置の要部にパネル形ヒーターを装着した状
態を示す縦断面概念図、第２図は第１図の―
視部分平面図、第３図は第２図を部分拡大した平
面図、第４図は第３図の―断面図である。ま
た、第５図は従来装置の一例を示す縦断面概念図
、第６図は第５図の―視部分平面図である。
１……チヤンネル、１ａ……溝部、２……巻付
けロール、３，４……インナダクト、６……スノ
ーケル、８，９……インナダクト、１０……パネ
ル形ヒータ、１１……シーズヒータ、１２……基
板、１３……押え板。
FIG. 1 is a conceptual vertical cross-sectional view showing a state in which a panel heater is attached to the main part of a zinc vacuum evaporation apparatus as an embodiment of the present invention, and FIG.
3 is a partially enlarged plan view of FIG. 2, and FIG. 4 is a cross-sectional view of FIG. 3. Further, FIG. 5 is a conceptual longitudinal cross-sectional view showing an example of a conventional device, and FIG. 6 is a partial plan view of FIG. 5 when viewed from above. 1... Channel, 1a... Groove, 2... Winding roll, 3, 4... Inner duct, 6... Snorkel, 8, 9... Inner duct, 10... Panel type heater, 11... Sheathed heater, 12 ... Board, 13 ... Holding plate.
Claims (1)
で挟持すると共に被加熱物の加熱面形状に合せて
小分割のパネル状に形成し、前記被加熱物の加熱
面に前記基板が埋入する凹部を設け、前記線状発
熱体が前記被加熱物の加熱面に当接或いは極近接
して前記被加熱物に装着することを特徴とするパ
ネル形ヒータ。 A plurality of linear heating elements are arranged side by side and sandwiched between a substrate and a holding plate, and are formed into subdivided panels according to the shape of the heating surface of the object to be heated, so that the substrate is on the heating surface of the object to be heated. A panel heater characterized in that a recess is provided for embedding, and the linear heating element is attached to the object to be heated in contact with or very close to the heating surface of the object to be heated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11984487U JPS6426368U (en) | 1987-08-06 | 1987-08-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11984487U JPS6426368U (en) | 1987-08-06 | 1987-08-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6426368U true JPS6426368U (en) | 1989-02-14 |
Family
ID=31365429
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11984487U Pending JPS6426368U (en) | 1987-08-06 | 1987-08-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6426368U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6255559B2 (en) * | 1980-06-23 | 1987-11-20 | Japan Synthetic Rubber Co Ltd |
-
1987
- 1987-08-06 JP JP11984487U patent/JPS6426368U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6255559B2 (en) * | 1980-06-23 | 1987-11-20 | Japan Synthetic Rubber Co Ltd |