JPS6435165A - Feed screw - Google Patents

Feed screw

Info

Publication number
JPS6435165A
JPS6435165A JP62189713A JP18971387A JPS6435165A JP S6435165 A JPS6435165 A JP S6435165A JP 62189713 A JP62189713 A JP 62189713A JP 18971387 A JP18971387 A JP 18971387A JP S6435165 A JPS6435165 A JP S6435165A
Authority
JP
Japan
Prior art keywords
nuts
movable stage
accuracy
control circuit
pressure sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62189713A
Other languages
Japanese (ja)
Inventor
Yutaka Hayashi
Masashi Okada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP62189713A priority Critical patent/JPS6435165A/en
Publication of JPS6435165A publication Critical patent/JPS6435165A/en
Pending legal-status Critical Current

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  • Transmission Devices (AREA)

Abstract

PURPOSE:To perform positioning in a short time with a high degree of accuracy by deforming a resilint deformable member between first and second nuts in accordance with an external signal which is produced in response to the movement of a movable member, so that different pressurizing forces and/or directions may be exerted to the nuts. CONSTITUTION:A subnut 6 is attached to a main nut 4 provided on movable stage 3, through the intermediary of a piezoelectric actuator 8, a pressure sensor 9 and a leaf spring 5, and is screwed onto a feed screw 2. A control circuit 20 receives signals from a pressure sensor 9 and an accelerometer 10, and computes precise positioning data of the movable stage 3 so as to drive a servomotor 1. Further, the control circuit 20 delivers data for controlling at least one of the degree of pressing force between both nuts 4, 6 and the direction thereof in accordance with an inertia force during deceleration, to the acruator 8. Accordingly, it is possible to position the movable stage 3 in a short time with a high degree of accuracy.
JP62189713A 1987-07-29 1987-07-29 Feed screw Pending JPS6435165A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62189713A JPS6435165A (en) 1987-07-29 1987-07-29 Feed screw

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62189713A JPS6435165A (en) 1987-07-29 1987-07-29 Feed screw

Publications (1)

Publication Number Publication Date
JPS6435165A true JPS6435165A (en) 1989-02-06

Family

ID=16245949

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62189713A Pending JPS6435165A (en) 1987-07-29 1987-07-29 Feed screw

Country Status (1)

Country Link
JP (1) JPS6435165A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007522403A (en) * 2004-02-13 2007-08-09 ヴィッテンシュタイン アーゲー Rack and pinion linear drive
JP2009086472A (en) * 2007-10-02 2009-04-23 Funai Electric Co Ltd Imaging apparatus
CN113021053A (en) * 2021-03-15 2021-06-25 大连理工大学 Self-healing test device and method for precision of feeding shaft of numerical control machine tool

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007522403A (en) * 2004-02-13 2007-08-09 ヴィッテンシュタイン アーゲー Rack and pinion linear drive
JP2009086472A (en) * 2007-10-02 2009-04-23 Funai Electric Co Ltd Imaging apparatus
CN113021053A (en) * 2021-03-15 2021-06-25 大连理工大学 Self-healing test device and method for precision of feeding shaft of numerical control machine tool

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