JPS645084A - Silent discharge type laser device - Google Patents

Silent discharge type laser device

Info

Publication number
JPS645084A
JPS645084A JP16169187A JP16169187A JPS645084A JP S645084 A JPS645084 A JP S645084A JP 16169187 A JP16169187 A JP 16169187A JP 16169187 A JP16169187 A JP 16169187A JP S645084 A JPS645084 A JP S645084A
Authority
JP
Japan
Prior art keywords
dielectric
temperature
output voltage
laser device
discharge type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16169187A
Other languages
Japanese (ja)
Inventor
Tsukasa Fukushima
Akihiro Otani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP16169187A priority Critical patent/JPS645084A/en
Publication of JPS645084A publication Critical patent/JPS645084A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

PURPOSE:To detect the abnormal temperature of the dielectric of a dielectric electrode securely and prevent the dielectric from being damaged by a method wherein a temperature detecting means composed of a temperature sensor and an optical fiber is provided on the dielectric. CONSTITUTION:When the temperature of a dielectric 3a or 3b rises, the temperature of a temperature sensor part 20 rises. The temperature rise is supplied to an optical transmitter/receiver 23 through an optical fiber 21 and the output voltage V1 of the optical transmitter/receiver 23 is elevated. If the output voltage V1 exceeds a certain threshold voltage V2 inputted (-) to the input terminal of a comparator 24, a high level output voltage V3 is outputted to an electric source 9. When the level of the output voltage V3 is high, the application of a radio frequency voltage V4 which is the output of the source 9 to a dielectric electrode 4a or 4b is discontinued.
JP16169187A 1987-06-29 1987-06-29 Silent discharge type laser device Pending JPS645084A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16169187A JPS645084A (en) 1987-06-29 1987-06-29 Silent discharge type laser device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16169187A JPS645084A (en) 1987-06-29 1987-06-29 Silent discharge type laser device

Publications (1)

Publication Number Publication Date
JPS645084A true JPS645084A (en) 1989-01-10

Family

ID=15740028

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16169187A Pending JPS645084A (en) 1987-06-29 1987-06-29 Silent discharge type laser device

Country Status (1)

Country Link
JP (1) JPS645084A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8116346B2 (en) * 2010-01-22 2012-02-14 Coherent, Inc. CO2 laser output power control during warm-up
US8351480B2 (en) 2009-10-13 2013-01-08 Coherent, Inc. Digital pulse-width-modulation control of a radio frequency power supply for pulsed laser

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8351480B2 (en) 2009-10-13 2013-01-08 Coherent, Inc. Digital pulse-width-modulation control of a radio frequency power supply for pulsed laser
US8116346B2 (en) * 2010-01-22 2012-02-14 Coherent, Inc. CO2 laser output power control during warm-up

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