JPS646045U - - Google Patents
Info
- Publication number
- JPS646045U JPS646045U JP9940387U JP9940387U JPS646045U JP S646045 U JPS646045 U JP S646045U JP 9940387 U JP9940387 U JP 9940387U JP 9940387 U JP9940387 U JP 9940387U JP S646045 U JPS646045 U JP S646045U
- Authority
- JP
- Japan
- Prior art keywords
- protrusion
- workpiece
- block type
- type receiver
- workpiece support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000002441 X-ray diffraction Methods 0.000 claims description 3
- 239000000470 constituent Substances 0.000 claims 1
- 238000005259 measurement Methods 0.000 description 5
- 239000013078 crystal Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Jigs For Machine Tools (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は、本考案を用いたＯＦ面確認のための
測定状態を示す平面図。第２図は、本考案を用い
たＯＦ面確認のための測定状態を示す正面図。第
３図は、本考案の一実施例に用いられるワーク載
置器の斜視図。第４図は、本考案を用いた結晶方
位の測定状態を示す平面図。第５図は、本考案を
用いた結晶方位の測定状態を示す正面図。第６図
は、従来のＯＦ面確認のための測定装置の要部縦
断面図。第７図は、従来の結晶方位測定のための
測定装置の要部縦断面図。第８図は、本考案を用
いたＯＦ面確認のための他の測定状態を示す正面
図。
１……直線溝、２……Ｖブロツク型受器、３…
…突部、４……ワーク載置器、５……Ｘ線回析用
窓、６……ワーク支持体、７……シリコン単結晶
インゴツト、８……Ｘ線、１０，１０′……ワー
ク載置部、１１……ボルト。
FIG. 1 is a plan view showing a measurement state for confirming the OF surface using the present invention. FIG. 2 is a front view showing a measurement state for confirming the OF surface using the present invention. FIG. 3 is a perspective view of a workpiece mounting device used in an embodiment of the present invention. FIG. 4 is a plan view showing the measurement state of crystal orientation using the present invention. FIG. 5 is a front view showing the measurement state of crystal orientation using the present invention. FIG. 6 is a vertical cross-sectional view of a main part of a conventional measuring device for confirming the OF surface. FIG. 7 is a vertical cross-sectional view of a main part of a conventional measuring device for measuring crystal orientation. FIG. 8 is a front view showing another measurement state for confirming the OF surface using the present invention. 1... Straight groove, 2... V block type receiver, 3...
... Protrusion, 4 ... Workpiece mounting device, 5 ... X-ray diffraction window, 6 ... Workpiece support, 7 ... Silicon single crystal ingot, 8 ... X-ray, 10, 10' ... Workpiece Placement part, 11... bolt.
Claims (1)
直線溝を奥行方向に穿設したＶブロツク型受器と
、 前記直線溝の断面形状に略一致する断面形状を
有し、前記直線溝に対し摺動可能な突部を備え且
つ、前記Ｖブロツク型受器の斜面及び／又は上面
に密着して摺動できる面をその一構成面として前
記突部以外にもつ断面多角形のワーク載置器と、 前記ワーク載置器に、その上面後端部に直立し
て設けられた、Ｘ線回析用窓を有するワーク支持
体と、 から成り、 前記直線溝と前記突部とが係合摺動可能である
ことにより、前記ワーク載置器が、前記Ｖブロツ
ク型受器から適宜着脱できることを特徴とする結
晶方位―オリエンテーシヨンフラツト面測定用治
具。[Claims for Utility Model Registration] A V-block type receiver in which one or more straight grooves with a slight width are bored in the depth direction on the slope and/or the upper surface, and a cross-sectional shape that substantially matches the cross-sectional shape of the straight groove. , and includes a protrusion that is slidable with respect to the straight groove, and a surface that can slide in close contact with the slope and/or upper surface of the V-block type receiver is defined as one of its constituent surfaces other than the protrusion. a workpiece support having a polygonal cross section; and a workpiece support having an X-ray diffraction window provided upright on the rear end of the upper surface of the workpiece supporter, the workpiece support having an X-ray diffraction window; and the protrusion are capable of engaging and sliding, so that the workpiece mounting device can be attached to and detached from the V-block type receiver as appropriate. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9940387U JPH034036Y2 (en) | 1987-06-30 | 1987-06-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9940387U JPH034036Y2 (en) | 1987-06-30 | 1987-06-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS646045U true JPS646045U (en) | 1989-01-13 |
| JPH034036Y2 JPH034036Y2 (en) | 1991-02-01 |
Family
ID=31326529
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9940387U Expired JPH034036Y2 (en) | 1987-06-30 | 1987-06-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH034036Y2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03236214A (en) * | 1990-02-13 | 1991-10-22 | Mitsubishi Electric Corp | Angle detecting apparatus |
| JP2008207272A (en) * | 2007-02-26 | 2008-09-11 | Rex Industries Co Ltd | Band saw machine |
| JP2018112421A (en) * | 2017-01-10 | 2018-07-19 | パルステック工業株式会社 | V-groove depth variable stage and x-ray diffraction measurement device |
-
1987
- 1987-06-30 JP JP9940387U patent/JPH034036Y2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03236214A (en) * | 1990-02-13 | 1991-10-22 | Mitsubishi Electric Corp | Angle detecting apparatus |
| JP2008207272A (en) * | 2007-02-26 | 2008-09-11 | Rex Industries Co Ltd | Band saw machine |
| JP2018112421A (en) * | 2017-01-10 | 2018-07-19 | パルステック工業株式会社 | V-groove depth variable stage and x-ray diffraction measurement device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH034036Y2 (en) | 1991-02-01 |