JPS6469204A - Semiconductor wafer cassette transfer device - Google Patents
Semiconductor wafer cassette transfer deviceInfo
- Publication number
- JPS6469204A JPS6469204A JP22501087A JP22501087A JPS6469204A JP S6469204 A JPS6469204 A JP S6469204A JP 22501087 A JP22501087 A JP 22501087A JP 22501087 A JP22501087 A JP 22501087A JP S6469204 A JPS6469204 A JP S6469204A
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- push
- receiving table
- running passage
- moving means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Intermediate Stations On Conveyors (AREA)
- Specific Conveyance Elements (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
- Non-Mechanical Conveyors (AREA)
Abstract
PURPOSE:To increase a transferred amount, by a method wherein a moving means, moving a relaying receiving table into the direction of Y-axis at the lower part of a parallel running passage arranged in the direction of X-axis, is arranged while a plurality of push-up tables, respectively corresponding to the moving means, is arranged below the running passage. CONSTITUTION:A cassette 2 is put on a waiting relaying receiving table 22, thereafter, the relaying receiving table 22 is moved to the lower position of a predetermined running passage 6 by a moving means 21. Next, a pneumatic cylinder 26 is operated to elevate a push-up table 25, supported by the pneumatic cylinder, 26 and push the cassette 2 on the receiving table 22. Subsequently, a placing table 20 at a retreated point is moved to the upper position of the receiving table 22. Then, the push-up table 25 is lowered, then, the cassette 2 is shifted onto the placing table 20. Thereafter, the placing table 20, on which the cassette 2 is placed is moved along the running passage 20.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22501087A JPS6469204A (en) | 1987-09-08 | 1987-09-08 | Semiconductor wafer cassette transfer device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22501087A JPS6469204A (en) | 1987-09-08 | 1987-09-08 | Semiconductor wafer cassette transfer device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6469204A true JPS6469204A (en) | 1989-03-15 |
Family
ID=16822661
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22501087A Pending JPS6469204A (en) | 1987-09-08 | 1987-09-08 | Semiconductor wafer cassette transfer device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6469204A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5609124A (en) * | 1993-05-21 | 1997-03-11 | Leclerc; Jacques | Hot water tank cleaning device |
| KR20220020909A (en) * | 2019-06-14 | 2022-02-21 | 실트로닉 아게 | Semiconductor wafer polishing apparatus and method |
-
1987
- 1987-09-08 JP JP22501087A patent/JPS6469204A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5609124A (en) * | 1993-05-21 | 1997-03-11 | Leclerc; Jacques | Hot water tank cleaning device |
| KR20220020909A (en) * | 2019-06-14 | 2022-02-21 | 실트로닉 아게 | Semiconductor wafer polishing apparatus and method |
| JP2022537523A (en) * | 2019-06-14 | 2022-08-26 | ジルトロニック アクチエンゲゼルシャフト | Equipment and method for polishing semiconductor wafers |
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