KR910013528A - 전원 및 접지금속 배선의 설계방법 - Google Patents

전원 및 접지금속 배선의 설계방법 Download PDF

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Publication number
KR910013528A
KR910013528A KR1019890020114A KR890020114A KR910013528A KR 910013528 A KR910013528 A KR 910013528A KR 1019890020114 A KR1019890020114 A KR 1019890020114A KR 890020114 A KR890020114 A KR 890020114A KR 910013528 A KR910013528 A KR 910013528A
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KR
South Korea
Prior art keywords
metal wiring
power
design method
ground metal
power supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
KR1019890020114A
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English (en)
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KR920006187B1 (ko
Inventor
김대용
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019890020114A priority Critical patent/KR920006187B1/ko
Publication of KR910013528A publication Critical patent/KR910013528A/ko
Application granted granted Critical
Publication of KR920006187B1 publication Critical patent/KR920006187B1/ko
Expired legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00Interconnections in chips, wafers or substrates
    • H10W20/40Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/41Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their conductive parts
    • H10W20/427Power or ground buses

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)

Abstract

내용 없음.

Description

전원 및 접지금속 배선의 설계방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제2도는 본 발명의 실시예.

Claims (1)

  1. 반도체 회로에 있어서, 전원전압 또는 접지선으로 사용되는 금속배선 상에 얇은 틈을 만들어 줌을 특징으로 하는 전원 접지금속 배선의 설계방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019890020114A 1989-12-29 1989-12-29 전원 및 접지 금속 배선의 설계방법 Expired KR920006187B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019890020114A KR920006187B1 (ko) 1989-12-29 1989-12-29 전원 및 접지 금속 배선의 설계방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019890020114A KR920006187B1 (ko) 1989-12-29 1989-12-29 전원 및 접지 금속 배선의 설계방법

Publications (2)

Publication Number Publication Date
KR910013528A true KR910013528A (ko) 1991-08-08
KR920006187B1 KR920006187B1 (ko) 1992-08-01

Family

ID=19294153

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019890020114A Expired KR920006187B1 (ko) 1989-12-29 1989-12-29 전원 및 접지 금속 배선의 설계방법

Country Status (1)

Country Link
KR (1) KR920006187B1 (ko)

Also Published As

Publication number Publication date
KR920006187B1 (ko) 1992-08-01

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