KR910013528A - 전원 및 접지금속 배선의 설계방법 - Google Patents
전원 및 접지금속 배선의 설계방법 Download PDFInfo
- Publication number
- KR910013528A KR910013528A KR1019890020114A KR890020114A KR910013528A KR 910013528 A KR910013528 A KR 910013528A KR 1019890020114 A KR1019890020114 A KR 1019890020114A KR 890020114 A KR890020114 A KR 890020114A KR 910013528 A KR910013528 A KR 910013528A
- Authority
- KR
- South Korea
- Prior art keywords
- metal wiring
- power
- design method
- ground metal
- power supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W20/00—Interconnections in chips, wafers or substrates
- H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
- H10W20/41—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their conductive parts
- H10W20/427—Power or ground buses
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Semiconductor Integrated Circuits (AREA)
- Design And Manufacture Of Integrated Circuits (AREA)
Abstract
Description
Claims (1)
- 반도체 회로에 있어서, 전원전압 또는 접지선으로 사용되는 금속배선 상에 얇은 틈을 만들어 줌을 특징으로 하는 전원 접지금속 배선의 설계방법.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019890020114A KR920006187B1 (ko) | 1989-12-29 | 1989-12-29 | 전원 및 접지 금속 배선의 설계방법 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019890020114A KR920006187B1 (ko) | 1989-12-29 | 1989-12-29 | 전원 및 접지 금속 배선의 설계방법 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR910013528A true KR910013528A (ko) | 1991-08-08 |
| KR920006187B1 KR920006187B1 (ko) | 1992-08-01 |
Family
ID=19294153
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019890020114A Expired KR920006187B1 (ko) | 1989-12-29 | 1989-12-29 | 전원 및 접지 금속 배선의 설계방법 |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR920006187B1 (ko) |
-
1989
- 1989-12-29 KR KR1019890020114A patent/KR920006187B1/ko not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| KR920006187B1 (ko) | 1992-08-01 |
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