NO940472D0 - Kapasitiv foeler for absolutt trykkmaaling, og fremgangsmaate for fremstilling av flere saadanne foelere - Google Patents

Kapasitiv foeler for absolutt trykkmaaling, og fremgangsmaate for fremstilling av flere saadanne foelere

Info

Publication number
NO940472D0
NO940472D0 NO940472A NO940472A NO940472D0 NO 940472 D0 NO940472 D0 NO 940472D0 NO 940472 A NO940472 A NO 940472A NO 940472 A NO940472 A NO 940472A NO 940472 D0 NO940472 D0 NO 940472D0
Authority
NO
Norway
Prior art keywords
sensors
procedure
several
production
pressure measurement
Prior art date
Application number
NO940472A
Other languages
English (en)
Other versions
NO940472L (no
NO311110B1 (no
Inventor
Philippe Renaud
Original Assignee
Suisse Electronique Microtech
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Suisse Electronique Microtech filed Critical Suisse Electronique Microtech
Publication of NO940472D0 publication Critical patent/NO940472D0/no
Publication of NO940472L publication Critical patent/NO940472L/no
Publication of NO311110B1 publication Critical patent/NO311110B1/no

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
NO19940472A 1993-02-12 1994-02-11 Fremgangsmåte for fremstilling av et antall kapasitive fölere for absolutt trykkmåling NO311110B1 (no)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9301700A FR2701564B1 (fr) 1993-02-12 1993-02-12 Capteur de mesure de pression absolue de type capacitif et procédé de fabrication d'une pluralité de tels capteurs.

Publications (3)

Publication Number Publication Date
NO940472D0 true NO940472D0 (no) 1994-02-11
NO940472L NO940472L (no) 1994-08-15
NO311110B1 NO311110B1 (no) 2001-10-08

Family

ID=9444083

Family Applications (1)

Application Number Title Priority Date Filing Date
NO19940472A NO311110B1 (no) 1993-02-12 1994-02-11 Fremgangsmåte for fremstilling av et antall kapasitive fölere for absolutt trykkmåling

Country Status (8)

Country Link
US (1) US5488869A (no)
EP (1) EP0610806B1 (no)
JP (1) JPH06249733A (no)
DE (1) DE69418740T2 (no)
DK (1) DK0610806T3 (no)
FI (1) FI111993B (no)
FR (1) FR2701564B1 (no)
NO (1) NO311110B1 (no)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5581226A (en) * 1994-11-02 1996-12-03 Motorola, Inc. High pressure sensor structure and method
WO1997021986A1 (de) * 1995-12-08 1997-06-19 Micronas Semiconductor S.A. Mikrosensoren mit siliziummembranen und verfahren zur herstellung derselben
DE19653427A1 (de) * 1996-12-20 1998-07-02 Siemens Ag Kraftsensor
US5916179A (en) * 1997-04-18 1999-06-29 Sharrock; Nigel System and method for reducing iatrogenic damage to nerves
DE19847563A1 (de) * 1998-04-17 1999-10-28 Micronas Intermetall Gmbh Kapazitiver Sensor
AU5215099A (en) 1998-07-07 2000-01-24 Goodyear Tire And Rubber Company, The Method of fabricating silicon capacitive sensor
ATE227423T1 (de) * 1998-12-15 2002-11-15 Fraunhofer Ges Forschung Verfahren zum erzeugen einer mikromechanischen struktur für ein mikro-elektromechanisches element
US7273763B1 (en) 1998-12-15 2007-09-25 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Method of producing a micro-electromechanical element
US6431003B1 (en) 2000-03-22 2002-08-13 Rosemount Aerospace Inc. Capacitive differential pressure sensor with coupled diaphragms
ATE431548T1 (de) 2000-07-26 2009-05-15 Endress & Hauser Gmbh & Co Kg Kapazitiver drucksensor
DE10036433A1 (de) * 2000-07-26 2002-02-07 Endress Hauser Gmbh Co Kapazitiver Drucksensor
US8109149B2 (en) 2004-11-17 2012-02-07 Lawrence Livermore National Security, Llc Contact stress sensor
JP4965827B2 (ja) * 2005-07-13 2012-07-04 アルプス電気株式会社 静電容量型圧力センサ素子及びその製造方法
US8397578B2 (en) 2010-06-03 2013-03-19 Medtronic, Inc. Capacitive pressure sensor assembly
US9737657B2 (en) 2010-06-03 2017-08-22 Medtronic, Inc. Implantable medical pump with pressure sensor
US9837935B2 (en) * 2013-10-29 2017-12-05 Honeywell International Inc. All-silicon electrode capacitive transducer on a glass substrate
DE102020215985A1 (de) * 2020-12-16 2022-06-23 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanisches Bauteil für eine kapazitive Drucksensorvorrichtung, kapazitive Drucksensorvorrichtung und ein Herstellungsverfahren für eine kapazitive Drucksensorvorrichtung

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4405970A (en) * 1981-10-13 1983-09-20 United Technologies Corporation Silicon-glass-silicon capacitive pressure transducer
US4530029A (en) * 1984-03-12 1985-07-16 United Technologies Corporation Capacitive pressure sensor with low parasitic capacitance
US4586109A (en) * 1985-04-01 1986-04-29 Bourns Instruments, Inc. Batch-process silicon capacitive pressure sensor
US4872945A (en) * 1986-06-25 1989-10-10 Motorola Inc. Post seal etching of transducer diaphragm
JPH0750789B2 (ja) * 1986-07-18 1995-05-31 日産自動車株式会社 半導体圧力変換装置の製造方法
US5113868A (en) * 1987-06-01 1992-05-19 The Regents Of The University Of Michigan Ultraminiature pressure sensor with addressable read-out circuit
US5207103A (en) * 1987-06-01 1993-05-04 Wise Kensall D Ultraminiature single-crystal sensor with movable member
US4815472A (en) * 1987-06-01 1989-03-28 The Regents Of The University Of Michigan Multipoint pressure-sensing catheter system
GB8718639D0 (en) * 1987-08-06 1987-09-09 Spectrol Reliance Ltd Capacitive pressure sensors
GB8718637D0 (en) * 1987-08-06 1987-09-09 Spectrol Reliance Ltd Sealing electrical feedthrough
JPH03170826A (ja) * 1989-11-29 1991-07-24 Toshiba Corp 容量型圧力センサ
DE9102748U1 (de) * 1991-01-14 1991-07-04 Plöchinger, Heinz, Dipl.-Ing., 82319 Starnberg Drucksensor für niedere Drücke
DE9105851U1 (de) * 1991-01-14 1991-07-04 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München Drucksensor

Also Published As

Publication number Publication date
NO940472L (no) 1994-08-15
DK0610806T3 (da) 1999-12-06
DE69418740T2 (de) 1999-12-23
JPH06249733A (ja) 1994-09-09
FI940589L (fi) 1994-08-13
FR2701564B1 (fr) 1995-05-19
FR2701564A1 (fr) 1994-08-19
US5488869A (en) 1996-02-06
NO311110B1 (no) 2001-10-08
EP0610806B1 (fr) 1999-06-02
DE69418740D1 (de) 1999-07-08
EP0610806A1 (fr) 1994-08-17
FI111993B (fi) 2003-10-15
FI940589A0 (fi) 1994-02-09

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Legal Events

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