PL402753A1 - Hydrothermal method for producing ZnO nanopillars - Google Patents
Hydrothermal method for producing ZnO nanopillarsInfo
- Publication number
- PL402753A1 PL402753A1 PL402753A PL40275313A PL402753A1 PL 402753 A1 PL402753 A1 PL 402753A1 PL 402753 A PL402753 A PL 402753A PL 40275313 A PL40275313 A PL 40275313A PL 402753 A1 PL402753 A1 PL 402753A1
- Authority
- PL
- Poland
- Prior art keywords
- layer
- nanopillars
- hydrothermal method
- substrate
- zno
- Prior art date
Links
- 239000002061 nanopillar Substances 0.000 title abstract 3
- 238000001027 hydrothermal synthesis Methods 0.000 title abstract 2
- 239000000758 substrate Substances 0.000 abstract 3
- 238000000231 atomic layer deposition Methods 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- 239000002243 precursor Substances 0.000 abstract 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 abstract 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical group [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 239000000203 mixture Substances 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- 239000011541 reaction mixture Substances 0.000 abstract 1
- 239000011701 zinc Substances 0.000 abstract 1
- 229910052725 zinc Inorganic materials 0.000 abstract 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
Abstract
Przedmiotem wynalazku jest hydrotermalny sposób wytwarzania nanosłupków ZnO na podłożu, zawierającym warstwę zarodkującą wzrost. W sposobie tym, warstwą zarodkującą wzrost jest warstwa ZnO, którą osadza się na podłożu w co najmniej jednym cyklu metodą osadzania warstw atomowych (ALD). Następnie podłoże z taką warstwą umieszcza w mieszaninie reakcyjnej o pH od 6,5 do 12, zawierającej co najmniej jeden prekursor tlenu, i co najmniej jeden prekursor cynku, temperaturę mieszaniny podnosi się powyżej 25°C, i przez co najmniej 1 sekundę prowadzi się wzrost nanosłupków ZnO.The subject of the invention is a hydrothermal method of producing ZnO nanopillars on a substrate containing a growth nucleating layer. In this method, the growth nucleating layer is a ZnO layer, which is deposited on the substrate in at least one cycle by the atomic layer deposition (ALD) method. Then, the substrate with such a layer is placed in a reaction mixture at a pH of 6.5 to 12, containing at least one oxygen precursor, and at least one zinc precursor, the temperature of the mixture is raised above 25°C, and the ZnO nanopillars are grown for at least 1 second.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PL402753A PL226486B1 (en) | 2013-02-13 | 2013-02-13 | Hydrothermal method for producing ZnO nanopillars |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PL402753A PL226486B1 (en) | 2013-02-13 | 2013-02-13 | Hydrothermal method for producing ZnO nanopillars |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| PL402753A1 true PL402753A1 (en) | 2014-08-18 |
| PL226486B1 PL226486B1 (en) | 2017-07-31 |
Family
ID=51302479
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PL402753A PL226486B1 (en) | 2013-02-13 | 2013-02-13 | Hydrothermal method for producing ZnO nanopillars |
Country Status (1)
| Country | Link |
|---|---|
| PL (1) | PL226486B1 (en) |
-
2013
- 2013-02-13 PL PL402753A patent/PL226486B1/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| PL226486B1 (en) | 2017-07-31 |
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