TW200719952A - Method and apparatus for mixing fluids - Google Patents
Method and apparatus for mixing fluidsInfo
- Publication number
- TW200719952A TW200719952A TW095120343A TW95120343A TW200719952A TW 200719952 A TW200719952 A TW 200719952A TW 095120343 A TW095120343 A TW 095120343A TW 95120343 A TW95120343 A TW 95120343A TW 200719952 A TW200719952 A TW 200719952A
- Authority
- TW
- Taiwan
- Prior art keywords
- fluids
- mixing
- rapid
- fluid stream
- present
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0021—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by liquid gases or supercritical fluids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F33/00—Other mixers; Mixing plants; Combinations of mixers
- B01F33/40—Mixers using gas or liquid agitation, e.g. with air supply tubes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/30—Injector mixers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/04—Specific aggregation state of one or more of the phases to be mixed
- B01F23/043—Mixing fluids or with fluids in a supercritical state, in supercritical conditions or variable density fluids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/40—Mixing liquids with liquids; Emulsifying
- B01F23/49—Mixing systems, i.e. flow charts or diagrams
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/30—Injector mixers
- B01F25/31—Injector mixers in conduits or tubes through which the main component flows
- B01F25/313—Injector mixers in conduits or tubes through which the main component flows wherein additional components are introduced in the centre of the conduit
- B01F25/3131—Injector mixers in conduits or tubes through which the main component flows wherein additional components are introduced in the centre of the conduit with additional mixing means other than injector mixers, e.g. screens, baffles or rotating elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/40—Static mixers
- B01F25/42—Static mixers in which the mixing is affected by moving the components jointly in changing directions, e.g. in tubes provided with baffles or obstructions
- B01F25/43—Mixing tubes, e.g. wherein the material is moved in a radial or partly reversed direction
- B01F25/433—Mixing tubes wherein the shape of the tube influences the mixing, e.g. mixing tubes with varying cross-section or provided with inwardly extending profiles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/40—Static mixers
- B01F25/42—Static mixers in which the mixing is affected by moving the components jointly in changing directions, e.g. in tubes provided with baffles or obstructions
- B01F25/43—Mixing tubes, e.g. wherein the material is moved in a radial or partly reversed direction
- B01F25/433—Mixing tubes wherein the shape of the tube influences the mixing, e.g. mixing tubes with varying cross-section or provided with inwardly extending profiles
- B01F25/4331—Mixers with bended, curved, coiled, wounded mixing tubes or comprising elements for bending the flow
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/71—Feed mechanisms
- B01F35/712—Feed mechanisms for feeding fluids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/71—Feed mechanisms
- B01F35/717—Feed mechanisms characterised by the means for feeding the components to the mixer
- B01F35/7176—Feed mechanisms characterised by the means for feeding the components to the mixer using pumps
- B01F35/717613—Piston pumps
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F2101/00—Mixing characterised by the nature of the mixed materials or by the application field
- B01F2101/58—Mixing semiconducting materials, e.g. during semiconductor or wafer manufacturing processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F2215/00—Auxiliary or complementary information in relation with mixing
- B01F2215/04—Technical information in relation with mixing
- B01F2215/0409—Relationships between different variables defining features or parameters of the apparatus or process
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F2215/00—Auxiliary or complementary information in relation with mixing
- B01F2215/04—Technical information in relation with mixing
- B01F2215/0413—Numerical information
- B01F2215/0436—Operational information
- B01F2215/045—Numerical flow-rate values
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F2215/00—Auxiliary or complementary information in relation with mixing
- B01F2215/04—Technical information in relation with mixing
- B01F2215/0413—Numerical information
- B01F2215/0436—Operational information
- B01F2215/0459—Numerical values of dimensionless numbers, i.e. Re, Pr, Nu, transfer coefficients
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Dispersion Chemistry (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Emulsifying, Dispersing, Foam-Producing Or Wetting Agents (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/149,712 US20060280027A1 (en) | 2005-06-10 | 2005-06-10 | Method and apparatus for mixing fluids |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200719952A true TW200719952A (en) | 2007-06-01 |
| TWI401116B TWI401116B (zh) | 2013-07-11 |
Family
ID=36992781
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW095120343A TWI401116B (zh) | 2005-06-10 | 2006-06-08 | 用於混合流體、包含使至少一種流體與近臨界或超臨界載體流體混合的裝置和方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US20060280027A1 (zh) |
| EP (1) | EP1888214A1 (zh) |
| JP (1) | JP4968855B2 (zh) |
| KR (1) | KR20080017035A (zh) |
| CN (1) | CN101193694B (zh) |
| TW (1) | TWI401116B (zh) |
| WO (1) | WO2006135761A1 (zh) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8585943B2 (en) * | 2007-12-07 | 2013-11-19 | Xspray Microparticles Ab | Method and arrangement for the production of particles |
| JP5246584B2 (ja) * | 2008-03-17 | 2013-07-24 | 日産自動車株式会社 | 内燃機関に用いる超臨界混合流体の混合性判定方法、混合性判定装置、混合性判定プログラム、及び情報記録媒体 |
| US8567767B2 (en) | 2010-05-03 | 2013-10-29 | Apiqe Inc | Apparatuses, systems and methods for efficient solubilization of carbon dioxide in water using high energy impact |
| US9309103B2 (en) | 2010-05-03 | 2016-04-12 | Cgp Water Systems, Llc | Water dispenser system |
| WO2012178179A2 (en) | 2011-06-23 | 2012-12-27 | Apiqe Inc. | Disposable filter cartridge for water dispenser |
| EP2723481B1 (en) * | 2011-06-23 | 2019-05-01 | Apiqe Inc. | Flow compensator |
| US9458707B2 (en) * | 2012-12-03 | 2016-10-04 | Dow Global Technologies Llc | Injection system for enhanced oil recovery |
| CN103867169B (zh) * | 2014-04-02 | 2015-03-18 | 中国石油大学(华东) | 气溶性表面活性剂用于二氧化碳驱油流度控制中的方法 |
| CN105484071A (zh) * | 2015-12-28 | 2016-04-13 | 中国纺织科学研究院江南分院 | 一种反胶束体系及其在酸性染料染色中的应用 |
| KR102342324B1 (ko) * | 2020-12-11 | 2021-12-23 | 애경케미칼주식회사 | 불소계 계면활성제 조성물 |
| JP7650155B2 (ja) * | 2021-01-28 | 2025-03-24 | 株式会社Screenホールディングス | 置換終了時の判定方法、基板処理方法および基板処理装置 |
| CN113458982B (zh) * | 2021-06-23 | 2022-03-29 | 广州大学 | 一种用于强化研磨加工的多相物料混合装置 |
| CN115309215B (zh) * | 2022-08-05 | 2023-03-07 | 福建省龙氟新材料有限公司 | 氟化铵制备用的自动配料控制系统及其控制方法 |
Family Cites Families (54)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1853045A (en) * | 1931-01-09 | 1932-04-12 | Air Conditioning & Eng | Fluid mixing means |
| US1995791A (en) * | 1932-05-10 | 1935-03-26 | Bonnot Company | Products of plastic materials |
| US2115769A (en) * | 1936-08-22 | 1938-05-03 | Henry H Harris | Radiant heating tube |
| US2933293A (en) * | 1956-09-12 | 1960-04-19 | Technicon Instr | Method of intermixing a plurality of liquids of different specific gravities |
| GB1160401A (en) * | 1967-02-15 | 1969-08-06 | British Motor Corp Ltd | Mixing Liquids. |
| ES183753Y (es) * | 1969-01-15 | 1974-08-16 | Un elemento de reactor para la conservacion de hidrocarbu- ros. | |
| GB1343412A (en) * | 1970-06-30 | 1974-01-10 | Atomic Energy Authority Uk | Heat transfer tubes |
| US3632090A (en) * | 1970-09-14 | 1972-01-04 | Moday Inc | Mixing device |
| US3827888A (en) * | 1972-03-06 | 1974-08-06 | Eastman Kodak Co | Apparatus and process for combining chemically compatible solutions |
| US3951813A (en) * | 1973-07-02 | 1976-04-20 | Palma James R | Fluid separator or mixer |
| DE2719956C2 (de) * | 1977-05-04 | 1982-12-02 | Bayer Ag, 5090 Leverkusen | Vorrichtung zum Mischen, Reagieren und Ausdampfen |
| DE2746188A1 (de) * | 1977-10-14 | 1979-04-19 | Bayer Ag | Verfahren und vorrichtung zum mischen und auftragen reaktionsfaehiger stoffe |
| US4222671A (en) * | 1978-09-05 | 1980-09-16 | Gilmore Oscar Patrick | Static mixer |
| US4422773A (en) * | 1980-08-04 | 1983-12-27 | Technicon Instruments Corporation | Apparatus and method for the non-invasive mixing of a flowing fluid stream |
| US4410281A (en) * | 1981-03-02 | 1983-10-18 | Ralph B. Carter Company | Mixing method and apparatus utilizing pipe elbows |
| US4466741A (en) * | 1982-01-16 | 1984-08-21 | Hisao Kojima | Mixing element and motionless mixer |
| US4645645A (en) * | 1985-04-04 | 1987-02-24 | Renal Systems, Inc. | Oxygenator having an improved heat exchanger |
| US4786015A (en) * | 1986-12-31 | 1988-11-22 | Sundstrand Corporation | Structural cooling unit |
| US4957242A (en) * | 1988-04-12 | 1990-09-18 | The United States Of America As Represented By The Secretary Of The Navy | Fluid mixing device having a conical inlet and a noncircular outlet |
| US5004374A (en) * | 1990-02-28 | 1991-04-02 | Bettie Grey | Method of laying out a pathway for piping |
| US5607235A (en) * | 1990-07-13 | 1997-03-04 | Campbell; Craig C. | High speed combined mixing and transport tool |
| NO911337D0 (no) * | 1991-04-05 | 1991-04-05 | Hans Hiorth | Reguleringsanordning for kontinuerlig statisk tynnskiktsblander. |
| US5248421A (en) * | 1992-10-09 | 1993-09-28 | The United States Of America As Respresented By The Administrator Of The National Aeronautics And Space Administration | Spiral fluid separator |
| US5326537A (en) * | 1993-01-29 | 1994-07-05 | Cleary James M | Counterflow catalytic device |
| US5376265A (en) * | 1994-02-01 | 1994-12-27 | Szabo; Louis | Ozone/water contactor |
| US5522938A (en) * | 1994-08-08 | 1996-06-04 | Texas Instruments Incorporated | Particle removal in supercritical liquids using single frequency acoustic waves |
| US5921679A (en) * | 1995-09-25 | 1999-07-13 | Rutgers, The State University Of New Jersey | Method of chaotic mixing and improved stirred tank reactors |
| AUPO566097A0 (en) * | 1997-03-17 | 1997-04-10 | Browne, John Phillip | Fluid mixer and water oxygenator incorporating same |
| US7033545B2 (en) * | 1997-07-15 | 2006-04-25 | Chevon Phillips Chemical Company, Lp | Slurry polymerization reactor having large length/diameter ratio |
| US6331072B1 (en) * | 1997-07-24 | 2001-12-18 | Axiva Gmbh | Continuous, chaotic convection mixer, heat exchanger and reactor |
| US6062722A (en) * | 1997-10-21 | 2000-05-16 | Micron Communications, Inc. | Fluid mixing and withdrawing methods |
| GB9810559D0 (en) * | 1998-05-15 | 1998-07-15 | Bradford Particle Design Ltd | Method and apparatus for particle formation |
| US6119769A (en) * | 1998-08-05 | 2000-09-19 | Visteon Global Technologies, Inc. | Heat transfer device |
| US6203187B1 (en) * | 1998-08-06 | 2001-03-20 | Institute Of Gas Technology | Method and apparatus for controlled mixing of fluids |
| US7064070B2 (en) * | 1998-09-28 | 2006-06-20 | Tokyo Electron Limited | Removal of CMP and post-CMP residue from semiconductors using supercritical carbon dioxide process |
| US6148645A (en) * | 1999-05-14 | 2000-11-21 | Micell Technologies, Inc. | Detergent injection systems for carbon dioxide cleaning apparatus |
| US7044143B2 (en) * | 1999-05-14 | 2006-05-16 | Micell Technologies, Inc. | Detergent injection systems and methods for carbon dioxide microelectronic substrate processing systems |
| US7080651B2 (en) * | 2001-05-17 | 2006-07-25 | Dainippon Screen Mfg. Co., Ltd. | High pressure processing apparatus and method |
| EP1389496A1 (en) * | 2001-05-22 | 2004-02-18 | Mitsubishi Chemical Corporation | Method for cleaning surface of substrate |
| JP4358486B2 (ja) * | 2001-07-25 | 2009-11-04 | 大日本スクリーン製造株式会社 | 高圧処理装置および高圧処理方法 |
| TWI233631B (en) * | 2001-10-08 | 2005-06-01 | Advanced Tech Materials | Systems and processes for real-time component monitoring and replenishment in multicomponent fluids |
| CN100383074C (zh) * | 2001-10-17 | 2008-04-23 | 普莱克斯技术有限公司 | 超临界二氧化碳的回收 |
| DE10160709B4 (de) * | 2001-12-11 | 2015-12-17 | Tpi - Tecnimont Planung Und Industrieanlagenbau Gmbh | Vorrichtung zum Mischen einer gasförmigen und einer flüssigen Komponente im überkritischen Bereich |
| AT413017B (de) * | 2002-03-21 | 2005-10-15 | Andritz Ag Maschf | Verfahren und vorrichtung zum einmischen von fluiden in fliessfähige medien |
| US6764552B1 (en) * | 2002-04-18 | 2004-07-20 | Novellus Systems, Inc. | Supercritical solutions for cleaning photoresist and post-etch residue from low-k materials |
| US7264394B1 (en) * | 2002-06-10 | 2007-09-04 | Inflowsion L.L.C. | Static device and method of making |
| US7041218B1 (en) * | 2002-06-10 | 2006-05-09 | Inflowsion, L.L.C. | Static device and method of making |
| US7267727B2 (en) * | 2002-09-24 | 2007-09-11 | Air Products And Chemicals, Inc. | Processing of semiconductor components with dense processing fluids and ultrasonic energy |
| US6953041B2 (en) * | 2002-10-09 | 2005-10-11 | Micell Technologies, Inc. | Compositions of transition metal species in dense phase carbon dioxide and methods of use thereof |
| US7045060B1 (en) * | 2002-12-05 | 2006-05-16 | Inflowsion, L.L.C. | Apparatus and method for treating a liquid |
| JP2004195307A (ja) * | 2002-12-17 | 2004-07-15 | Itec Co Ltd | 高圧流体を用いて微粒子や微細カプセルを製造する方法及びその装置 |
| JP2004342845A (ja) * | 2003-05-15 | 2004-12-02 | Kobe Steel Ltd | 微細構造体の洗浄装置 |
| US20050022850A1 (en) * | 2003-07-29 | 2005-02-03 | Supercritical Systems, Inc. | Regulation of flow of processing chemistry only into a processing chamber |
| US20050039775A1 (en) * | 2003-08-19 | 2005-02-24 | Whitlock Walter H. | Process and system for cleaning surfaces of semiconductor wafers |
-
2005
- 2005-06-10 US US11/149,712 patent/US20060280027A1/en not_active Abandoned
-
2006
- 2006-06-05 KR KR1020077029285A patent/KR20080017035A/ko not_active Abandoned
- 2006-06-05 CN CN2006800204835A patent/CN101193694B/zh not_active Expired - Fee Related
- 2006-06-05 EP EP06772712A patent/EP1888214A1/en not_active Withdrawn
- 2006-06-05 WO PCT/US2006/022507 patent/WO2006135761A1/en not_active Ceased
- 2006-06-05 JP JP2008515976A patent/JP4968855B2/ja not_active Expired - Fee Related
- 2006-06-08 TW TW095120343A patent/TWI401116B/zh not_active IP Right Cessation
-
2008
- 2008-10-01 US US12/243,185 patent/US20090027996A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| EP1888214A1 (en) | 2008-02-20 |
| CN101193694B (zh) | 2012-11-07 |
| JP2008545534A (ja) | 2008-12-18 |
| US20090027996A1 (en) | 2009-01-29 |
| US20060280027A1 (en) | 2006-12-14 |
| KR20080017035A (ko) | 2008-02-25 |
| JP4968855B2 (ja) | 2012-07-04 |
| WO2006135761A1 (en) | 2006-12-21 |
| TWI401116B (zh) | 2013-07-11 |
| CN101193694A (zh) | 2008-06-04 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |