TW200738325A - Method and apparatus for asynchronous blending and supply of chemical solutions - Google Patents

Method and apparatus for asynchronous blending and supply of chemical solutions

Info

Publication number
TW200738325A
TW200738325A TW095139985A TW95139985A TW200738325A TW 200738325 A TW200738325 A TW 200738325A TW 095139985 A TW095139985 A TW 095139985A TW 95139985 A TW95139985 A TW 95139985A TW 200738325 A TW200738325 A TW 200738325A
Authority
TW
Taiwan
Prior art keywords
blending
supply
solutions
asynchronous
chemical solutions
Prior art date
Application number
TW095139985A
Other languages
English (en)
Other versions
TWI372655B (en
Inventor
Karl J Urquhart
Original Assignee
Air Liquide
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide filed Critical Air Liquide
Publication of TW200738325A publication Critical patent/TW200738325A/zh
Application granted granted Critical
Publication of TWI372655B publication Critical patent/TWI372655B/zh

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00—Control of flow ratio
    • G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
    • G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/20—Measuring; Control or regulation
    • B01F35/21—Measuring
    • B01F35/211—Measuring of the operational parameters
    • B01F35/2117—Weight
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00—Control of flow ratio
    • G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
    • G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
    • G05D11/135—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by sensing at least one property of the mixture
    • G05D11/138—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by sensing at least one property of the mixture by sensing the concentration of the mixture, e.g. measuring pH value
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/80—Forming a predetermined ratio of the substances to be mixed
    • B01F35/82—Forming a predetermined ratio of the substances to be mixed by adding a material to be mixed to a mixture in response to a detected feature, e.g. density, radioactivity, consumed power or colour
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F2101/00—Mixing characterised by the nature of the mixed materials or by the application field
    • B01F2101/22—Mixing of ingredients for pharmaceutical or medical compositions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F2101/00—Mixing characterised by the nature of the mixed materials or by the application field
    • B01F2101/58—Mixing semiconducting materials, e.g. during semiconductor or wafer manufacturing processes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0324—With control of flow by a condition or characteristic of a fluid
    • Y10T137/0329—Mixing of plural fluids of diverse characteristics or conditions
    • Y10T137/0335—Controlled by consistency of mixture
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0324—With control of flow by a condition or characteristic of a fluid
    • Y10T137/0329—Mixing of plural fluids of diverse characteristics or conditions
    • Y10T137/034—Controlled by conductivity of mixture
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2496—Self-proportioning or correlating systems
    • Y10T137/2499—Mixture condition maintaining or sensing
    • Y10T137/2506—By viscosity or consistency
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2496—Self-proportioning or correlating systems
    • Y10T137/2499—Mixture condition maintaining or sensing
    • Y10T137/2509—By optical or chemical property

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Accessories For Mixers (AREA)
TW095139985A 2005-04-15 2006-10-30 Method and apparatus for asynchronous blending and supply of chemical solutions TWI372655B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/107,494 US7344297B2 (en) 1998-04-16 2005-04-15 Method and apparatus for asynchronous blending and supply of chemical solutions
PCT/IB2006/000852 WO2006109144A1 (en) 2005-04-15 2006-04-12 Method and apparatus for asynchronous blending and supply of chemical solutions

Publications (2)

Publication Number Publication Date
TW200738325A true TW200738325A (en) 2007-10-16
TWI372655B TWI372655B (en) 2012-09-21

Family

ID=36754617

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095139985A TWI372655B (en) 2005-04-15 2006-10-30 Method and apparatus for asynchronous blending and supply of chemical solutions

Country Status (7)

Country Link
US (1) US7344297B2 (zh)
EP (1) EP1877883A1 (zh)
JP (1) JP4913797B2 (zh)
KR (1) KR101234950B1 (zh)
CN (1) CN100578414C (zh)
TW (1) TWI372655B (zh)
WO (1) WO2006109144A1 (zh)

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US20070070803A1 (en) * 1998-04-16 2007-03-29 Urquhart Karl J Point-of-use process control blender systems and corresponding methods
US20070119816A1 (en) * 1998-04-16 2007-05-31 Urquhart Karl J Systems and methods for reclaiming process fluids in a processing environment
US7980753B2 (en) 1998-04-16 2011-07-19 Air Liquide Electronics U.S. Lp Systems and methods for managing fluids in a processing environment using a liquid ring pump and reclamation system
FI114033B (fi) * 2002-10-17 2004-07-30 Metso Paper Inc Menetelmä ja järjestelmä päällysteen valmistuksessa
US20060080041A1 (en) * 2004-07-08 2006-04-13 Anderson Gary R Chemical mixing apparatus, system and method
US20070109912A1 (en) * 2005-04-15 2007-05-17 Urquhart Karl J Liquid ring pumping and reclamation systems in a processing environment
US7536843B2 (en) * 2006-01-23 2009-05-26 Astrazeneca Ab Method and system for dosing a pharmaceutical sample in a packaging machine
JP4370529B2 (ja) * 2006-07-24 2009-11-25 エルピーダメモリ株式会社 成膜装置、原料の導入方法、及び成膜方法
US8235580B2 (en) * 2006-10-12 2012-08-07 Air Liquide Electronics U.S. Lp Reclaim function for semiconductor processing systems
US9327212B2 (en) * 2009-09-25 2016-05-03 Ge Healthcare Bio-Sciences Ab Method and system for preparation of liquid mixtures
US9389111B2 (en) 2010-03-11 2016-07-12 Measurement Technology Group, Inc. Dynamic-adaptive vapor reduction system and method
JP6014588B2 (ja) 2010-06-23 2016-10-25 ジーイー・ヘルスケア・バイオサイエンス・アクチボラグ 液体混合物の製造方法
CN102407083A (zh) * 2010-09-25 2012-04-11 台湾关东化学股份有限公司新竹分公司 化学品供应系统及方法
US8851100B2 (en) * 2011-01-28 2014-10-07 Automation Tech, Inc. Sampling and rejection device
EP3409347B1 (en) 2012-11-16 2020-06-17 Entegris, Inc. Controlling mixing concentration
US9429247B2 (en) 2013-03-13 2016-08-30 Applied Materials, Inc. Acoustically-monitored semiconductor substrate processing systems and methods
EP2981348B1 (en) * 2013-04-02 2018-06-27 Fluid Solution Technology Inc. Mobile blending apparatus
KR101470311B1 (ko) * 2013-07-24 2014-12-08 코아텍주식회사 공업용 암모니아 정제장치
JP6657306B2 (ja) * 2013-11-13 2020-03-04 東京エレクトロン株式会社 基板液処理装置及び基板液処理方法
JP6352143B2 (ja) 2013-11-13 2018-07-04 東京エレクトロン株式会社 基板液処理装置及び基板液処理方法
JP7306608B2 (ja) 2016-03-11 2023-07-11 フジフイルム エレクトロニック マテリアルズ ユー．エス．エー．， インコーポレイテッド 高度な流体処理方法およびシステム
US20160296902A1 (en) 2016-06-17 2016-10-13 Air Liquide Electronics U.S. Lp Deterministic feedback blender
WO2018009222A1 (en) 2016-07-08 2018-01-11 Hewlett-Packard Development Company, L.P. Microfluidic device for fluid mixture
CN109031955A (zh) * 2018-08-22 2018-12-18 兰州大学 一种抗扰动且具饱和特性的搅拌罐排空及输出溶液浓度保持的方法
US10976757B2 (en) 2019-04-18 2021-04-13 Flowserve Management Company Control systems for valve actuators, valve actuators and related systems and methods
WO2021041651A1 (en) 2019-08-29 2021-03-04 Covestro Llc Method for adjusting a blend composition
FR3102372B1 (fr) * 2019-10-24 2022-09-09 Exel Ind Procédé de dosage d’un produit d’injection dans un produit de base et installation associée
EP4603226A3 (en) 2019-11-27 2025-10-22 Diversified Fluid Solutions, LLC On-demand in-line-blending and supply of chemicals
US11586230B2 (en) * 2019-12-27 2023-02-21 Taiwan Semiconductor Manufacturing Co., Ltd. Systems and methods for automatic concentration control
CN113053781B (zh) * 2019-12-27 2025-01-07 台湾积体电路制造股份有限公司 半导体制程的系统和方法
CN115318193B (zh) * 2022-08-11 2023-10-27 河南华索科技有限公司 一种铝电解槽用氟化铝与氧化铝混配装置及其实现方法
US12186720B2 (en) 2023-04-05 2025-01-07 Texas Integrity Acid Solutions, Llc Systems and methods for acid mixing
CN121219656A (zh) * 2023-05-22 2025-12-26 高准有限公司 控制通过混合两种流体源而获得的三组分混合物中的组分的浓度
EP4734906A1 (en) 2023-06-28 2026-05-06 Volumina Medical SA Method for successive, pressure-driven dispensation of single doses of a multiphasic mixture with controlled concentration and dose from a larger reservoir to smaller recipients and apparatus for performing the method

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JP3141919B2 (ja) * 1994-10-13 2001-03-07 三菱瓦斯化学株式会社 薬液調合装置および方法
US6224778B1 (en) * 1998-03-18 2001-05-01 Charles T. Peltzer Method for manufacturing a system for mixing fluids
KR20010072569A (ko) * 1998-04-09 2001-07-31 추후제출 자동화 화학공정 제어 시스템
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JP3753624B2 (ja) * 2001-04-03 2006-03-08 株式会社ナカキン 糖度調整用混合装置
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Also Published As

Publication number Publication date
US20050286340A1 (en) 2005-12-29
KR101234950B1 (ko) 2013-02-20
CN100578414C (zh) 2010-01-06
KR20080005956A (ko) 2008-01-15
WO2006109144A1 (en) 2006-10-19
EP1877883A1 (en) 2008-01-16
JP2008535660A (ja) 2008-09-04
JP4913797B2 (ja) 2012-04-11
WO2006109144B1 (en) 2007-03-15
TWI372655B (en) 2012-09-21
CN101198918A (zh) 2008-06-11
US7344297B2 (en) 2008-03-18

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees