TW200744142A - Semiconductor device including electrically conductive bump and method of manufacturing the same - Google Patents

Semiconductor device including electrically conductive bump and method of manufacturing the same

Info

Publication number
TW200744142A
TW200744142A TW096108007A TW96108007A TW200744142A TW 200744142 A TW200744142 A TW 200744142A TW 096108007 A TW096108007 A TW 096108007A TW 96108007 A TW96108007 A TW 96108007A TW 200744142 A TW200744142 A TW 200744142A
Authority
TW
Taiwan
Prior art keywords
manufacturing
electrically conductive
semiconductor device
conductive bump
same
Prior art date
Application number
TW096108007A
Other languages
English (en)
Other versions
TWI356460B (en
Inventor
Clinton Chao
Pei-Haw Tsao
Szu-Wei Lu
Tjandra Winata Karta
Original Assignee
Taiwan Semiconductor Mfg Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg Co Ltd filed Critical Taiwan Semiconductor Mfg Co Ltd
Publication of TW200744142A publication Critical patent/TW200744142A/zh
Application granted granted Critical
Publication of TWI356460B publication Critical patent/TWI356460B/zh

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/01—Manufacture or treatment
    • H10W72/012—Manufacture or treatment of bump connectors, dummy bumps or thermal bumps
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • H10W72/251—Materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • H10W72/251—Materials
    • H10W72/252—Materials comprising solid metals or solid metalloids, e.g. PbSn, Ag or Cu
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/90—Bond pads, in general
    • H10W72/921—Structures or relative sizes of bond pads
    • H10W72/923—Bond pads having multiple stacked layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/90—Bond pads, in general
    • H10W72/931—Shapes of bond pads
    • H10W72/934—Cross-sectional shape, i.e. in side view
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/90—Bond pads, in general
    • H10W72/941—Dispositions of bond pads
    • H10W72/9415—Dispositions of bond pads relative to the surface, e.g. recessed, protruding
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/90—Bond pads, in general
    • H10W72/951—Materials of bond pads
    • H10W72/952—Materials of bond pads comprising metals or metalloids, e.g. PbSn, Ag or Cu

Landscapes

  • Wire Bonding (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
TW096108007A 2006-05-22 2007-03-08 Semiconductor device including electrically conduc TWI356460B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/437,726 US20070267745A1 (en) 2006-05-22 2006-05-22 Semiconductor device including electrically conductive bump and method of manufacturing the same

Publications (2)

Publication Number Publication Date
TW200744142A true TW200744142A (en) 2007-12-01
TWI356460B TWI356460B (en) 2012-01-11

Family

ID=38711271

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096108007A TWI356460B (en) 2006-05-22 2007-03-08 Semiconductor device including electrically conduc

Country Status (3)

Country Link
US (2) US20070267745A1 (zh)
CN (1) CN101079406A (zh)
TW (1) TWI356460B (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8841766B2 (en) 2009-07-30 2014-09-23 Taiwan Semiconductor Manufacturing Company, Ltd. Cu pillar bump with non-metal sidewall protection structure
US10128348B2 (en) 2013-05-06 2018-11-13 Himax Technologies Limited Metal bump structure for use in driver IC and method for forming the same

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Publication number Priority date Publication date Assignee Title
KR101309319B1 (ko) * 2006-11-22 2013-09-13 삼성디스플레이 주식회사 액정표시장치 구동회로 및 그의 제조방법과 액정표시장치구동회로가 실장 된 액정표시장치
TW200832542A (en) * 2007-01-24 2008-08-01 Chipmos Technologies Inc Semiconductor structure and method for forming the same
KR20100095268A (ko) * 2009-02-20 2010-08-30 삼성전자주식회사 반도체 패키지 및 그 제조 방법
US8569897B2 (en) * 2009-09-14 2013-10-29 Taiwan Semiconductor Manufacturing Company, Ltd. Protection layer for preventing UBM layer from chemical attack and oxidation
US9620469B2 (en) 2013-11-18 2017-04-11 Taiwan Semiconductor Manufacturing Company, Ltd. Mechanisms for forming post-passivation interconnect structure
US8268675B2 (en) * 2011-02-11 2012-09-18 Nordson Corporation Passivation layer for semiconductor device packaging
US9589862B2 (en) 2013-03-11 2017-03-07 Taiwan Semiconductor Manufacturing Company, Ltd. Interconnect structures and methods of forming same
US9257333B2 (en) 2013-03-11 2016-02-09 Taiwan Semiconductor Manufacturing Company, Ltd. Interconnect structures and methods of forming same
US10015888B2 (en) 2013-02-15 2018-07-03 Taiwan Semiconductor Manufacturing Company, Ltd. Interconnect joint protective layer apparatus and method
US9401308B2 (en) 2013-03-12 2016-07-26 Taiwan Semiconductor Manufacturing Company, Ltd. Packaging devices, methods of manufacture thereof, and packaging methods
US9607921B2 (en) 2012-01-12 2017-03-28 Taiwan Semiconductor Manufacturing Company, Ltd. Package on package interconnect structure
US9263839B2 (en) 2012-12-28 2016-02-16 Taiwan Semiconductor Manufacturing Company, Ltd. System and method for an improved fine pitch joint
US9437564B2 (en) 2013-07-09 2016-09-06 Taiwan Semiconductor Manufacturing Company, Ltd. Interconnect structure and method of fabricating same
US9368398B2 (en) 2012-01-12 2016-06-14 Taiwan Semiconductor Manufacturing Company, Ltd. Interconnect structure and method of fabricating same
US8970034B2 (en) 2012-05-09 2015-03-03 Micron Technology, Inc. Semiconductor assemblies and structures
US9082776B2 (en) * 2012-08-24 2015-07-14 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor package having protective layer with curved surface and method of manufacturing same
US10128175B2 (en) * 2013-01-29 2018-11-13 Taiwan Semiconductor Manufacturing Company Packaging methods and packaged semiconductor devices
US9620580B2 (en) 2013-10-25 2017-04-11 Mediatek Inc. Semiconductor structure
US9184143B2 (en) 2013-12-05 2015-11-10 Taiwan Semiconductor Manufacturing Company Ltd. Semiconductor device with bump adjustment and manufacturing method thereof
CN104157617B (zh) * 2014-07-29 2017-11-17 华为技术有限公司 芯片集成模块、芯片封装结构及芯片集成方法
US9859200B2 (en) * 2014-12-29 2018-01-02 STATS ChipPAC Pte. Ltd. Integrated circuit packaging system with interposer support structure mechanism and method of manufacture thereof
US9892962B2 (en) 2015-11-30 2018-02-13 Taiwan Semiconductor Manufacturing Company, Ltd. Wafer level chip scale package interconnects and methods of manufacture thereof

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0747954A3 (en) * 1995-06-07 1997-05-07 Ibm Solder ball with a low melting point metal cap
US6179200B1 (en) * 1999-02-03 2001-01-30 Industrial Technology Research Institute Method for forming solder bumps of improved height and devices formed
TW498510B (en) * 2001-06-05 2002-08-11 Chipbond Technology Corp Metallized surface wafer level package structure
US6667230B2 (en) * 2001-07-12 2003-12-23 Taiwan Semiconductor Manufacturing Co., Ltd. Passivation and planarization process for flip chip packages
JP2003203940A (ja) * 2001-10-25 2003-07-18 Seiko Epson Corp 半導体チップ及び配線基板並びにこれらの製造方法、半導体ウエハ、半導体装置、回路基板並びに電子機器
TW518700B (en) * 2002-01-07 2003-01-21 Advanced Semiconductor Eng Chip structure with bumps and the manufacturing method thereof
US6782897B2 (en) * 2002-05-23 2004-08-31 Taiwan Semiconductor Manufacturing Co., Ltd. Method of protecting a passivation layer during solder bump formation
US6805279B2 (en) * 2002-06-27 2004-10-19 Taiwan Semiconductor Manufacturing Co., Ltd. Fluxless bumping process using ions
US7105383B2 (en) * 2002-08-29 2006-09-12 Freescale Semiconductor, Inc. Packaged semiconductor with coated leads and method therefore
JP2004281491A (ja) * 2003-03-13 2004-10-07 Toshiba Corp 半導体装置及びその製造方法
US6927498B2 (en) * 2003-11-19 2005-08-09 Taiwan Semiconductor Manufacturing Co., Ltd. Bond pad for flip chip package
TWI242867B (en) * 2004-11-03 2005-11-01 Advanced Semiconductor Eng The fabrication method of the wafer and the structure thereof
US7348210B2 (en) * 2005-04-27 2008-03-25 International Business Machines Corporation Post bump passivation for soft error protection

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8841766B2 (en) 2009-07-30 2014-09-23 Taiwan Semiconductor Manufacturing Company, Ltd. Cu pillar bump with non-metal sidewall protection structure
US9136167B2 (en) 2010-03-24 2015-09-15 Taiwan Semiconductor Manufacturing Company, Ltd. Method of making a pillar structure having a non-metal sidewall protection structure
TWI582930B (zh) * 2010-03-24 2017-05-11 台灣積體電路製造股份有限公司 積體電路裝置及封裝組件
US11257714B2 (en) 2010-03-24 2022-02-22 Taiwan Semiconductor Manufacturing Company, Ltd. Method of making a pillar structure having a non-metal sidewall protection structure and integrated circuit including the same
US10128348B2 (en) 2013-05-06 2018-11-13 Himax Technologies Limited Metal bump structure for use in driver IC and method for forming the same

Also Published As

Publication number Publication date
CN101079406A (zh) 2007-11-28
TWI356460B (en) 2012-01-11
US20090174071A1 (en) 2009-07-09
US20070267745A1 (en) 2007-11-22

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