TWI232199B - Substrate transporting apparatus, substrate processing apparatus using the transporting apparatus and substrate processing method - Google Patents

Abstract

The subject application relates to the optimization of the action of the index robot so that the transporting tact can be shortened. The substrate move-in port PI for moving in the unprocessed substrate and the substrate move-out port PO for moving out the processed substrate are provided in the substrate processing unit. The substrate move-in port PI and the substrate move-out port PO are provided with substrate move-in device 205 and substrate move-out device 206, respectively. Index robot R performs the move-in and move-out of the substrate with respect to the substrate move-in device 205 and the substrate move-out device 206. The substrate move-in device 205, the substrate move-out device 206, and the index robot R are controlled by the index control part 202. The index control part 202 orders the substrate move-in device 205 and the substrate move-out device 206 to function in accordance with the substrate move-in requests and move-out requests provided by the substrate processing control part 201 via communication line, and controls the index robot R independently from said requests.

Description

1232199 V. Description of the invention (2) __ Accept substrate. Then, using the lowering of the pusher pin, the belt is tapered and the transfer is started. The soil plate is transferred to the conveyor. The substrate is transferred from the conveyor to the indexing robot. In other words, there is a feed D-like feed at the transfer location. It is convenient to push the substrate transferred to the transfer position to the upper side of the substrate transfer surface using a conveyor belt. By using the substrate of the push belt, the index robot is used to produce the substrate. The ascending position is in the path of the substrate transferred by the conveyor in Japanese Patent Application Laid-Open No. 10-310240. There is no avoiding that by using such a push pin, the substrate can be pushed: the second push pin. The debit position is three-dimensionally overlapped with the board conveying belt 1 at the two positions, and the upper position ′ can be used to form a rising position before or during the moving; a punching portion (substrate transfer position). For example, if the -9 substrate is in the buffer zone in the standby state, it can be installed on the substrate removal port from the second book ^ This does not hinder the smoothness of the substrate, ^ g ^ Quickly exclude the substrate, so the substrate processing section The controller can smoothly transfer the substrates one by one into the substrate processing structure of this structure, and each has a control unit.哕 M * Index unit and substrate processing unit The index robot is connected to the search control unit to perform data communication, and the unit and the substrate processing unit belong to the actions of pin and carousel. Because the index sheet uses different / different units from the control unit side of the index unit, the index robot uses the substrate processing unit / control, and pushes the pin and the conveyor belt as an example. The control unit controls it. This is common. Therefore, the control unit of the substrate processing unit—the mountain—coordinates the movement of the substrate into the port.

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Fifth invention description (3) Control of the inclined position = mention: ί :; timing of crossing the conveyor belt, ㈣ index unit terminal, then equipped with :: United States *: ϊ ΐ. At the same time, the day when the control board at the substrate processing unit end rises: / the board pushes out the pusher pin 'receives the request from the conveyor belt. These Α: 'The control unit at the end of the lead unit provides the board removal request via the cable board moving request and the board removal request, which is received through the communication circuit indexing machine's control unit' and responds to this, and controls the : The control unit at the end of the i-feed unit estimates the push pin to move the substrate. Enter the timing of 迗 π, and issue a board move-in request early. In the case of crystallization, the robot is moved from the substrate placed at the crystal box station to the substrate; in the state of the plate, move pa η ^ M Jun in the control section of the substrate processing early end, Jing Yan = After the substrate can be moved into the substrate and confirmed, the unprocessed ^% will be given to: the push pin for the substrate into the port. After giving up the substrate again, the cable control unit will control the substrate processing unit to notify the substrate that the same. The control unit of the substrate processing unit estimates the timing of the substrate processing and rising, and issues the request early. S issued When this substrate is requested to be removed, the index robot will move out of the port. Then, in the control section of the substrate processing unit, inquiring = it belongs to the substrate that can be removed and confirm it, then push it from the substrate removal port = ^ to receive a piece The processed substrate. Then, the snap unit of the indexing unit informs the control unit of the substrate processing unit to notify that the substrate has been moved out. This indexing robot will store the received substrate in each of the crystal box stations ^

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[Problems to be Solved by the Invention] Index, the robot's transfer tempo is limited by its transfer ability. Most of the transfer tempo is based on the substrate processing capacity of the substrate processing unit. Most of the transfer tempo is the transfer tempo of the index robot, which essentially determines the processing tempo of the substrate processing device. The main reason for restricting the robot's transfer tempo is that, in addition to the transfer ability, there is still a point of view whether the robot's motion is optimized. In the substrate processing apparatus described above, the substrate transfer request from the substrate processing unit is not generated simultaneously with the substrate transfer request. Therefore, with the issuing sequence of the board loading request and the board moving request, there are cases where the index robot operation is inefficient. For example, the board processing unit responds to this, just after the index loading operation. Conceivable situation. At this time, when the substrate index robot sends a substrate removal request on the substrate, the substrate is taken out of the box and the pin operation is performed. Therefore, the port, and the port from the substrate, so the substrate moving request is issued in the index unit and the substrate robot is moved by the index robot. The substrate is moved to the target. The entry request person instructs the substrate removal request tube to be placed in its crystal box, and the port is moved to the substrate in the substrate crystal box. Therefore, the control unit of the unit sends out the index from the substrate processing single board processing unit to the standby index near the port. The robot will transfer this substrate and then accept the substrate on the cable bow again, because it cannot be optimized in advance because the substrate cannot be removed in advance. And when the substrate is required to be removed, if the material is removed from the crystal immediately afterwards, the processing unit may not be necessary.

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J Qiaoqu "Zhong J uses ten high energy. V. Description of the invention (5) In order to shorten the transfer cycle of the index robot, although it may be possible that the robot will constitute the index robot, this solution 丨 Wang w π is general Because of the significant cost increase at the tomb of Jiang, it is best not to. ..... In view of this, the object of the present invention is to provide a substrate that can take out a substrate from a crystal box in a box station and carry it into the substrate processing unit. The index robot operation is optimized to reduce the substrate transfer and loading of the index robot, and another object of the present invention is to provide a method for optimizing the index robot operation and shortening it. As a result of the transfer cycle, the substrate processing apparatus and the substrate processing method that can improve the productivity of the substrate processing can be achieved. [Means for solving the problem and the effects of the invention] The reason is that the substrate transfer device of the invention described in item 1 of the scope of patent application for achieving the above-mentioned purpose is for transferring a substrate into a port (PI) having a substrate carrying an unprocessed substrate. And the substrate processing unit (TRT) of the substrate carrying-out port (P0) for carrying out the processed substrate, and a substrate transferring device (IND) for carrying in and out of the substrate; characterized in that it includes: Crystal box station (11) of the crystal box; a substrate transfer mechanism (205, 3Α, ρ, 50) for transferring the substrate from the first substrate transfer position into the substrate transfer port; The substrate is taken out from the crystal box of the cassette station, and the substrate is transferred to the substrate carrying-in mechanism at the first substrate transfer position, and the substrate carried out from the substrate carrying-out port is stored in the crystal box station. The index robot (R) of the crystal box in the communication; communicates with the substrate processing control mechanism (200) provided in the substrate processing section, and starts from the above.

1232199 V. Description of the invention (6) The substrate processing control mechanism controls the substrate handling machine corresponding to the requirements, and at the same time, independently of the requirements from the substrate processing control mechanism, controls the substrate transfer control mechanism of the index robot (2 〇 2 ). In addition, the brackets = "ϋ 文 文 子 子" and the number ′ indicate the constituent elements and the like corresponding to the embodiment described later. The following are the same. If the structure is as described above, a substrate transfer mechanism is provided for transferring the second substrate to the port from the first substrate transfer position. This substrate transfer machine ΓίΠ: At the same time, it is controlled by the substrate transfer control mechanism. :: Γ system, because the corresponding comes from a substrate processing field " L: It is necessary to make the substrate transfer mechanism work, mechanism: mrf to the substrate transfer speed. The substrate transfer control index is between the substrate transfer operation of the mechanical mechanism and the “im” mechanism can correctly grasp the control of the substrate transfer mechanism under its control. Is there any guarantee to obtain the first-substrate transfer position, or the substrate substrate, from the substrate processing unit 6? The substrate processing control mechanism is obtained through communication. The substrate transfer control mechanism is in the state of Ruoji, only need to tell Indexer _ :: j 亍 j to the substrate holder transfer mechanism to the substrate holder who did not hold it ^ 日 不 不 日 日 日 日 The substrate is moved out of the box and processed by the control mechanism. And the indexing mechanism is moved into the substrate], so the indexing robot can be page 11 \\ 312 \ 2d-code \ 91-05 \ 9ll03130.ptd 1232199 V. Description of the invention (7) Actions for the best The invention described in item 2 of Γ is the substrate transfer device of item 1 of the patent application scope Φ, and when the tongue 4 4 Le 1 is placed, it will follow the above ^ * Reach the second substrate yielding position # (206 3B Ρ 5Π ^ ^ ★ The substrate unloading machine for carrying out substrates Γ: Nine; the index robot is used for receiving the substrate in the second substrate transfer unit: the above substrate removing mechanism, and placing the substrate in the crystal box of the substrate; A. The control of the control mechanism controls the production of the board, using the substrate transfer control machine that controls the index robot to output a substrate removal mechanism under f, and executes the removal from the substrate removal port: The dagger and I-board transfer control mechanism only needs to respond to the substrate removal request from the substrate processing and cause the substrate removal mechanism to act. U: Independent of this type of substrate removal request, it controls the index robot: the action. This is because it can be wrong. By further optimizing the index robot action, the transfer cycle can be further shortened. F In the invention described in the second item of the patent application scope, a substrate loading machine is provided for loading the substrate into the S-board and the 璋. And the substrate removal mechanism for substrate removal and material removal, and these are under the control of the index robot and the soil plate transfer control mechanism. The substrate transfer control mechanism no longer inquires about the communication of the substrate processing control mechanism, but can correctly grasp the status of the board transfer mechanism and the substrate transfer mechanism (ie, whether or not the substrate is maintained). Therefore, the substrate transfer control mechanism will When the substrate carrying-in mechanism does not hold the substrate, the index robot is instructed to give up the place on the first substrate C: \ 2D-CODE \ 91-05 \ 91103130.ptd Page 12 1232199 V. Description of the invention (8) Set ' The unprocessed substrate is transferred to the substrate carrying-in mechanism. On the contrary, if the substrate carrying-out mechanism is to hold the substrate, the index robot is instructed to move to the second substrate transferring position to receive the substrate and store it in the crystal box. In this way, the movement of the indexing robot can be controlled in a state of being cut off from the substrate processing section. = ^ This does not depend on the day-to-day order of the substrate moving request or the substrate moving out request, and the index robot can be moved. Be optimized. The substrate transfer device of the invention described in item 3 of the declared patent scope is ί 5 1 The substrate processing unit 2 of the substrate removal port (ρ 0) which is carried out contains: a crystal box for storing substrates; =), /, When the second substrate transfer position in i is taken out, the substrate removal mechanism (2 ° 6, 3B, p, 50) of the second substrate transfer second substrate is removed; the substrate is taken out of the crystal box, and the substrate is supplied to the soil plate. Carrying in, and holding the board at the second board transfer position on the same day, the board take-out mechanism receives the board and houses ^ 2 the above-mentioned index robot 进行; communicates with the Λ box of the above 1 base = in / part = box: ^ From the above two, the above-mentioned substrate carrying-out mechanism is fabricated, independently of the substrate processing control mechanism's request, and controls only the substrate carrying control mechanism (202) of the indexer. > In this invention, because a substrate carrying mechanism is provided for carrying substrates out of the substrate processing, and a substrate carrying control mechanism for soil plate and port production, φ 荖 1 is controlled by an index robot control paper scale. The controller's substrate removal mechanism is not allowed. \\ 3l2 \ 2d-code \ 91-05 \ 91103130.ptd Page 13 1232199 — V. Description of the invention (9) i The emperor's bow required for the substrate removal 丨 —44ί, t β Dassault Bow 丨 ::: Disarmer moves. With this, you can become winged. The optimization of Λ can achieve the reduction of the transfer cycle. As a result, the invention described in the fourth item "is set in the scope of the patent application" = board transfer device, the above-mentioned substrate transfer position β μ is set / 、 The above-mentioned substrates are moved into the port at different heights. In the words, 'Because the substrate is moved into the port and the substrate transfer position, the configuration is divided into two parts ::' Therefore, in the plan view, the configuration is at least part ::: 方: The invention can reduce the area occupied by the table of the substrate transfer device. The invention described in item 5 of the second patent patent is within the scope of the patent application or three items: The substrate transfer device described in the above-mentioned second substrate transfer Ferry—Jizhiwang is at a different height from the above-mentioned substrate moving port. This structure can reduce the area occupied by the table of the substrate moving device as described in item 4 of the scope of patent application. For example, in the substrate moving port or In the substrate carrying-out port, a carrying conveyor (30) for moving the substrate along a slightly horizontal carrying surface may also be provided. In this case, it is preferable to provide a substrate carrying mechanism or a substrate carrying-out mechanism. Up position The first substrate transfer position or the second substrate transfer position), and between the lower position of the driver's above-mentioned conveying surface and the lower position, the substrate can be kept up and down, or can be lowered, and can be avoided by the above-mentioned conveying conveyor belt. The substrate shuttle is transferred and lifted. At the raised position, the substrate is crossed 4 times with the transfer robot, and the lowered position is transferred between the raised and lowered positions. A mechanism for transferring a substrate (push pin ρ in the embodiment described later).

1232199 V. Description of the invention (10) The substrate processing device of the invention described in item 6 of Shen Qing's patent scope includes: processing the substrate carried in from the substrate carrying port, and removing the processed substrate out of the substrate. The substrate processing unit (DRT) of the removal port; and the substrate transfer device (IND) described in any one of the above-mentioned patent application scope items 1 to 5. With this structure, since the transfer robot of the index robot can be shortened, the overall substrate processing cycle of the substrate processing apparatus can be shortened. This can improve the productivity of the substrate processing apparatus. The invention described in the scope of patent application No. 7 is a substrate processing method, which is a substrate processing method of a substrate processing device, and the substrate processing device is provided with a processing method for a substrate carried by a script substrate transfer unit (p I) And transfer the processed substrate out of the substrate processing unit (TRT) on the substrate transfer unit (p0); and the substrate transfer unit (IND) that carries in / out the substrate to the substrate processing unit; There are: using the index robot ") to take out the substrate from the crystal box set in the crystal box station (11), and at the first substrate transfer position, transfer this substrate to the substrate transfer mechanism (205, 3A, p, 50) the transfer of the substrate transfer mechanism, # from the first substrate transfer position to the substrate transfer port, the process of transferring the substrate; The substrates carried out from the substrate carrying port described above are collected in the steps of the crystal box of the crystal box station; the substrate transfer control mechanism (2), Controlling the board carrying mechanism The steps of 5% of the steps are not complete, and the steps of using the above-mentioned board conveyance control mechanism to control the indexing machine # a time to use the upper board hall and the robot.

1232199 V. Description of the invention (11) By this method, the same effect as described in the related patent application can be achieved. The invention described in item 8 of the first patent application scope is the substrate processing method described in the patent application, and it also includes: using substrate moving = (206, 30B, P, 50), which will be moved out The above substrate is moved out of the base of Chunzhong and is transferred to the second substrate transfer location. In order to be accommodated in the crystal box set on the top: box station, the above-mentioned index robot is used in the above-mentioned second base = In the position, the step of receiving the substrate from the substrate carrying-out mechanism; f The use of the substrate carrying control mechanism controls the step of the substrate carrying-out mechanism in response to a request from the substrate processing machine f. 1 system By this method, the same effect as described in the related patent application invention can be achieved. The invention described in the ninth patent application scope of the present invention is a substrate processing method, a substrate processing method of a J-plate processing device, and the substrate processing device is provided with a method for executing a substrate loaded from a substrate loading port (? 1). Process and move the processed substrate out of the substrate processing section (TRT) on the substrate removal port (p0); and the substrate transfer section (IND) for carrying in / out of substrates to this substrate processing section; its characteristics The method includes the steps of: taking out the substrate from the crystal box placed in the crystal box station using the index robot "), and transferring the substrate to the substrate carrying port; and taking the substrate out of the substrate carrying port. Step of transferring the substrate to the second substrate transfer position using the substrate transfer mechanism (206, 30B, p, 50); using the index robot, at the second substrate transfer position , The step of receiving the substrate from the substrate carrying-out mechanism and accommodating the substrate in the crystal box set in the crystal box station;

1232199 V. Description of the invention (12) The substrate transfer control mechanism (202) of the substrate transfer unit received from the substrate processing control mechanism (200i) provided in the above substrate processing unit controls the above requirements of the deer. And a step of controlling the index robot by the substrate transfer control mechanism. In this way, the same effect as described in the third invention of the related patent application can be achieved. [Embodiments of the invention] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. Fig. 1 is a simplified plan view of the overall structure of a substrate processing apparatus according to an embodiment of the present invention. This substrate processing apparatus is an apparatus for processing a glass substrate used in a flat panel display such as a liquid crystal display device or a PDP display device. This substrate processing apparatus has a so-called continuous monolithic device-shaped bear that processes a plurality of glass substrates while sequentially rolling and conveying them. This substrate processing device is a combination of: receiving unprocessed substrates from the substrate into the port and processing them; and removing the processed substrates out of the substrate processing unit TRT on the substrate P0; and performing the substrate processing on the substrate processing unit TRT. The index unit IND is moved in / out. The substrate processing section TRT is provided with a plurality of processing sections T1 to Tm, Tm +: 1 to TN (m ·· natural number) arranged in a u-shaped arrangement in plan view. Substrate carrying base m P0 is provided at the two ends of the column adjacent to T1 in the u-shaped arrangement. Conveyor belt modules 3A and 3B are respectively arranged on the substrate carrying-in port PI and the substrate carrying-out port P0. An index unit I ND is provided at the substrate near-port P I and the substrate near-port PQ. The index unit I ND is provided with a plurality of arrays capable of supporting a plurality of crystal boxes c.

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1232199 V. Description of the invention (13) Crystal box mounting section 1 (crystal box station), and index robot R. The index robot R can move horizontally along the arrangement direction of the crystal box c in the crystal box mounting section 1 丨, and can make the substrate holding arm portion 70 perform the horizontal movement of the crystal box c, and it can be performed in the vertical direction. It can be raised and lowered and can be rotated around a vertical axis. With this structure, the index robot R can take out an unprocessed substrate from any crystal box ^, and transfer it to the port P 丨 in the substrate, transfer it to the conveyor module 3A, and remove the substrate in port P. In 〇, from the conveyor belt module, the processed substrates are received one by one, and then the processed substrates are stored in any crystal box C. In the substrate processing section TRT, at the end of the opposite end of the index unit IND, a section transfer device 150 ′ for transferring a substrate when moving from the processing section to the processing section Tm + 1 is provided, and the substrate holding arm is provided. 151 Driving mechanism for reciprocating movement between the processing section Tm and the processing section Tm + 15] 52. With the function of this interval = 50 = 50, the processing unit that moves the substrate from the predetermined speed away from the index IND and executes the substrate processing is performed, and the substrate is transferred to the substrate The processing unit that transports i and performs substrate processing in the direction of the index unit 1 ND is in the + ^^^ group. The substrate to be processed is transported along the U-shaped path, and the processing is performed. The second and third = the structure of the substrate near the conveyor belt module 3A. 简 = Figure 2 is a cross-sectional structure along the transport direction X. Fig. 3 is a cross-sectional structure taken along the plane Λ 搬 i. Conveyor module 3a is provided with a plurality of conveyances 30 in which the substrates conveyed in the ^ direction X are rotated in a red direction; and a plurality of conveyances M for raising and lowering the substrates to and from the indexing machine M. Page 18C: \ 2D- OODE \ 9I-05 \ 9】 103130.ptd 1232199

Push pin p (substrate carry-in mechanism). The pusher pin p has a horizontal 4⑨ base 41 that is perpendicular to the upper end of the base 41 in the Y direction perpendicular to the Y position at a position outside the transfer roller 30, and stands upright from the front end of the 42 to the vertical direction. And the front end = 2 knots and the horizontal arm portion substrate support portion 43 here. The base 41 is raised and lowered by the driving shaft and the extension shaft. The movable structure 50 rotates around its axis. Through the rotation of the base 41, it is erected on the horizontal post 4 9. The temple π, a I tooth mouth P 4 2 stands on the substrate support 43, and the arc is drawn in a plan view. As shown in Fig. 3, the side of the chip that was moved into the area of port p I is again at the back support 81 of the substrate, and exits from the outer structure 50 in this area and rises and falls, and the eclipse I is displaced. In addition, the base portion 41 is driven by the drive machine +, and the soil plate support portion 43 is also raised and lowered. This substrate supporting portion is not like the one shown in FIG. 2, and can be at a rising position 91 (the first substrate transfer position) above the substrate transfer surface cp of the transfer roller 30 or a lower position below the substrate transfer surface CP. 92. The raising and lowering of the pusher pin p is performed in either of the cases where the substrate supporting portion 43 is in the substrate supporting position 81 or the substrate supporting portion is in the withdrawn position 82. When the push pin P is provided with the substrate support portion 43 at either of the substrate support position 81 or the withdrawal position 82, the horizontal arm portion 42 is stored in a pair of gaps adjacent to the transport roller 30 axis 31 in a plan view. the way. Therefore, there is no fear of interference between the transfer roller 30 and the pusher pin P. An opening 36 for inserting and removing the arm portion 70 of the indexing robot R is provided on one side wall of the substrate introduction chamber 35 that houses the conveyor module 3A. The indexing robot r then loads the unprocessed substrate into the conveyor module 3A through the opening 36.

C: \ 2D-C0DE \ 91-05 \ 91103130.ptd Page 19 1232199 V. Description of the invention (15) When the substrate is carried on the conveyor module 3A, the push pin p is located at the rising position 91, and The substrate supporting portion 43 is located at the substrate supporting position 8 丨. In this state, the arm portion 70 of the index robot R places the substrate on the push pin P, and exits from the opening 36. Second, push sales? In the state where the substrate supporting portion 43 is maintained at the substrate supporting position 81, it is lowered to the $ lower position 92. As a result, the substrate is transferred to the transfer roller 30, and the substrate transfer by the transfer roller 30 is started. In this embodiment, the substrate carrying port PI is set in the substrate carrying surface cp of the carrying roller 30. By the transfer of the transfer roller 30, the substrate 81 is transported to the outside of the region where the substrate is carried in the port P I earlier, so that the push pin ρ is in a state capable of receiving the next substrate. In other words, using the rotation of the base 4, the substrate supporting portion 43 = withdraws to the withdrawn position 82. In this state, the push pin ρ will rise. When the horizontal arm portion 42 and the substrate support portion 43 are outside the area where the substrate is carried in, the pusher pin P rises by avoiding the substrate conveyance path, and there is no interference with the substrate S1 that has been transferred to the conveying roller 30. concern. When the field push pin P reaches the rising position 91, the base port M1 is rotated by the driving mechanism 50, and the substrate supporting portion 43 is introduced at the substrate supporting position. As = before, the connected substrate S1 is exiting from the substrate carrying port? The f of area 1 is already ready to accept the next substrate S2. Therefore, the push pin ρ substrate is moved into the port PI without waiting for the substrate S1 to be transferred, and the next substrate S2 is transferred to the push pin ρ by the horse. Has the previously received substrate S1 reached the substrate carrying port? When it is outside the area of 1, the pusher pin ρ will drop, and the second substrate S2 will be transferred to the conveyor. This substrate is taken out from the substrate introduction chamber 3 5 at the exit 3 7 and carried into the processing section.

1232199 V. Description of the invention (16) '" "' a " a T1 〇 After ^ 'repeating the same action', you don't have to wait for the alpha feeding of the substrates you have previously received to supply the substrates to the conveyor belt one by one Module 3 A. On the transportable module 3 A, a pair of alignment mechanisms 60 for arranging the substrates in a specific direction toward the carrying direction X is provided at both ends of the substrate carrying-in port p I. The arranging mechanism 60 arranges the substrates on the transfer roller 0 after the substrates are transferred to the transfer rollers 30 through the push pins p, and before the substrates are transferred by the transfer rollers 30. The arrangement of the substrates may be performed with the substrates supported by the push pins p. ~ ^ FIG. 4 is a more detailed plan view of the internal structure of the conveyor module 3A. FIG. 5 is a side view as viewed in the direction of the arrow v in FIG. 4. Fig. 6 is a rear view seen from the direction of the arrow in Fig. 4; A case where the conveyor module 3A is viewed in the substrate s conveying direction 1 is regarded as a front surface. This conveyor belt module 3A has a plurality of conveying rollers 30 as described above, and the shafts 31 of these conveying rollers 30 are arranged in parallel in the γ direction. Each of the shafts 31 is supported on a pair of support plates 32 provided along a vertical plane in the conveying direction X, so that both ends can rotate freely. A wheel 33 is fixed to one end of each shaft 31. Timing belts 34 are wound around the wheels 33 fixed to the adjacent pair of shafts 31, respectively. A tension roller 34A is provided at a position between the wheels 33 of the adjacent shafts 31 to give a necessary tension to the timing belt 34. The wheel 33 fixed to the shaft 31 disposed at the most downstream end in the conveying direction X passes through the wheel 39 and the timing belt 40 to transmit the driving force from the motor 38. This driving force is conveniently transmitted to all the shafts 31 by the timing belt 3 4 wound between the wheels 3 3 of the adjacent shafts 31.

1232199

1232199 V. Description of the invention (19) '-It will not be in a standby state. It can take the next base from the index robot R. Because the push pin P has a so-called buffer function, it can be used to carry out the circuit board. The waiting time can reach the effect of substrate processing. In other words, since the substrate that was previously carried is transported outside the PI area of the carry-in port, the pusher pin p is immediately lowered, and the substrate can be transferred to the transfer roller 30, so the substrate can be shortened. Interval. The conveyor module 3B in the substrate carrying port P0 is also configured as described above; 楹 group 3A. However, since the conveyor module 3β is transported in the direction of the index sheet 70 I ND carried out from the processing unit μ, the substrate is transported in the direction opposite to the X direction in FIGS. 2 and 7 ′. In other words, in the conveyor belt module 3B, the conveyance roller 30 rolls the substrate toward the push pin ρ. The pusher pin ρ waits for the substrate to reach the substrate removal port P0 set on the transfer surface CP at a position lower than the substrate transfer surface cp, and the pusher pin P will rise to support the substrate more than the substrate transfer surface cp. Upper position (second substrate transfer position). This substrate can be smoothly accessed by the arm 70 of the indexing robot R. When $ gives up the substrate to the pusher pin ρ of the index robot R, it is located at the rising position 9 1 =, the base 4 丨 and the horizontal arm 4 2 of the pusher pin P are also located in the exit path from the substrate's conveyance path. Position (see Figure 3). Among them, the substrate to be taken out next 'will be transferred toward the substrate carrying-out port P0 even when the pusher pin P is at the rising position 91. After the vertical push pin P has passed the substrate to the index robot R, the substrate support portion = is rotated to the exit position 82, and in this state, it is lowered to the lower IV position 92. In other words, after the push pin ρ is transferred to the substrate, it returns

1232199 Description of the invention (2 (0) to avoid the substrate conveyance path and descend. Then, the substrate support portion 43 is rotated to the position of the substrate support position 81, and the next substrate reaches the substrate removal port PO, and it is in a standby state. The conveyor module 3B removed from the port PQ will not have to wait for the substrate to be transferred from the push pin p to the index robot R, and the substrates can be transferred one by one. The processed substrates will not stagnate and may have Efficient processing of substrates. In addition, since there is no need for waiting for substrate transfer, the distance between substrates can be shortened to improve substrate processing efficiency. Figure 8 is a perspective view of a configuration example of the index robot R. The index robot R has: Abutment that can be moved back and forth and linearly in the Y direction. 〇1; a cylinder 102 installed in such a way that the abutment 101 can be rotated and lifted freely; a first arm that can be freely installed on the cylinder 102 A second arm portion 〇04 which is rotatably installed at the front end of the first arm portion 103; and an arm portion 70 which is rotatably installed at the front end of this second arm portion 104. First arm part 1 〇 3. The second arm portion 104 and the arm portion 70 can freely rotate around the vertical axis. Therefore, the first arm portion 103, the second arm portion 104, and the arm portion 70 constitute a so-called balance weighing rod. The rotation of the two arm portions 104 is linked to the rotation of the first arm portion 103, and by using the rotation of the second arm portion 104, the arm portion will be flexed and stretched, and the posture of the arm portion μ can be maintained, and The arm 70 is linearly moved toward and away from the center axis of the cylinder 102. On one side of the abutment 101, a slide block 111 that slides on a pair of rails 丨 丨 is fixed. Here The sliding block 111 holds the bolt and nut screwed onto the screw shaft 丨 12 '. Therefore, by using the motor 1 1 3 to rotate the screw shaft 丨 丨 2 forward / reverse, the abutment 1 〇1 Move back and forth linearly in the γ direction

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In the index robot R of this structure, 蕻 ± _ 乂 _ R τ hunts back and forth and slowly moves from the abutment 101, the lifting and turning of the cylinder 1 0 2, 7 fen, strength, and a pair of arms 1 0 3,104, the substrate was removed from the crystal box C, # > λ ^ °

, η ^ w / proud, Asia moved into the conveyor module 3A

on. Similarly, the crystal belt C can be loaded with q R from the conveyor belt. Substrates presented on the C core group 3B, move Qiu:! Block diagram of the electrical structure of the substrate processing apparatus. In the substrate processing port PTRT, there is also a substrate processing control unit 2 for controlling the processing unit 1 ~ μ for f lL .. 丄 + 1 1 N 2 〇1 Quick seat 丨 is provided in the index unit IND The index control unit 2 0 2 that controls the index robot R. The substrate processing control post 9 η 1 is shown in the following table:? 丨, 〇 处 佐 # 2 0 1 and the index control section 2 0 2 are connected through a circuit 203 and perform data exchange with each other. = The board processing control section 2 〇1 controls the processing section τ 丨 ~ TN, and also controls the movement of the conveying roller 30 of the conveyor belt module 3A of the PI port of the substrate moving port =, and controls the The conveyance of the conveyor module 3B at the p0 end of the substrate removal port is more than 30. In addition, the "index control unit 2 0 2 not only controls the operation of the index robot r" but also controls the pusher pin P 'provided in the conveyor module 3A of the substrate carrying port p 丨 and the driving mechanism 5 that drives it. The operation of the substrate carrying-in mechanism 205 constituted by 〇 'and the substrate carrying-out mechanism 2 constituted by the pusher pin P provided in the conveyor module 3B of the substrate carrying-out port p0 and the driving mechanism 50 driving the same 0 6 actions. The substrate processing control unit 201 sends a substrate transfer request to the index control unit 2 0 2 through the communication circuit 2 0 3 'when the substrate is supplied to the first processing unit T1 by using the substrate transfer port PI port transfer 30'. . In addition, the substrate

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1232199 V. Description of the invention (22) The physical control unit 201 removes the substrate from the final processing unit ^ and uses a certain plate transfer roller 30 to transfer the substrate to the push pin p position. &Quot; Remove port PO ), Through the communication circuit 203, it requests the index control unit 202 to send out the PCB. Among them, the substrate carrying-in request and / or substrate carrying-out request may be issued at an earlier timing in consideration of the substrate carrying speed of the carrying roller 30 and the operating speed of the through-circuit circuit mechanism 206. When the index control unit 202 receives the board loading request through the communication circuit 203, the push pin P constituting the board loading mechanism 205 is lowered. This facilitates the transfer from the pusher pin P to the transfer roller 30 of the substrate transfer port. In addition to the stomach, the f control unit 202 responds to the substrate removal request when it receives the substrate removal request through the communication circuit 203, and makes the push pin constituting the substrate removal mechanism 206? Up ,. Thereby, the substrate is lifted up from the conveying surface of the conveying roller 30 at the end of the substrate carrying port p0. In this state, the processed board from the final processing unit TN can be introduced into the control of the air-correlation index robot R below the lifted substrate using the transport report 30, which is independent of the communication circuit, > The supplied substrate carrying-in request and substrate carrying-out request are executed. In other words, is the index control unit 20 2 in the push pin constituting the substrate carrying-in mechanism 205? It is located at the ascending position (the first substrate transfer position). If the pusher pin P does not hold the substrate, it will be sent to the index robot R from the crystal box C placed on the wafer carrier π. Take out a piece of substrate 3 and place it on the push pin p. In addition, the index control unit 20 2 is located at the raised position (second substrate transfer position) of the push pin p constituting the substrate carrying branch structure 2 06, page 27 \\ 312 \ 2d-code \ 91-05 \ 91103130.ptd 1232199 V. Description of the invention (23) " One " " " " When this push pin P holds the substrate, it will be issued to the index robot R and the push from the substrate removal mechanism 20 6 The material pin p receives an instruction for receiving the substrate and accommodating the substrate in the crystal case c of the crystal case mounting portion 11. The push pin p constituting the substrate carrying-in mechanism 205 and the substrate carrying-out mechanism 206 holds the substrate at t, and can be operated by the previous substrate carrying-in mechanism 205, the substrate carrying-out mechanism, the structure 206, and the index robot R. Judge in the record. In other words, 'Just after the index robot R has transferred the substrate to the pusher pin P of the substrate carrying mechanism 205, the pusher pin p holds the substrate. If the pusher pin P is lowered and then raised again, the pusher pin p of the substrate carrying-in mechanism 20 5 immediately after the lifter belongs to an unretained substrate. Similarly, just after the pusher pin P of the substrate carrying-out mechanism 206 is raised, it can be judged that the substrate is not held on the pusher pin p. And just after the indexing robot R receives the substrate from the $ material pin P of the substrate carrying-out mechanism 206, it can be judged that the pushing pin p is not secured to the substrate. Then, as soon as the push pin p of the substrate carrying-out mechanism 206 is lowered and raised again, the pusher holds the substrate immediately after it is raised. The index control unit 2 0 2 is based on the position of the indexing robot R (reliance, entry, and substrate transfer PH), the indexing machine; = state (such as taking out the substrate from the crystal box C and supplying it to the substrate transfer mechanism 2 (5) In the substrate moving operation, or after receiving and processing the substrate from the substrate removal mechanism, the substrate removal operation in the crystal box (c) is optimized), and the operation of the index robot R is optimized. . The index control unit 202 sends the substrate processing control unit 20 to the substrate processing control unit 200 through the communication circuit 203 at the timing when the push pin p of the substrate carrying-in mechanism 205 is completed.

1232199 V. Description of the invention (24) " " In addition, the index control unit 202 provides a signal to the substrate through the communication circuit 2 0 3 ′ to the processing control unit 2 (H to provide a signal for the completion of the substrate removal.) In the embodiment, the substrate is carried into the substrate into the substrate carrying port p I; the structure 2 0 5 ′ and the substrate carrying mechanism 2 0 6 carrying the substrate out from the substrate carrying port pq can be controlled by the index control unit 202 | The substrate carrying-in mechanism 2 05 and the substrate carrying-out mechanism 2 06 correspond to the substrate moving-in request for the substrate moving control unit 201 through the communication circuit 203. Therefore, it is possible to execute the adjustment without delay. Substrate Carry-in: PI's board-in and board-out port p0. In addition, the index control unit 202 is independent of the board-in. People. By this, the action of the indexing robot R is not dependent on the board moving in request and the board moving out request generated by the sub-synchronization, but the indexing machine can be stopped from production according to the best situation. Production. By this, you can Significantly shorter indexes Since the robot R's moving shots and σ results can shorten the overall processing cycle of the substrate processing device, it can significantly improve productivity. According to the test of this hairy month, if the substrate processing control unit is used 2 〇 1 Controlling the board moving-in mechanism 205 and the board moving-out mechanism 206, a leap second. In other words, the processing is completed at a speed of 6. one piece: The board is moved out of the substrate and removed from the cock, which is the limit. In contrast, if the structure in which the substrate control mechanism 202 and the substrate control mechanism 206 are controlled by the index control unit 202 is used, the substrate processing cycle can be shortened to 42 seconds.

1232199 V. Description of Invention (26)

The use of raising the pusher pin P can also allow the arm 70 and the board of the pusher pin p 0 lock P to be transferred, which can also be achieved in a manner. The range of matters for raising and lowering the push pin P can be various. The height of the arm portion 70 can be set to a certain level, and the transfer of the substrate can be performed. Of course, both of them are raised and lowered, and the method of transferring the substrate is the same. There is no particular limitation on the structure of the related conveying rollers 30 and the pusher which only lifts or both of them. In addition, the changes described in the scope of the patent application. [Explanation of the component number] 11 cassette mounting section 30 transfer roller 31 shaft 32 support plate 33 wheel 34 timing belt 35 substrate introduction chamber 36 opening 37 output 38 motor 39 wheel 40 timing belt 41 base 42 horizontal arm 43 substrate support Building

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V. Description of the invention (27) 50 Drive mechanism 51 Swing arm 55 Support frame 56 Cylinder 60 Alignment mechanism 61 Pin 62 Support member 63 Cylinder 70 Arm portion 81 Substrate support position 82 Exit position 91 Raise position 92 Lower position 101 Abutment 102 Cylinder 103 The first arm 104, the second arm 110, the track 113, the motor 150, the section transfer device 151, the substrate holding arm 152, the driving mechanism 201, the substrate processing control section 202, the index control section \\ 312 \ 2d-code \ 91-05 \ 91103130.ptd 32nd Page% 1232199 Brief Description of Drawings Figure 1 is a top view of a substrate processing method according to an embodiment of the present invention. Fig. 2 is a schematic cross-sectional view of the internal structure of the conveyor belt. Fig. 3 is a schematic cross-sectional view of the internal structure of the same conveyor belt. Fig. 4 is a plan view of a specific structural example of the carousel. FIG. 5 is a side view of a specific structural example of the carousel. FIG. 6 is a rear view of a specific structural example of the conveyor belt. Fig. 7 is a structural diagram of a driving mechanism for driving a push pin. It is replaced by it Fig. 8 is a structural diagram of an example of a robot structure. Figure 9 is a block diagram of the electrical structure constituting the #device at the above substrate C: \ 2D-C0DE \ 91-05 \ 91103130.ptd page 34

Claims (1)

1232199 VI. Patent Application Scope '' '1 · A substrate transfer device is used to execute a substrate processing unit including: a substrate transfer port that carries unprocessed substrates, and a substrate transfer unit that transfers the processed substrates out of the port. A substrate transfer device for transferring substrates into and out of the substrate, which is characterized by comprising: a cassette box provided with a cassette for accommodating the substrate; and a substrate for transferring the substrate from the first substrate to the substrate transfer port. A carrying-in mechanism; taking out a substrate from a crystal box provided at the crystal box station, and transferring the substrate to the substrate carrying-in mechanism at the first substrate transferring position, and simultaneously transferring the substrate out of the substrate carrying port, The index robot that is housed in the crystal box set in the crystal box station; and communicates with the substrate processing control mechanism provided in the substrate processing section, and responds to the request from the substrate processing control mechanism, and Control 1 The above-mentioned substrate carry-in mechanism, and at the same time, control the indexing machine independently of the request from the substrate processing control mechanism Human substrate transfer control mechanism. 2. If the substrate transfer device of item 1 of the patent application scope includes a substrate removal mechanism for removing the substrate from the substrate removal chute when it reaches the second substrate transfer position, the above index; The robot is at the second substrate transfer position, receives the substrate from the substrate carrying-out mechanism, and stores the substrate in the crystal box set in the crystal box station; the substrate transfer control mechanism corresponds to The request of the substrate processing control mechanism 'controls the substrate unloading mechanism. C: \ 2D-CODE \ 91-05 \ 91103130.ptd Page 35 1232199 VI. Patent application scope 3 · A substrate transfer device is used to transfer substrates equipped with · unprocessed substrates into the port 'and processed The substrate processing unit for carrying out the completed substrate is carried out by the substrate processing unit, and the substrate transfer device for carrying in and out of the substrate is characterized in that it includes: a wafer box station for storing a wafer box for storing the substrate; When the two substrates are transferred, the substrate removal mechanism for removing substrates from the substrate removal port; remove the substrates from the crystal box located at the crystal box station, and supply the substrates to the substrate, and the soil plates are moved into the port. At the same time, at the above-mentioned second substrate transfer position, the second and second plates: the receiving mechanism receives the substrates, and is housed in the daily index robot set in the crystal box station; and into the processing unit Transfer between the set of substrate processing control mechanisms: = the corresponding requirements of the substrate processing control mechanisms, control of the structure, and control of the above-mentioned claims, such as applying for a patent ^ The substrate transfer control of the robot制 机构。 Institutions. , Λ :: siege item 1 or 2 of the substrate is transported and placed in the basin, at the upper position. It is located at a position different from the above-mentioned substrate carrying cock. 5: 11: i: dry enclose 2 or 3 of the substrate conveying Pei Zhi, 1, in the above, the substrate is transferred to the position, and /, T, position. Office. _Master The above substrates are moved out of the port at different heights. 6. A kind of substrate processing device, which handles the substrate torn from the substrates into the port and removes them from the soil plate yoke lamp. The processed substrates are isolated from the ports. Processing department; and C: \ 2D.CODE \ 91-05 \ 91103130.ptd η Page 36 1232199 6. Scope of patent application The substrate transfer device of any one of the items 1 to 3 of the above patent application scope. 7 · —Based on a 'plate processing method, which is a substrate processing method of a substrate processing apparatus', and the substrate processing apparatus is provided with: processing a substrate carried in from a substrate carrying port, and removing the processed substrate out of the substrate The substrate processing unit on the unloading port; and the substrate transfer device for carrying in and out of the substrate to the substrate processing unit; characterized in that it includes an index robot to take out the substrate from the crystal box installed in the crystal box station And at the transfer position of the first substrate, transfer the substrate to the transfer step of the base mechanism; using the substrate transfer mechanism, when moving from the transfer location of the first substrate to the transfer port of the substrate, Steps for transferring substrates; Steps for accommodating substrates carried out from the substrate carrying-out port in the crystal box provided in the crystal box station using the index robot; receiving substrates provided in the substrate processing section using the index robot The substrate transfer control mechanism of the substrate transfer unit requested by the transfer control mechanism controls the steps of the substrate transfer mechanism described above; And # using the substrate conveyance control means controls the index robot quenched. γ 8. The substrate processing method according to item 7 of the scope of patent application, including: T # f Steps of using the substrate carrying-out mechanism to move the slabs out of the substrates to the second substrate transfer location To store the soil in the crystal box set in the above crystal box station, the robot is taken out of the above substrate in the above-mentioned 柘 柘, 、 # 里 士 y ^ 1 罘 一 暴暴 # ferry position. Page 37 of the agency: C: \ 2D-CODE \ 91-05 \ 91103130.ptd 1232199 VI. The steps of receiving substrates in the scope of patent application; and using the above-mentioned substrate transfer control mechanism, in response to the requirements from the above-mentioned substrate processing control mechanism, it controls The steps of the substrate carrying out mechanism. 9. A substrate processing method, which is a substrate processing method of a substrate processing device, and the substrate processing device is provided with a processing method for processing a substrate loaded into a spoon from a substrate loading port, and transferring the processed substrate out of the substrate. A substrate processing unit of the port; and a substrate transfer device for carrying in / out a substrate to and from the substrate processing unit; characterized in that it includes: using an index robot to take out a substrate from a crystal box provided in a crystal box station, and A step of transferring the substrate to the substrate transfer port; a step of transferring the substrate transferred from the substrate transfer port of the first substrate to the second substrate transfer position using the substrate; to the use of the index robot at the first Steps for receiving substrates from the substrate carrying-out mechanism at the two substrate transfer locations, and accommodating the substrates in the crystal cassette set in the crystal cassette station; using a method for receiving the substrate transfer control mechanism provided in the substrate processing section. The substrate transfer control mechanism of the substrate transfer unit is required to control the steps of the substrate transfer mechanism according to the requirements; Conveyance control means controls the index robot using the quench substrate. C: \ 2D-CODE \ 91-05 \ 91103130.ptd Page 38