TWI255232B - Nozzle plate and manufacturing method of same - Google Patents

Abstract

A nozzle plate (8) has a first nozzle layer (1) and a second nozzle layer (2). The first nozzle layer (1) has a first nozzle hole (11a), and is provided on the fluid discharge side and thin. The second nozzle layer (2) is layered on the fluid supply side of the first nozzle layer (1) and thicker than the first nozzle layer (1), and has a second nozzle hole (11b) communicating with the first nozzle hole (11a) and forming a nozzle hole (11) together with the first nozzle hole (11a). A first electrode layer (25) formed on the inner wall of the first nozzle hole (11a) and a second electrode layer (26) formed on the inner wall of the second nozzle hole (11b) are electrically connected. A nozzle plate suitable for electrostatic suction-type fluid discharge device discharging an ultra-micro amount of fluid is provided. In the nozzle plate, an electrode is stably formed in the vicinity of a nozzle head portion, nozzle holes are easily made to be electrically independent from each other, and a drive signal for the electrode formed in the nozzle hole can be applied from the fluid supply side of the nozzle plate.

Description

1255232 IX. Description of the Invention: [Technical Field of the Invention] "The present invention relates to a squirting type plate for discharging a fluid such as a fluid for discharging ink, and in further detail, relating to charging a fluid, Electrostatic attraction, discharge of the fluid to the nozzle 9 to the nozzle-type flat plate of the electrostatically attractable fluid on the object. [Prior Art] A "|" has various fluids (discharge materials) such as ink discharged to the object ( The fluid injection method on the recording medium). Here, the use of ink as a fluid injection method will be described. The On demand type inkjet method has been developed: a piezoelectric method using a piezoelectric phenomenon, (4) a thermal method of film boiling phenomenon of an ink, and an electrostatic attraction method using an electrostatic phenomenon. In particular, in recent years, the high resolution of the ink-and-ink method has been strongly demanded. In order to achieve high resolution ink jet recording, the discharged ink droplets must be miniaturized. Here, the action of the ink droplets discharged from the mouthpiece sprayed on the recording medium can be expressed by the following equation of motion (formula (1)). P mk · (4/3 · 7Γ · d3) · dv/dt ~Cd· (1/2· pair·今(7Γ · d2/4).....(1) The bulk density of the above p mk ink, v The droplet velocity, the coefficient of resistance, the density of p air, and the droplet radius of the ink, Cd can be expressed by the following formula (2).

Cd=24/Re · (1+3/16 · Re° 62) ·········· (2) Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re Re 1255232, can be expressed by the following formula (3): d - p lnk . ν / ............ (3) The radius of the droplet on the left side of the above formula (1) The effect of the motion energy is greater than the effect of the droplet radius on the air viscosity resistance. Because, at the same speed I, the smaller the droplet, the faster the droplet velocity decelerates, and cannot reach the recording medium leaving a certain distance, or Even if it arrives, the spray accuracy is poor. j. To prevent this, 'the initial velocity of the droplets must be increased, that is, the discharge capacity of the two parent units must be increased. But the 'previous piezoelectric method and the thermal type inkjet. In the case where the discharge droplet is broken and smaller, that is, when the discharge energy per unit volume of the discharged droplets is increased, the following problems are caused, and thus the amount of discharged droplets is required to be 1 pl or less, even if It is particularly difficult that the diameter of the droplet (hereinafter referred to as the droplet diameter) is below the anode. Problem 1: The discharge energy and the driving pressure of the piezoelectric ink jet head The displacement of the piezoelectric element is related to the pressure generated. The displacement of the piezoelectric element is closely related to the ink discharge amount, that is, the ink droplet size. In order to reduce the droplet size, the droplet size must also be lowered. It is difficult to discharge the droplets per unit volume. Problem 2 · The thermal type of inkjet head, because the film boiling phenomenon of the ink is used, the pressure at the time of forming the bubble has a physical limit, and the discharge of the ink can be roughly increased by the production. The area of the heating element is determined by the area of the heating element, that is, the volume of the bubble generated, that is, approximately proportional to the amount of ink discharged. Therefore, when the size of the ink droplet is reduced, the volume of the generated bubble becomes smaller, and the discharge energy becomes smaller. It is difficult to increase the discharge per unit volume of the discharged droplets of the ink. 1 Shout 3 Driven by the compression method and the thermal mode (heating) element 95731.doc 1255232 The quantity is closely related to the discharge amount, so when the inch is It is very difficult to remove the U droplet τ and suppress the deviation. Therefore, in order to solve the above problems, ^ Μ Ψ ^ r ^ ^ 由 由 由 由 由 由 由 由 由 由 由The electrostatic attraction method, which is from the nozzle discharge, is shown in the formula (4) below. P mk - (4/3 · ^ . d3} . dy/ Dt =",, one today (~/4)........ 2 The amount of charge in n night drops, the electric field strength around E. 攸 The above public $ (4) can be known as electrostatic attraction, ^ - The type, and the discharged droplets are different from the discharge month b. Even in the scattering, the _ 5 is also arrogant. Therefore, the discharge energy per unit volume can be reduced, and it can be applied to discharge minute droplets. An inkjet device (hereinafter referred to as an electrostatic attraction type inkjet device) is disclosed in Japanese Laid-Open Patent Publication No. Hei 08.238774 (Publication: September 17, 1996, Φ μ - ^ & ) No: The electrode for voltage application is placed inside the nozzle. In addition, Japanese Laid-Open Patent Publication No. H02 (Kokai No. Hei. No. Hei. No. Hei. No. Hei. An ink jet apparatus that discharges ink containing fine particles. Referring to FIG. 17, the disclosure is disclosed in "Shangshangtai Taiba", "Japanese Patent Publication No. 8-238774 (Publication Date: Month Day) Fig. 17 is a schematic cross-sectional view of the ink jet device. In the figure, 1 〇 1 indicates an ink ejection chamber, 102 indicates ink, 1 〇 3 indicates an ink chamber, and 1 〇 4 indicates a nozzle hole, 丨 05 Ink tank, 1〇6 indicates the ink supply path, 1〇7 indicates 95731.doc 1255232 rotating drum, 108 indicates the recording medium, n〇 indicates the control element, and (1) indicates the processing control unit. Further, 114 is placed in the ink cartridge.急+ a He is directed to the electrode portion for electrostatic field application on the side of the ink chamber 103 of 101, and is provided in the wire, the Mtm, and the metal cylinder (Drum) of the 107 = the opposite electrode portion. A bias power supply unit that applies a negative voltage of several thousand V to the opposite electrode portion 115. In the electrostatic field application electrode portion 114, the power supply unit is supplied with a voltage of several hundred volts, and m is a grounding portion. At this time, the electrostatic field application electrode portion 114 and the phase electrode portion ι 5 are applied to each other. The high voltage of the high voltage power supply unit 117 of the plurality of volts of the electrode unit 115 is overlapped with the high voltage power supply unit 117, and a superimposed electric field is formed, and the superimposed electric field is used to control the discharge of the ink from the nozzle hole 1〇4. Further, 119 is formed in a convex meniscus portion of the nozzle hole 1〇4 by a bias of several thousand ν applied to the opposite electrode portion U5. Hereinafter, the ink jet of the electrostatic attraction method of the above configuration will be described. The operation of the device. First, the ink 102 is sent to the (4) hole 1G4 of the ink U)2 by the capillary supply phenomenon through the ink supply path 1〇6. At this time, the counter electrode portion 115 is disposed opposite to the nozzle hole 1 () 4, and the opposite electrode portion 115 of the female recording medium 1 〇 8 is disposed. The ink of the ink jet hole 1 〇 4 is formed by the bias of the thousands of v applied to the counter electrode portion i} 5 to form a convex ink and a meniscus portion 119. By applying the signal voltage to the electrostatic field application electrode portion 114 disposed in the ink chamber 103: the voltage is applied from the high-grinding power supply unit 117 of several hundred V, and the electric power from the bias power supply unit U6 applied to the opposite electrode portion. In the overlap, the ink 1 〇 2 is discharged to the recording body 1 〇 8 by the overlapping electric field to form a printing image. The above-mentioned Japanese Laid-Open Patent Publication No. 95731.doc 4 1255232, No. 4 (Japanese Patent Publication No. Hei. No. 4, No. 4, No. 4, No. 4) Before the driving voltage is applied, the balance between the electrostatic force generated as shown in Fig. 18 (a) and the surface tension of the ink is: the state in which the ink is eccentrically grounded into the convex meniscus portion 119a. When the surface shape of the ink is applied with the driving electric power in the above state, as shown in FIG. 18, 119b is formed on the surface of the liquid, and the center of the convex surface of the liquid surface is sacred, and the center of the convex surface of the liquid surface is raised. The U9b of the month of F. The surface: =, when the _ time is called, as shown by the liquid table (Tal, what is further concentrated in the center, forming a half moon shape of the so-called Taylor connection (ayl〇r connectl〇n) In the meniscus, the electric wire I at the top of the cable is separated and discharged in the liquid droplets. "The force exceeds the surface tension of the ink. Next, the above-mentioned Japanese Laid-Open Patent Publication No.-=. Bulletin (publication period: 2, Bey's soil' clothing is as follows. Fig. 19 is a schematic structure of an inkjet device Figure: "The inside of the holding member of the ink jet device is housed with a linear recording head 2 ιι formed by a low-electric" material (acrylic resin, ceramics, etc.) as a solid ink head; The ink discharge holes of the recording head 211 are opposite to each other::: the relative electrical power of the material (4); the ink tank 212 for storing the ink in the non-conductive ink medium; the ink is used in the ink tank. (10) between the first 2U circulating ink circulation system (4) ..., 21, tube 2 (5), respectively, to apply a pulse voltage generating device 213 for attracting the pulse of the ink droplets of the pixels of the recorded image to each of the discharge electrodes 211a; According to the image poor material, the driving circuit (not shown) of the pulse voltage generating device 2 1 3 is controlled to pass the recording medium 2 3 〇 through the recording head 211 and the opposite electrode door. The gap between the three recorded media transport mechanism (not shown); and the controller that controls the entire device (not shown), etc. The ink circulation system is connected between the recording head 211 and the ink tank 2 1 2 Two ir, f 2 1 5a, 2 15b, and two pumps driven by the controller The ink circulation system is divided into: an ink supply system for supplying ink to the recording head 21 and an ink recovery system for recovering ink from the recording head 211. The ink supply is sealed by a pump 214a. The ink is sucked into the groove 212, and is fed to the ink supply portion of the recording head 211 via the tube 215a. Further, the ink recovery system sucks ink from the ink recovery portion of the recording head 211 by the pump 215b, which is forcibly recovered to the ink via the tube 215b. In the groove 21 2, as shown in Fig. 20, the ink supply unit for expanding the ink fed from the ink supply and the e21 5a of the 'e system into a line width is provided in the recording head 2''. The ink from the ink supply portion 220a is guided into an outer convex (male-shaped) ink flow path 221, and the ink path 22 1 and the ink recovery portion 220b of the ink recovery system tube 215 are connected to the ink level circuit 22 1 The slit-shaped ink discharge holes 222 having apexes open to the appropriate width (about ο. mm) of the opposite side of the electrode 2 are arranged at a plurality of discharge electrodes 2Ua arranged in the ink discharge holes 222 at a specific pitch (about 〇·2). And a low dielectric material (such as ceramic) respectively disposed on both sides and above the discharge electrodes 21 la The isolation wall 223. Each of the discharge electrodes 21 la is formed of a metal such as copper or nickel, and a low dielectric film for preventing adhesion of pigments (e.g., a polyimide film 95731.doc -11' 1255232 film) having a good wettability is formed on the surface. Further, the front end of each of the discharge electrodes 21 la is formed in a triangular pyramid shape, and protrudes from the ink discharge hole 222 toward the opposite electrode 210 side only at an appropriate length (7 〇 μη 8 8 μm). The driving circuit not shown on the map is supplied with a control signal to the pulse voltage generating means 213 only in accordance with the time of the tone data contained in the image data in accordance with the control of the controller. Thereby, the pulse voltage generating means 213 outputs the high voltage signal of the pulse Vp which is pulsed at the top of the pulse, which is exemplified by the moduli, superimposed on the bias voltage Vb. Then, when the controller delivers the image data, the two pumps 214a, 214b- of the ink circulation system are driven. Thereby, the ink is pressure-fed from the ink supply unit 22A, and the ink recovery portion 220b becomes a negative pressure, and the ink flowing into the ink flow path 221 flows into the gap between the partition walls 223 by capillary action, and is infiltrated to the front end of each discharge electrode 21U. At this time, since the ink surface near the front end of each of the discharge electrodes 211a is negative, the knife forms an ink meniscus at the front end of each of the discharge electrodes 2a. Further, by controlling the recording medium transport mechanism by the controller, the recording medium 23 is transported in a specific direction of the head display, and the aforementioned high is applied between the discharge electrode 2 and the discharge electrode 2 by controlling the drive package ' Voltage signal. Next, the meniscus before the droplet scattering of the ink-jet apparatus disclosed in the above-mentioned Japanese Laid-Open Patent Publication No. 127410 (published date, May 9th, 2011) will be described with reference to FIG. 21 to FIG. The department moves as follows. When the pulse electrode a from the pulse electric power generation device (1) is applied to the discharge electrode 21U in the (9) 2U as shown in Fig. 21, the rise from the discharge electrode 2lla side to the opposite electrode 2 1 side is generated. ^人# The electricity of this day is due to the use of the front end of the sharp discharge of electricity. Ha's eye produces the strongest electric field near its front end. 95731.doc 1255232 When such an electric field is generated, as shown in Fig. 22, each of the charged pigment particles in the ink medium is moved toward the ink surface by a force fE (Fig. 2i) from the electric field. Thereby, the concentration of the pigment near the ink surface is concentrated. When the pigment concentration is concentrated, as shown in Fig. 23, in the vicinity of the ink surface, a plurality of f electro-pigment particles 201a start to gather on the opposite side of the electrode. Then, when the Yankee agglomerate 2G1 begins to grow in a spherical shape near the ink surface, each of the headings & is a polymer of 203, and a repulsive force f starts to act on each of the charged pigment particles. 201 a 〇 即 即 决 决 决 决 衾 丨 丨 丨 丨 拉 拉 拉 拉 拉 拉 拉 乂 乂 乂 乂 ♦ ♦ ♦ 体 体 体 体 体

The resultant force f t o t a! with the force fE of the electric field E from the pulse voltage is applied to each of the tributary pigment peaks 2〇ia. Therefore, 'in the charged pigment particles between the Gong- 』 and the 1 ^ package repulsive force does not exceed the range of each other's condensing power, towards the pigment & the basket 2 υ 之 之 total total total total of the total effect of the 黾 pigment particles 201 a (in the Gentleman On the Yao ψ 上 Λ ( ( ( ( 连 连 连 连 连 连 连 连 连 连 连 连 连 连 连 连 连 连 连 连 连 连 连 连 连 连 连 连 连 连 连 连 连 连 连 ' ' ' ' ' ' ' ' ' ' ' ' The particle 201 is deformed by the "repulsive force f__f U grown in the pigment agglomerate 201. The pigment agglomerate 201 formed from the n charged pigment particles 2 is subjected to the binding force Fesc of the electric field from the pulse pen pressure. Electrostatic repulsion & Withstand from ink solvent

The bag repulsive force PE and the binding force F condensate 201 are stabilized in a state of micro-protrusion from the surface of the ink. Further, the pigment agglomerate 201 grows, and when the electrostatic discharge (10) is as shown in Fig. 24(4) to Fig. 24(6) t 200a is detached. No, the pigment agglomerate 2〇1 from the ink surface. Moreover, the principle of the previous electrostatic attraction method is to concentrate the charge on the center of the π to produce the ridge of the month. The tip radius of the ridge of the ridge is determined by the concentration of the charge. When the concentrated charge and the electrostatic force of the electric strength are greater than the surface tension of the meniscus at this time, the droplet starts to separate. ...Because the maximum charge amount of the lunar portion depends on the physical property value of the ink and the radius of curvature of the meniscus, the smallest droplet size is determined by the physical property value of the ink (especially the surface tension) and the electric field formed in the meniscus. Depending on the strength. In general, the surface tension of a liquid, the surface tension of a solvent-containing one is lower than that of a pure solvent, and the solvent is contained in the actual ink, thereby increasing the surface tension. Therefore, in consideration of the fact that the surface tension of the ink is constant, a method of reducing the droplet size by increasing the electric field strength is employed. However, as described above, the electrostatic attraction method before A is a method of reducing the droplet size by increasing the electric field intensity, but the above-mentioned Japanese Laid-Open Patent Publication No. 8-238774 (Publication: September 17, 1996)喷墨 」 」 及 及 及 及 及 及 及 及 及 及 及 及 及 喷墨 喷墨 喷墨 喷墨 喷墨 喷墨 喷墨 喷墨 喷墨 喷墨 喷墨 喷墨 喷墨 喷墨 喷墨 喷墨 喷墨 喷墨 喷墨 喷墨 喷墨 喷墨 喷墨 喷墨 喷墨 喷墨 喷墨 喷墨 喷墨 喷墨 喷墨A field of strong electric field strength is formed in a meniscus region having a large projected area of the discharged droplets, and the electric charge is concentrated at the center of the meniscus by discharging the electrostatic force including the concentrated electric charge and the electric field strength formed. Therefore, it is necessary to apply a very high voltage of about 2000 V, which makes driving control difficult, and there is also a problem in terms of safety in operating the ink jet device. In order to review the results of such problems, it is found that the discharge film type is different from the previous fluid discharge model, and the width or diameter of the discharged ink portion (starting discharge portion) is reduced. The electric field strength can be increased without applying a high voltage of 95731.doc 1255232. Hereinafter, the basic characteristics of the electrostatic attraction type microfluid discharge, in particular, the surface potential of the charge formed in the meniscus at the tip end of the nozzle, will be examined using Figs. 25(a) and 25(b). First, as shown in Fig. 25 (a), the simple structure of the electrostatic attraction type fluid discharge device is modeled. The simple model is provided with a drive electrode 25 inside the sharp nozzle 250 at the front end, and the discharge material 252 is filled inside the entire nozzle. Then, the substrate 254 is disposed opposite to the front end surface of the nozzle, and is grounded by the back surface electrode 255. When such an annual pure structure model is formed, since the electric charge flowing from the power source 256 passes through the inside of the fluid 252 of the discharge material inside the nozzle 250, and is opposed to the substrate 254 on the meniscus 257 having the electrostatic capacitance at the tip end of the nozzle, it can be assumed It is a series circuit of the power supply voltage V 所示 shown in FIG. 25( b ) and the internal resistance R of the nozzle, and the electrostatic capacitance C between the meniscus portion 25 7 and the substrate 254 . The series circuit of V 〇 RC can be expressed as follows using the stored charge Q(1) on the meniscus 257. R dQ(t)/dt + Q(t)/C= V〇.......(5) When solving the differential equation of the formula (5), the stored charge Q(t) of the meniscus surface and The meniscus surface potential V(t) can be expressed as follows. Q(1)=CV〇[l-exp(-t/RC)].....(6) V(t)= V〇[l-exp(-t/RC)]......(7) As described above, the stored charge Q(t) and the meniscus surface potential V(1) at the meniscus surface at a certain time t depend on the resistance R inside the nozzle 250 and the electrostatic capacitance C between the meniscus 257 and the substrate 254. That is, the electrostatic absorption of the structure 95731.doc -15- 1255232 is discharged from the earth body, and by reducing the resistance & inside the nozzle, it is easy to: the surface of the bow 257 stores the charge 'can shorten the discharge fluid 252 before The τ gate is also required to be used to extract the frequency and to perform high-speed stroke. The specific countermeasure for lowering the resistance R inside the nozzle 250 is to make the driving electrode 251 close to the ink end of the nozzle 250 as much as possible. A technique for forming an electrode inside a nozzle hole of an electrostatic attraction type inkjet nozzle is disclosed in Japanese Laid-Open Patent Publication No. Hei. Hei. No. Hei. No. Hei. Fig. 26 is a cross-sectional view showing the nozzle-type flat process of the Japanese Laid-Open Patent Publication No. UM75305 (published date: simplification of the month). Japanese Patent Laid-Open Publication No. Hei 1 〇 〇 〇 〇 〇 〇 ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( 构造 构造 构造 构造 构造 构造 构造 构造 构造 构造 构造 构造 构造 构造 构造 构造 构造In the first embodiment, a plurality of ink storage recesses A··. are formed in advance, and the surface of the nozzle plate 30 is not formed on the surface of the ink storage recess 4A, and the photoresist layer/〇 which is not fixed to the conductive electric ore is applied. 2. Then, a nozzle hole penetrating through the nozzle plate 3 and the photoresist layer 3〇2 is formed to communicate with each of the ink storage recesses a, and the conductive ore 303 is held inside the nozzle. The resist layer 3〇2 is selected such that the material for electroplating 3〇3 is not fixed, so the electroplating electroplating 3〇3 is only on the surface of the f-type flat plate 3〇1 and the nozzle type flat plate 3CU on which the photoresist layer 3G2 is not formed. In this way, the Japanese A patent pending A Kaikai 1〇_1753〇5 bulletin (publication date: IMS date 30th)” forms an electrode layer inside the Beshole (electrical forging). The publication of the Japanese Patent Publication No. Hei 11-42784 (published on February 16, 1999) discloses Type 9553 l.doc -16 - 1255232 of the type of inkjet head The structure of the electrode is formed on the opposite side of the recording medium from the recording medium. Fig. 27 is a publication of the Japanese Patent Publication No. JP-A-42784 (publication date 1999) (December 16) The description of the structure of the ink jet head is described in Japanese Laid-Open Patent Publication No. Hei-Ping No. (Publication Date, February 16, 1999). The control electrode 4〇1 is formed on the surface of the insulation control substrate 411, and the control electrode 4〇2 is formed on the moon surface thereof, and the ink discharge hole 413 penetrating through the ink tank 4% is formed so that the ink can pass through the control electrode 4〇. 1 or 4 〇 2. A protruding ink guide 412 is disposed on the ink discharge hole 413, and is applied to the control electrode. The electric field generated by the electric concentrating is concentrated on the front end of the ink guide 412, and the ink droplet 414 is The electric field is scattered to the recording medium 々a which is provided through the counter electrode 42A. However, the Japanese Laid-Open Patent Publication No. 753-5 (publication date: June 30) and Japanese Laid-Open Patent Publication Japanese Patent Publication No. 11-42784 (publication date: 1999) The method disclosed in the "February 16" has the following problems, and cannot be applied to the electrostatic attraction type fluid discharge device which reduces the width or diameter of the discharged ink portion. First, the Japanese Patent Laid-Open Publication No. In the structure of the publication No. (June 30, 1998), the conductive plating is formed in a region other than the medium facing surface of the nozzle plate 301, and is formed in each of the ink storage recesses A and The nozzle hole b and the V 黾 plating 303 are electrically short-circuited with each other. Therefore, the nozzle type plate 3 method is only used to discharge only one channel designated to improve the resolution of the image to be drawn. From the adjacent channel 0 95731.doc -17- 1255232 The method is as follows.

The nozzle plate 301 is formed with an ink reservoir for processing, and the conductive plating is separated for each channel. The ink flow layer of the nozzle plate 3〇1 is formed before the conductive plating 303, and the same photoresist layer is formed on the side. However, the method of forming the conductive plating 3〇3 wire is not added, but the method of forming the conductive plating 3〇3 layer and then breaking is performed, and when the machining is used, the dust such as chips is entered into the nozzle hole B. The nozzle is clogged, and the heat is broken by the laser, and the heat is left to be deformed by the above-mentioned stress. Further, it is also considered to perform the breaking process by etching, but when etching is used, the page forms a photoresist pattern on the conductive plating 3〇3 formed on the ink inflow surface side of the nozzle type flat plate. As described above, in order to apply to a nozzle type flat plate of an electrostatic attraction type fluid discharge device that reduces the visibility or diameter of the discharged ink portion, since it is a nozzle hole having a nozzle hole of 10 Mm or less, in order to improve the processing accuracy of the nozzle hole 拴A nozzle type base material of about 5 inches must be used. However, the thinness of the nozzle type flat plate is low, and when the photoresist pattern is formed, it is easily deformed in the processing of the mouthpiece type plate, and the high precision image cannot be formed. The method of the above 2 is also the same, because the nozzle type plate itself Thin, even before the formation of the conductive plating 3〇3, there is a problem that the nozzle type flat plate is deformed', and a photoresist pattern with good precision cannot be formed, and good channel separation cannot be performed. 95731.doc -18 - 1255232 In addition, the method of the Japanese Laid-Open Patent Publication No. JP-A-110, 171, 753 (publication date, June 3, 1998) Shuttle small 10 μηι shou, insufficient supply of electroplating solution, also in the guide bar # & & Shi Shi bird hole stable formation: two problems are difficult. At this point, the most insufficient supply of electricity money is like this: ;:. As also mentioned above, the electrode must be as close as possible to the front end of the nozzle, and the thermal method stably forms the electrode at the front end of the most important nozzle. The smaller the r, p, and t nozzle diameters, the more the trace fluid can be discharged. Although the image is not resolved, the formation of the electrode is unstable. Therefore, the long, s, # front protection but 4 + h u direction, the nozzle of each transport month J and the internal resistance R change, change, H & straw response frequency of each channel night cut amount. That is, the quality of the printed image is significantly reduced. In addition, it is equivalent to the rim control substrate 411 disclosed in the Japanese Laid-Open Patent Publication No. Hei No. Hei No. Hei No. 11-42784 (opening date: February 16, 1999). The control electrode is formed on the opposite side, so that the position of the electrode to the meniscus can be set with a very high degree of precision. Therefore, there is no structure in the Japanese Laid-Open Patent Publication No. Hei No. 7 (Publication Date: 6 (4) (1998).) The discharge stability between the channels is high, and the electrical separation from the adjacent channels is sufficient. However, as shown in FIG. 28, Japanese Laid-Open Patent Publication No. Hei-Ping (1) Tsin 4 (Publication Date: February 16, 1999) < Structure is on the opposite side of the insulation control: the substrate 4U and the recording medium 421, At the same time, a voltage is applied from the voltage application means to the control electrode 4, and the wiring 405 is used. At this time, an electric field is generated from the lead wiring 405. In particular, the bent portion 405a of the wire is easy to generate a concentrated electric field. For example, when searching for electric parts, 95731.doc -19- 1255232, etc., it is very likely that the electronic parts are damaged by the electric field. SUMMARY OF THE INVENTION An object of the present invention is to provide a nozzle type flat plate and a method of manufacturing the same The flat plate can be applied to an electrostatic attraction type fluid discharge device that discharges a very small amount of fluid, and can stably form an electrode near the front end portion of the nozzle, and can also easily electrically separate a plurality of nozzle holes, and can be fluid from the nozzle plate. The supply side applies a drive signal to the electrode formed in the nozzle hole portion. To achieve the above object, the nozzle type plate of the present invention is provided in an electrostatic suction type fluid discharge device. The fluid discharge hole from the tip end of the nozzle discharges the fluid charged by the application of voltage by electrostatic attraction, and has a plurality of sprays: the hole portion is configured to have a thin layer of the first nozzle layer, which has the following: a nozzle hole disposed on the fluid discharge side and having at least one layer of a second nozzle layer laminated on the fluid supply side of the first nozzle layer, thicker than the above-mentioned scorpion layer, and the first nozzle The holes are connected, and the first nozzle hole of the disk constitutes a second spray of the nozzle hole portion, and the first electrode layer of the inner wall of the die-shaped hole is formed and formed on the second nozzle. The second electrode layer of the inner wall of the hole. According to the above configuration, the nozzle type flat plate is laminated on at least the second nozzle layer of the layer-nozzle reed of the thin layer, so that the second: the strength and rigidity of the nozzle type plate itself , ^ ', Ya can make the thickness of a nozzle layer very thin. I! is made thin by the thickness of the layer formed on the first nozzle layer: the hole can form an aperture of, for example, 10 _ or less ultrafine, and Can be two" fine first nozzle hole inner wall, Layer ~ Super a ^ 〇 疋 将 将 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第 第The electrode is filmed to the vicinity of the fluid discharge hole. As a result, the recording medium can be drawn at a high speed by lowering the internal resistance R of the nozzle and increasing the discharge frequency of the fluid. Moreover, the first electrode layer thus formed is electrically connected to the second electrode layer formed in the second nozzle hole communicating with the first nozzle hole, and therefore can be supplied from the fluid supply side of the nozzle plate via the first electrode layer. Drive signal. Therefore, the supply of the driving signal to the first electrode layer is not close to the medium. The recording medium does not suffer from the electric field generated by the self-extracting wiring.

damage.

In order to achieve the purpose of winter description, the method for manufacturing a nozzle type flat plate according to the present invention is as follows: a step of: forming a sacrificial layer on the substrate; and a first sprayed purple layer on the sacrificial layer, forming a plurality of layers on the first nozzle layer a nozzle hole; ^ on the first nozzle layer 'including the inner wall surface of each of the first nozzle holes, forming the book surface layer to remain in the inner wall of each of the first nozzle holes and the periphery of each of the first nozzles I Processing the first electrode layer; the first nozzle shoulder further includes a remaining portion of each of the first electrode layers to form a second nozzle layer; and the plurality of second nozzle holes are respectively formed on the first layer The opening portion π of the fluid discharge side of the second nozzle hole is formed in a manner of remaining on the first nozzle layer: the electrode layer portion; on the second nozzle layer, the package: the second brother-bean mouth The inner wall surface forms a second electrode layer; and the second electrode layer is reinforced by electrically separating between adjacent nozzle holes. + Thereby, on the substrate of the rigid horse, the nozzle layer, the first electrode layer, the second nozzle layer, and the second electrode layer are sequentially stacked via the sacrificial layer. Therefore, after the photoresist pattern is formed by the lithography technique, it can be processed into a shape of 95731.doc -21 · 1255232 by dry (four), so that the nozzle hole, the second nozzle hole, and the second nozzle hole can be formed with very high shape accuracy. An electrode layer and a second electrode layer. In addition, since the fluid discharge surface of the nozzle type plate is protected by the sacrificial layer to the most (four) section of the step n, there is a risk in the nozzle type flat plate process. (4) The discharge hole is damaged and the fluid discharge hole is deformed. Because of the improved manufacturing yield of the nozzle type flat plate. Additional objects of the invention will be fully appreciated. In addition, the middle can be understood. (10) The following is a description of the advantages of the present invention from the following description with reference to the accompanying drawings. [Embodiment] Hereinafter, the present invention will be further described in detail by way of examples and comparative examples, but the present invention can more reliably form a voltage. Low voltage. Hereinafter, the present invention will be described in more detail by way of examples and comparative examples, but the invention is not limited thereto. [Prerequisite Technology] An electrostatic attraction type fluid discharge device belonging to the premise structure of the present invention to which the nozzle type flat plate of the present invention is applied will be described with reference to Figs. The electrostatic attraction type fluid discharge device having the structure of the present invention has a nozzle diameter of 0·01 to 25 μm and can be discharged by a driving fluid of 1000 V or less. In the fluid discharge model of the first step, the nozzle pressure is reduced by the nozzle diameter reduction. Therefore, the nozzle diameter of 50 to 70 μηι or less cannot be 1 若 unless other measures such as back pressure are applied to the discharged ink. The driving power I below 〇V discharges the ink. However, it has been explored that it is below a certain nozzle diameter, causing a discharge phenomenon similar to the previous 9573l.doc -22- 1255232 fluid discharge model. The present invention is based on new insights into this fluid discharge model. 〃First, explain the new fluid discharge model. In the nozzle of the diameter d (hereinafter, the description of the towel, which is not previously described, refers to the inner diameter of the nozzle hole), the guide material is injected into the nozzle, six, , , , , , , , , , , , , , , , , , , , , , , , , , , At a height from the infinite plate conductor h. In Figure 1, the house §1 (2), and the member does not have such a shape. At this time, the charge Q excited by the nozzle tip nozzle is assumed to be μ by μ #丄+ &, W疋 concentrated on the fluid from the front end of the nozzle. The hemisphere is formed and is similarly represented by the following formula: Q = 2 7Γ ε 〇a V〇d · (8) where Q is the charge excited by the front end of the nozzle (c), ε 〇: hollow dielectric Constant (F/m)' d··The diameter of the nozzle (10), Vq: the total voltage applied to the nozzle. In addition, α depends on the proportional constant of the shape of the nozzle, etc., and takes the approximate value 'especially d«h( h: the nozzle (correctly referred to as the nozzle hole) _ the distance between the substrates (m) is approximately 1. In addition, when the substrate is used as the substrate, the substrate is opposed to the nozzle, and the charge Q is induced at a symmetrical position in the substrate. The mirror charge Q' of the opposite polarity. When the substrate is an insulator, the image charge q of the reverse polarity of the charge Q is induced in the same manner as the symmetrical position determined by the dielectric constant. The concentrated electric field strength Eloc of the sneeze , assuming that the radius of curvature of the front end portion is R, then (9) where k is determined by the nozzle shape Proportionality constant, etc., and takes a value of about 1.5~8 5 'is typically about 5 (P.J · Birdseye and D.A. Smith, Surface

Science, 23 (1970), Ρ 198-210). In addition, here is a simplified model of the fluid row 95731.doc -23- 1255232, assuming R = d/2. This corresponds to a state in which the fluid is raised by the surface tension at the tip end portion of the nozzle to have the same curvature as the nozzle diameter d. * Hemispherical Consider the balance of the pressure of the fluid acting on the front end of the nozzle. When the first pressure pe is 8 at the front end of the nozzle, it is the first static electricity.

Pe

SE __ loc loc (10) According to the formula (8) ~ (10), when the pressure pe is α = 1, ^ .4, Λ 2F0.8 ^ 幻 表 表 d d ... (11) In addition, the front end of the nozzle Fluid #一(12)

. The pressure of the surface tension of the heart is d d where r: surface tension. The surface tension is increased by the electrostatic force caused by the electrostatic force, so the relationship between the electrostatic pressure h and the surface tension force Ps is

Pe>P, (13)

Figure 2 shows the pressure of the surface tension of a certain diameter d ^ < the pressure of the surface tension of the shellfish PSJ static pressure pe. Shanghai w + Shi

— The surface tension of the ',,, L body is assumed to be water (, -72 mN/m). When the private pressure is 700 V, the pressure of static electricity p _ & the pressure Ps of the surface tension of the knife edge is displayed when the nozzle pressure is 25 μχ. £ This finds the relationship between V〇 and d, and supplies the lowest voltage for discharge to F〇>]l^ (14). In addition, the discharge pressure Δ P at this time is Δ P = pe - ps ... (15) 95731.doc -24 - 1255232 Therefore ΔΡ : 8ε〇ν〇2 4 / kd2 d (16) For a nozzle of a diameter d The correlation between the discharge intensity and the discharge dust force ΔΡ by the local electric field strength is shown in Fig. 3. In addition, the correlation between the disc discharge and the lowest output of the discharge is shown in Fig. 4: It can be seen that the upper limit of the nozzle diameter when the local electric field strength satisfies the discharge condition (assuming L = 700 V, r = 72 mN/g) is the factory claw. - The calculation in Fig. 4 assumes that the fluid is water (r = 72 cul / m) and organic solvent (20, N / m) apos assuming k = 5. From this figure, we can see that the effect of the micro-nozzle is as follows: %E is the critical electric power, and Ve is reduced with the diameter of the nozzle. When the flow of water is known, when the nozzle diameter is 25, the critical electric power is discharged (4). 700 V. The electric field of the previous discharge model considers the side + # 々I丨里V, the private pressure V〇 of the hunting and the nozzle _ the distance between the opposite electrodes, the distance between the electrodes is defined by the small electric field, and the driving force required for discharging The voltage is increased. If a new discharge model using the above partial electric field is used, focusing on the local h% intensity, the driving force can be reduced by the fine nozzle, and the driving voltage is reduced in the device. The high density α of the nozzle and the nozzle are advantageous. Of course, by lowering the driving voltage, it is also possible to use a cost-effective low-voltage driving driver. The output of the electric field required for the discharge depends on the mouth and the city. The medium is included in the % strength, so there is no need to have a counter electrode. That is, the discharge type is applied between the nozzle and the substrate. Therefore, for the insulator π > P , the shoulder is disposed on the opposite side of the nozzle. Or the base 95731.doc -25 - 1255232 board is $ y into electric. When the opposite electrode is arranged, that is, when the substrate is an insulator, the thickness of the substrate that can be used is limited. Conversely, the discharge model of the present invention does not need to be For the counter electrode, the printing can be performed even for an insulating substrate or the like, and the elasticity of the device structure is increased. Further, printing can be performed even for a thick insulator. Further, Fig. 5 shows the magnitude of the mirror force acting on the substrate and the distance from the substrate. The relationship between the distance h. As can be seen from the figure, the closer the distance between the substrate and the nozzle is, the more pronounced the image power is, and it is particularly remarkable when h is 20 μπι or less. It is considered to be a precise control of the discharge flow. When the flow rate of the flow path is viscous, it is expressed by the following Hagen-p〇iseuille formula. At this time, a cylindrical nozzle is assumed, and the flow rate q of the fluid flowing into the nozzle is expressed by the following formula:

Q dl (17) where θ ·· fluid viscosity coefficient (Pa· s), L: flow path, ie the length of the nozzle (m), d: flow path, ie the diameter of the nozzle hole (m), Δ p : Pressure difference (Pa). It can be seen from the above formula that since the flow rate Q is proportional to the power of the flow path radius, a fine nozzle can be used to limit the flow rate. Substituting the discharge pressure Δ P obtained by the formula (16) into the formula (丨7) to obtain the following information:

Q (18) 47ld3i^^2 ^ -r

This formula shows the amount of fluid flowing out of the nozzle when the voltage v is applied to the nozzle of diameter d and length L. Figure 6 shows this state. The calculation uses L = 10 mm, n (mPa·s), and r = 72 (mN/m). At this time, the diameter of the nozzle is assumed to be the minimum value of the prior art 5 〇 μηι. The voltage V 95731.doc -26- 1255232 is gradually applied, and the discharge starts when the voltage is v=1000 v. This voltage corresponds to the discharge voltage at the beginning of the description in Fig. 4. At this time, the flow rate from the nozzle is displayed on the y-axis. At the beginning of the discharge voltage VC, the flow rate increases rapidly. In the calculation of the model, precise control is performed by making the voltage slightly higher than Vc, ... 彳 彳 彳 彳 彳 彳 ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ 半 半 半 半 半 半 半 半 半 半 半 半 半 半 半微小m3/s or less. In addition, when using a nozzle in a straight boring, as shown in the formula (1 4), the minimum driving pressure is determined. Therefore, as in the prior art, if a diameter of 50 or more is used, The nozzle is defensive, and it is difficult to achieve a small discharge amount below 1〇-i〇m3/s and a drive voltage below 1〇〇〇V. It can be seen from the figure that a nozzle with a diameter of 25 Mm only needs a drive voltage of 700 V or less. The direct control is 1〇μηΐ2 nozzle, and can be controlled below 5〇〇v. In addition, the nozzle having a diameter of 1 μηη only needs to be 3〇〇ν or less. As described above, the electrostatic attraction type fluid discharge device of the present embodiment; Based on the new discharge model based on the local electric field strength, it can be discharged by a small nozzle with a diameter of 1 to 25, and can be discharged with a drive of 1 〇〇〇 ν or less. Fluid discharge control. In addition, according to the above model As a result, when the nozzle has a diameter of 25 μ❿, the pressure is driven by 700 V or less; when the nozzle has a diameter of 1 〇 or less, when the nozzle is less than V, the nozzle having a diameter of 1 Mm or less is 3 〇. The discharge voltage can be controlled by the driving voltage below 〇V. The electrostatic attraction type fluid discharge device of the Benbe is as follows, but at the same time, but 1 b purple and the driving voltage, but at this time and the previous electrostatic attraction Compared with the type of fluid discharge device, the following situation is remarkable. 95731.doc -27- 1255232 'When the above electrostatic attraction type fluid discharge device is used, the discharge on the special mountain depends on the drive electrode from the inside of the fluid discharge head to the nozzle front end. : The resistance value in the discharge fluid flow path, the lower the 纟 resistance value, the higher the discharge reverse: the higher the performance. That is, by lowering the resistance value in the discharge fluid flow path, the south drive frequency can be discharged higher. The discharge of the resistor (4) expands the choice of the fluid material to be discharged.

1. “The above resistance value can shorten the distance before the drive electrode and the nozzle. U

[First Embodiment] An embodiment of the present invention will be described below with reference to Figs. 7 to 12 . (Nozzle type flat plate) Fig. 7 (4) is a partial perspective view of the nozzle type flat plate 8 of the present embodiment, and Fig. 7 (b) is a line cross-sectional view of Fig. 7 (4). Two or more fluid discharge holes 9' are formed in the nozzle plate 8, and two fluid discharge holes 9 are shown in Fig. 7 (4). Further, Fig. 7(c) is a perspective view of a portion of the nozzle plate 8 viewed from the fluid supply side as shown in Figs. 7(4) to (4), and the nozzle plate 8 is wounded: the first electrode of the first nozzle layer and the first beak layer 2 The layer 25, the second electrode layer 26, and the nozzle hole (nozzle hole portion) 11. The surface on the fluid discharge side of the mouthpiece layer 1 constitutes the fluid of the nozzle plate 8 (4) and forms the liquid repellent layer 4, and the second nozzle layer 2 is disposed on the fluid supply side on the opposite side. At this time, the first nozzle layer Ud forms a very thin thickness of ... to 8 _, and the second nozzle layer 2 of the layer thickness ensures the strength and rigidity of the nozzle plate 8. In this case, the second nozzle layer for ensuring strength and rigidity is one layer of 95731.doc -28- 1255232, but it may be two or more layers. The nozzle hole 11 is constituted by a first nozzle hole 丨丨a penetrating the first nozzle layer , and a second nozzle hole 11b penetrating the second nozzle layer 2 of the second nozzle layer. At this time, the wall surface of the first nozzle hole i丄a is substantially perpendicular to the fluid discharge surface 8a of the nozzle plate 8, and the substantially circular opening of the fluid discharge surface 8a of the liquid repellent layer 4 is formed as a fluid discharge. Hole 9. Further, the second nozzle hole i lb is formed in a taper shape (cone shape) in which the opening portion on the side communicating with the first nozzle hole 1 la of the cylindrical shape is fan-shaped, and passes through the second nozzle layer 2, and The fluid supply surface 8b on the opposite side of the nozzle layer is open. The substantially circular opening portion of the second nozzle hole 丨1b of the fluid supply % surface 8b formed on the surface of the second nozzle layer 2 serves as the fluid supply hole 12. A first electrode layer 25 is formed on the periphery of the inner wall of the first nozzle hole 11a and the communication hole (communication portion) 连通1χ where the first nozzle hole 11a and the second nozzle hole 11b communicate with each other. The first electrode layer 25 includes a cylindrical portion 25a and an extending portion 25b. The cylindrical portion 25a is formed on substantially the entire inner wall of the nozzle hole Ha. The extending portion 25b has a ring shape in which the communication hole 11A is substantially the center around the communication hole 11X through which the first nozzle hole Ua and the second nozzle hole m communicate. The extending portion 25b is formed with a second nozzle hole nb in the shape of a truncated cone. That is, when the mouth of the first nozzle hole 11a and the second nozzle hole 11b is substantially di, the di is smaller than the bottom of the second nozzle hole iib (the opening of the fluid discharge side) lly Caliber D2. The outer diameter D3 of the extending portion 25b of the first electrode layer 25 forming the annular shape is larger than the diameter D2. In addition, a second electrode hole: Hb inner wall is formed with the first electrode layer 25 黾 (the first electrode layer 26 is connected. One part of the second electrode layer 26 is also provided with 95731.doc 1255232 placed on the nozzle plate 8 The fluid supply surface rib is partially formed as shown in Fig. 7 (4) and connected to the discharge signal voltage applying means (not shown). In addition, Fig. 7 (a) and Fig. 7 constitute a nozzle hole In the first electrode layer 25 and the second (c), in order to simplify the drawing, the inner wall-electrode layer 26 of each of the nozzle hole 1 la and the second nozzle hole 丨 lb is omitted. Specific examples of the material, but the present invention is not limited to the specific examples. The first nozzle layer 1 is a polyimide film having a thickness of about 1 μm, and the second nozzle layer is made of a polyimide film having a thickness and a spoon. The first electrode layer has a thickness of 〇·5 μm and contains a metal material mainly composed of titanium, wherein the cylindrical portion 25a is formed to the fluid discharge side end portion of the inner wall of the first nozzle hole Ua. The outer diameter D3 is about 20 gm. It is formed on the first nozzle layer i and the first When the electrode layer or the like at the interface of the nozzle layer 2 is formed over the entire interface, warpage may occur due to the stress of the entire nozzle plate. However, such an extension portion 25b is partially disposed in each nozzle hole U, thereby reducing this. In addition, the second electrode layer 26 has a thickness of 〇·5 Mm, and similarly includes a metal containing titanium as a main component, and the second electrode layer 26 is connected to the first electrode layer by a portion 26b. As shown in FIG. 8, the surface is in contact with the extension portion 25b of the first electrode layer to ensure the connection reliability of the height. The aperture of the first nozzle hole 11a which becomes the opening portion of the fluid discharge hole 9 is about 3 μιη, since the first electrode layer 厚度 having a thickness of 〇·5 is formed therein, the actual diameter (diameter) of the fluid discharge hole 9 is about 2/xm. Further, the second nozzle 95731.doc -30- 1255232 hole lib The diameter D2 of the upper bottom lly is 10 /mi', and the diameter of the opening of the fluid supply hole 12 is 30 μηι. In the nozzle type flat plate 8 of the present configuration, a fine point is formed in order to discharge an ultra-micro fluid, and the fluid is required to be made. The discharge hole 9 is __ or less, more preferably (four) _ By forming such a pore size (diameter), it is possible to reduce the electric field required to form a wide range, which can greatly reduce the voltage required to move the charge, that is, the voltage required to charge the fluid to electrostatically attract the fluid. Therefore, since it is not necessary to require a high voltage of 2000 V as before, it is possible to improve the safety when using the fluid ejection device. In particular, when the shape is 8/m or less, the electric field intensity distribution is concentrated on the fluid discharge hole. The change in the distance from the opposite electrode to the fluid protruding hole of the nozzle does not affect the electric field intensity distribution. Therefore, it is not affected by the positional accuracy of the opposite electrode, the material property deviation of the recorded media, and the thickness deviation. The fluid can be discharged steadily. Further, as described above, a strong electric field can be formed in a narrow region by concentrating the electric field intensity distribution in the vicinity of the discharge surface of the fluid discharge hole 9, so that the amount of fluid that can be discharged can be formed into an extremely small amount. Thereby, the printed image can form a high resolution when the fluid is ink. Further, the liquid repellent layer 4 on the first layer of the mouthpiece is formed by a thickness of about ruined polymer or material or a polymer film. The liquid-repellent layer 4 is as described later, and is removed from the excess area in the fluid discharge hole 9 by the dry etching. The % of the liquid-repellent layer is a nozzle-type fluid discharge hole which has a great influence on the spray accuracy. The shape I of 9 is determined by the addition t degree of the polyimine film of the above > Therefore, the processing accuracy of the fluid discharge hole 9 is very high, and the spray precision of 95731.doc 1255232 is ensured. In addition, in order to improve the processing precision of the fluid discharge hole 9, the processing accuracy is improved when the first nozzle layer 1 exposed to the fluid discharge surface of the nozzle plate 8 is reduced to a greater thickness. . At this time, by reducing the film thickness of the first smear layer, the rigidity of the first nozzle layer 1 is lowered, and the structure of the fluid discharge hole 9 is reduced and the sinfulness is reduced, but by the first nozzle layer. 1 Contact Μ I directly aligns the two nozzle layers 2 to reinforce the first nozzle layer 丨, so that the reliability of the first nozzle layer 1 is not lowered, and the shape accuracy of the fluid discharge hole 9 can be improved. Also, when the nozzle type flat plate 8 having the fine fluid discharge holes 9 is formed, such a configuration is required. Further, since the first electrode layer 25 is partially provided at each of the formation positions of the nozzle holes, it is electrically insulated from the first electrode layer disposed adjacent to the nozzle holes. Therefore, the discharge signal can be separately applied to each channel, and 9 strings: (Crosstalk) are small, whereby the resolution of the drawn image can be improved. In addition, since the second nozzle hole 11b has a taper shape, turbulent flow of the fluid is less likely to occur inside the second nozzle hole lib, and the fluid discharge property can be improved 'and 'because the inner wall of the nozzle hole Ub and the edge of the fluid supply surface The width is widened, so that the disconnection of the second electrode layer % extending to the fluid supply level can be effectively suppressed. Further, by the liquid repellent layer 4 formed on the fluid discharge surface 2 of the nozzle plate 8, the fluid can be prevented from adhering to the vicinity of the fluid discharge hole 9. Further, the material used for the first electrode layer 25 is not limited to a metal material mainly composed of titanium. As long as the etching of the liquid-repellent layer 4 of the sacrificial layer 5 and the fluid discharge hole 9 which is described in the second nozzle layer 2 and stepped over the sacrificial layer 5 and the fluid discharge hole 9 described later is high-resistance material, That is to say, the material with high polarity for the gas (oxygen 95731.doc -32- 1255232 and the fluorine-containing electric power) can be used. = (4) agent (iron, water, iron, water, surface, know; body and s' such as Qin, Ming, steel, wrong, metal materials with the main components of the above two or two sharp, Similarly, ; =: the combination of paste to choose. The material to be into the strict layer 26 is not limited to the metal material with titanium as the main tool. As long as it is based on step-type seedling-based and fluid discharge The material of the liquid repellent layer 4 in the hole 9 ^ sacrificial layer 5 material, ' + W Hep insect engraved with high resistance to seven e / ^ P on the etching gas (oxygenated plasma and fluorine-containing gong 箄) Or the money-engraving agent (Nitrate, Nitrogen, Water, and Water), and the material with high resistance. Specifically, s, titanium, Ming, copper, Ming, iron, recorded, full, Qin 7 tungsten, sharp and other metal materials as the main component, a combination of decoration, group, or etchant. The material of the above-mentioned etching gas which can be used in the nozzle layer 1 is not limited to the polyacrylonitrile. Also... "The high-molecular organic materials other than the imine may also be: the chemical compound of the dog compound, or the material of the second layer / for the mouth layer 2 is not limited to the poly-SI, but also The polymer organic material other than the brewed imine may be an emulsified stone or a nitrogen-cut compound material, or may be a stone eve. 乂: ': The second nozzle hole m of the present embodiment is not limited to The shape of the truncated cone which is narrowed in the communication portion with the first hole 1U (the nozzle plate 8 shown by the taper angle, the second nozzle hole Ub, and the inner wall of the second nozzle plate 8' And the fluid supply surface 8 b is perpendicular to the shape of the Straight (cylindrical shape). At this time, the second nozzle hole 11b, the fluid supply hole can be called... (4) 95731.doc -33- 1255232 12 2 nozzle mouth 111? The fluid supply hole is smaller than the shape of the truncated cone. The step is to increase the total volume of the nozzle. In this case, as shown in Fig. 7 (8), when the flat panel 8 is used, it is manufactured. In the case where the second electrode layer 26 has one side surface of the inner wall of the second nozzle hole 11b, as shown in FIG. 9, it may be formed in the second nozzle hole U. The entire inner wall surface of b. The nozzle type flat plate 8 (8) which is constructed in this embodiment can function as the following 1 to 5. 1 The fluid discharge hole 9 is a continuous nozzle type plate 8 having a diameter of 8 or less. (8), it is still possible to form a structurally stable zero electrode which can be applied to the front end of the nozzle hole 11 by applying a discharge signal. 2 On the fluid supply side of the second nozzle layer 2, by separating the second electrode layer 26, Turning on the inter-electrode short-circuit ' can easily apply a separate L-string 9 to each channel, thereby improving the resolution of the rendered image. 3 Since the nozzle layer can be maintained by the second nozzle layer 2, Rigidity, so the rigidity of the entire nozzle plate 8 (8,) is improved, and it is easy to handle. 4 The accuracy of the second nozzle hole m processed on the second nozzle layer 2 having a thick film thickness is even worse 'because of the second When the nozzle hole is processed, the remaining portion 25b of the first electrode layer 25 is stopped, so that the fluid discharge hole 9 for controlling the discharge amount of the fluid is not affected. 5 Since the first electrode layer 25 is formed in the first nozzle hole The second electrode layer 2 of the second nozzle hole m connected by Ua Since the electrical connection is made, the drive signal is supplied from the fluid supply side of the nozzle plate 8 via the second electrode layer 26, and the recording medium is not caused by the electric field generated by the supply of the lead wires for driving the k to the first electrode layer 25. 95731 .doc -34- 1255232 (Manufacturing method of nozzle type flat plate) Next, a method of manufacturing the nozzle type flat plate 8 of the present embodiment will be described. Fig. 10 (a) to (i) are nozzle type flat plates. Description of the 8 process. First, a sacrificial layer 5 is formed on a substrate 6 for temporary holding of any thickness such as tantalum and glass by using a wet electric ore (electric ore) of nickel. On the layer 5, a polyimide resin was applied by spin coating, and fired at 350 ° C for 2 hours to form a first nozzle layer. At this time, the thickness of the sacrificial layer ^ is ΙΟμιη, and the thickness of the first nozzle layer i is 丨^^. Next, in the first nozzle layer, the opening pattern of the first nozzle hole is formed by photoresist, and the first nozzle hole 11a is processed by using a dry pattern of a gas containing oxygen as a main component (refer to FIG. The method of engraving can enhance the organic matter of the polyimide resin and the like with high speed and precision, and has high selectivity to the nickel of the sacrificial layer 5 (recording is almost not etched). Therefore, the sacrificial layer 5 It is not subject to significant damage due to the above processing, and the flatness of the surface of the sacrificial layer 5 is maintained, so that the flatness of the fluid discharge surface of the bay-depleted flat plate 8 formed on the surface of the sacrificial layer is not deteriorated. The high precision is carried out 'Therefore, the anisotropic high engraving conditions are used. In addition, as described above, since the first nozzle layer is extremely thin, the first one for processing ultra-micro fluid can be processed with high precision. Nozzle hole 11 a. '2. On the first nozzle layer 1 for processing the first mouth hole U a , the first electrode layer 25 of the metal material which is sputtered as the main component of the package 31 is as follows. Formed on the first electrode layer 25 The first resist layer 27 is formed in the shape of the opening of the nozzle hole (refer to the figure). At this time, since the first electrode layer 95731.doc - 35 - 1255232 25 needs to be formed on the inner wall of the first nozzle hole Ua, in order to improve The step coverage of the first electrode layer 25 is such that the film thickness on the first nozzle layer 1 is 〇·5 μηι under the argon gas pressure of 3 〇mT 〇 rr 2 . Next, a gas containing argon as a main component is used. Dry etching of the plasma, the first electrode layer 25 is processed to have a substantially circular shape having a diameter of about 2 Å which is the extension portion 25b on the first nozzle layer!, and the photoresist is removed (refer to FIG. 10(c)). The processing step is for suppressing damage of the first electrode layer 25 (the cylindrical portion 25a) formed on the inner wall of the first nozzle hole, and removing the sacrificial layer 5 formed on the bottom of the first nozzle hole 11a. The first electrode layer 25 is an etching condition of anisotropic g. Further, the extension portion 25b partially remaining on the first nozzle layer , is formed into a substantially circular shape at this time, but is not required in the processing step. Is a substantially circular shape, as described later, as long as it is a second spray The upper surface of the aperture lb is disposed in the shape of the extension portion 25b formed on the first nozzle layer 延伸 from the first nozzle hole Ua. However, the nozzle type is applied to the electrostatic attraction type. Since the slap type plate 8 of the fluid discharge device applies the discharge number to the tip end portion of the nozzle via the first electrode layer 25, the electric field is concentrated on the first electrode layer 2 $ except the nozzle tip end portion. The end portion of the shape on the nozzle layer 1. Therefore, in order to homogenize the electric field concentrated at the end portion of the extending portion 25b on the first nozzle layer 1, the shape of the extending portion 25b has to be processed into a circle close to the isotropic height. Secondly, the second nozzle layer 2 is formed on the first nozzle layer i and the first electrode layer 25 by a thickness of 2 〇 μχ (see Fig. i (d)). The second nozzle layer 2 is coated with a coating type of polyamidene in the same manner as the sound layer 1 by the spin coating method in the same manner as the ninth layer of the ninth layer. In the hour, a thickness of 2 〇 is formed. At this time, the first mouth hole Ua is also buried by the polyimine (four), and the second nozzle layer is formed by the purpose of reinforcing the film thickness of the south-precision processed film-nozzle layer, having The effect of increasing the rigidity of the entire nozzle plate 8 is obtained. 7 2 times, on the second nozzle layer 2, a photoresist pattern is formed by etching: a dry etching using a gas containing oxygen as a main component And the second nozzle hole forming the shape of the truncated cone on the layer of the mouthpiece is called Yuan Zhaotu.) In addition, the above dry stencil can be formed on the extension 25a (25b) of the electric (four) 25 which is formed above the first nozzle. (d), due to the dry etching using a gas containing oxygen as a main component, the first nozzle + the Bama layer 1 formed by the Meng material which is not mainly made of titanium as a main component is thus in the first electrode layer 25 : The part of the 'dry type of money is no longer going on, but can be easily removed before: one step is buried first The second nozzle layer 2 of the mouth hole mountain. In addition, the processing of the above-mentioned brother one mouth hole lib, force disk flute + ^ at the joint portion with the nozzle layer 1, the second 1 hole 11 b upper bottom 11 v [Si An J, the bottom Uy is patterned to be disposed in the extension portion 25b of the first electrode layer 25. The day ~, the Kaidi, the mouth of the mouth of the nozzle 11 b is a sharp shape, and the above etching is adopted. The engraving rate of the light wood 28 is substantially equal to the etching rate of the polyimine resin of the second nozzle 卞λ berlin layer 2, and the glazing 28 is post-baked at 150 C for 60 knives. The photoresist pattern 28 is used as a taper angle, and the π ^ month Φ-like straw is transferred by etching to the second nozzle layer 2. # 即 ' Π Π Π Π a 」 」 」 」 」 」 」 」 」 」 」 」 」 」 」 」 The two nozzle layers of the second nozzle layer 2 are approximately equal, forming an ancient /, photoresist pattern with a taper angle j face 28a 28, 9573 l.doc - 37- 1255232 and the second nozzle layer 2 Engraved (four) speed to (four) photoresist diagram (four), the edge of the expansion of the light block 28 wood. At this time, as shown in Fig. i(8), the second nozzle layer 2 is also simultaneously (4), and as a result, on the second nozzle layer 2, as shown in Fig. H(4), the crucible is formed 2 and has a taper angle formed on the photoresist pattern 28. The wall surface 28A has the same shape of the first hole 11b. Further, at this time, since the resist pattern 28 and the second spray layer 2 are substantially equal in cost, the thickness of the photoresist pattern to be formed is thicker than the thickness of the beehive layer 2. Further, the description of the portion of the first nozzle hole Ua formed in the first nozzle layer 1 is omitted in Fig. u. Next, a metal material containing titanium as a main component is formed on the second nozzle layer 2 described above! Two electrode layer 26. In this case, ion beam sputtering is used to suppress scattering of titanium particles by argon atoms under a wind pressure of 0.2 mTon·············· A side of the inner soil surface, and a portion of the second electrode layer 26 is electrically short-circuited with the first electrode layer 25 (refer to FIG. 〇(f)). The film thickness is 〇·5. /, " 形成 By forming the second electrode layer 26 by injecting titanium particles from an oblique direction, the second electrode layer 26 can be prevented from adhering to the first nozzle hole 11a, whereby the shape of the first nozzle hole 11a can be prevented Change and blockage. a person, a photoresist pattern 29 is formed on the second electrode layer 26 to cover the second nozzle hole 11b and a portion of the second electrode layer % formed on the second nozzle layer 2 (refer to FIG. 10(g)) . The photoresist pattern 29 only needs to form a portion covering the second nozzle hole lib and the second electrode layer % formed on the second nozzle layer 2, but in the embodiment, the second nozzle layer 2 is formed. The two-electrode layer 26 has a shape that can be processed into a circular shape of approximately 5 〇 / ^ 111 diameter. At this time, since the photoresist pattern 29 is formed to be buried in the second nozzle hole ub, it is in the second nozzle hole 95731.doc -38 - 1255232

The deepest Ub (4), the thickness of the photoresist layer is very thick. Therefore, the photoresist pattern 29 must use a portion of the exposed portion as a positive photoresist of the pattern. Further, at this time, the above-described photoresist pattern 29 is used to form the lead wiring 26a on the second nozzle layer 2 using the electrode layer 26. At this time, since it is not necessary to make the lead wiring 26a' in another step, the steps can be simplified. Further, as described above, since the lead wiring % can be disposed on the opposite side of the recording medium via the nozzle type flat plate 8, the recording medium can be separated from the recording medium by a sufficient distance, and the electric field generated by the lead-out wiring can be prevented from causing severe electrical damage to the recording medium. Next, in accordance with the above-described photoresist pattern 29, the second electrode layer % is removed by using a pattern of argon gas as the main component, and the photoresist pattern 29 is removed (see Fig. 10 (8)). (4) This processing step requires the second electrode layer % to be processed into a desired shape, so that it is carried out under the condition of (4) having high anisotropy. Further, a photoresist stripping liquid is used to remove the photoresist pattern 29. Next, after removing the photoresist pattern 29, it is immersed in an aqueous solution containing nitric acid and water as a main component, and only the sacrificial layer 5 is etched, and the nozzle plate 8 is taken out from the substrate 6 (Fig. 1 (i)). As described above, since the polyimide layer forming the first nozzle layer, the second nozzle layer 2, and the titanium forming the stop layer 3 or the discharge hole layer μ are hardly etched by the etching liquid of the sacrificial layer 5, it can be avoided. The shape change and structural reliability are reduced due to the sacrifice of the sacrificial layer $. Next, a liquid repellent layer 4 (Fig. 〇 ω) is formed on the surface of the first nozzle layer 1 from which the sacrificial layer 5 is removed. At this time, the fluoropolymer is used based on the purpose of considering the convenience of coating, and is applied to the surface of the first nozzle layer 1 by a method such as stamping, and the thickness of the bismuth molecular film is 〇·〇5 μηι. Repellent layer 4. In addition, the liquid repellent layer 4 which is stepped over the first nozzle hole 11a is formed after the liquid layer 95731.doc -39-1255232 is formed, and the oxygen-containing plasma is used, from the second nozzle hole.丨11} Side dry engraving to remove it. Thereby, the degree of damage of the nozzle plate 8 can be minimized. As described above, in the present embodiment, by performing photolithography and dry I insect engraving in the processing step, the first channel can be separated on the nozzle type flat plate 8 of the electrostatic attraction type fluid discharge device that discharges the ultra-micro fluid. And the second electrode layers 25, 26 are formed with good precision in the nozzle holes. Thereby, since the discharge signals can be individually applied to the respective channels, the crosstalk is small, whereby the resolution of the rendered image can be improved. Further, since a thin first nozzle layer 可 can be formed, the gas pressure at the time of film formation of the first electrode layer 25 formed on the inner wall of the first nozzle hole Ua can be stably formed into the fluid discharge hole. 9 is near. Thereby, the resistance R supplied from the electrode to the tip end of the mouthpiece is stabilized, and the discharge characteristics between the channels are stabilized. Further, in the sacrificial layer 5 of the present embodiment, nickel is used, and the first nozzle layer and the second layer 2 are made of a polyimide resin, and the first and second electrode layers 26 are made of titanium, but are not limited thereto. In this combination. In the sacrificial layer 5 such as the coating method, in addition to nickel, it can be used according to a group of materials for the first nozzle layer 1, the second nozzle layer 2, the first electrode layer 25, and the second electrode layer. The material of Ming, copper, etc. which is soluble in nitric acid or K〇H aqueous solution is a material which can be made from oxygen plasma. In addition, the formation of sacrificial layer 5: method, in addition to electric ore, can be used according to materials Steaming method, occupational method and 汝95731.doc -40- 1255232 can be used for the etching of the sacrificial layer 5 and the etching of the second nozzle hole Ub, the material is resistant to the material. Here, the material used (sacrificial layer is shown in FIG. , the first nozzle layer, the first electrode layer, the second nozzle layer, and the second electrode layer) and the processing method (the first nozzle hole, the first electrode layer, the second nozzle hole, the second electrode layer, and the sacrificial layer are removed) A preferred combination example. As shown in Fig. 12, the first nozzle layer 第二 and the second nozzle layer 2 are not limited to a high organic material such as a polyimide resin, and may also be selected as a stone or an oxidized stone. Machine Shi Xi compound. However, in order to find the dry type of engraved oxide stone and Shi Xi, the reaction gas of fluorine is needed. Since the sound used in the present embodiment is low in patience, a material having a resistance of a surname such as gold or a turn is used as the first electrode layer or the electrode layer 26. Further, the first electrode layer 25 or the first The second electrode layer %, in addition to titanium, may also be used according to the combination shown in Fig. 12. The first electrode (four) material of titanium 'even if using four (10) Γ two body electric 襞, still It can be carried out at a faster rate - ^ 疋 疋 疋 疋 疋 疋 疋 形成 形成 形成 形成 形成 形成 钛 钛 钛 钛 钛 钛 钛 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电 电Large damage. Because of the formation of the first electrode, the first electrode sounds 2 5 is the pattern of the 电极-electrode layer 26, and the dry etching method using 虱 ions. By using the first electrode layer 25 + and the first nozzle; li? ^. The etch rate of the electrode layer 26 is an etching rate, and the chloride ion having a small difference in the rate of the day is minimized. The damage suppression of the first day 1 or the music nozzle layer 2, the polar layer 25 or the second electrode layer 26 is patterned 95731.doc -41 - 1255232. In this embodiment, the sacrificial layer $ is completely removed by etching, but the sacrificial layer 5 is not completely removed, and the sacrificial layer 5_the portion in contact with the first nozzle layer 1 is removed by etching only, and the nozzle can be taken out from the substrate 6. In addition, the liquid repellent layer 4 is not limited to a fluoropolymer, and a lanthanum-eight octahedron film and DLC (similar to diamond carbon) may be used. By using the above processing steps, the above-mentioned 1 to 5 can be produced. The nozzle type flat plate 8 of the present invention. [Second embodiment] Another embodiment of the present invention will be described below with reference to Figs. 13 to 16. Further, for convenience of explanation, it has the same configuration as that of the first embodiment. The components of the power month b are denoted by the same reference numerals, and the description thereof is omitted. (Nozzle type flat plate) Fig. 13 (a) is a partial perspective view of a nozzle type flat plate 8 of the present embodiment, and Fig. 13 (b) is a line cross-sectional view taken along line B-B of Fig. 13 (a). Two or more fluid discharge holes 9 are formed in the nozzle plate 8 and two fluid discharge holes 9 are shown in Fig. 13 (4). Further, Fig. 13 (c) is a perspective view of a portion of the nozzle plate 8 from the fluid supply side. °, the nozzle type flat plate 80 is formed in the first spray and the second nozzle hole 1 lb, and the taper angle is the first nozzle hole 11 c of the mouth layer 10 as shown in FIGS. 13( a ) to 13 ( c ). And on the fluid discharge surface 8〇a of the nozzle plate 8〇, the surface electrode layer 8 is formed to block the opening of the fluid discharge side of the first nozzle hole "c: a portion formed on the surface electrode layer 81 The through hole ... becomes the fluid discharge hole 9. Then, the surface electrode layer 81 is electrically connected to the first electrode layer 25 formed on the inner wall 95731.doc - 42 - 1255232 of the first nozzle hole, and can be self-nozzed via the first electrode layer 25 and the second electrode layer 2 6 ' A drive signal is applied to the fluid supply side of the flat plate 8 . This second inch 'second nozzle layer 20 is also used! Layer, but it can also be 2 or more layers. In addition, in FIG. 13(a) and (c), the first electrode layer 25 formed on the inner walls of the first nozzle hole Uc and the second nozzle hole 1 that constitute the nozzle hole 11 is omitted, and the first electrode layer 25 is formed. Second electrode layer 26. Specific examples of the dimensions and materials of the respective portions will be described below, but the present invention is not limited to the specific examples.

The surface electrode layer 81 is made of a metal material containing platinum as a main component, and is formed into a substantially circular shape of 5 ^ (five) diameter in order to reduce the stress of the entire nozzle. Further, the thickness of the surface electrode layer 81 is 〇.5 μηι. The first nozzle layer 1A of the present embodiment contains a dielectric material containing ruthenium oxide as a main component, and has a thickness of 2 μm. The second nozzle layer 2 〇 contains an organic material mainly composed of polyamidimide and octagonal oxime, and forms a film thickness of 20 μm. The first electrode layer 25 and the second electrode layer 26 are made of a metal material containing titanium as a main component, and a film thickness of 0.5 μm is formed.

The diameter of the fluid discharge hole 9 formed in the through hole 81a of the surface electrode layer 81 is 2 Mm, and the film surface is vertically processed to the communication portion with the first nozzle hole nc (the diameter of the communication hole Wb, the diameter of the fluid discharge hole 9) The same principle as in the first embodiment is required to be φ 10 or less, more preferably Φ 8 or less. Further, the communication portion of the first balloon hole 11 c and the fluid discharge hole 9 is also fluid: the outlet opening portion The diameter is 4 (4), and is processed into a taper shape (cone shape) in which the fan shape is expanded to a portion communicating with the second nozzle hole Ub. Further, the communication portion between the second nozzle hole 11b and the first nozzle hole Uc is also 95731.doc -43- 1255232 The fluid discharge side opening is machined to a diameter of 2〇/xm, which is a fan-shaped enlarged taper shape (conical shape), and passes through the second nozzle layer 2〇 in the nozzle type plate 8 The fluid supply surface 80b is opened. Further, the upper nozzle hole of the truncated cone shape is a circular ring shape in which the fluid discharge hole 9 is substantially centered, and a part of the surface electrode layer 81 forms the upper bottom. 1 Icy is exposed. Therefore, the fluid discharge hole 9 and the first The diameter of the communication hole Ilex (substantially circular) of the nozzle hole Ik is smaller than the diameter of the first nozzle hole Uc above the bottom llcy (in the shape of the first nozzle hole iic outside the communication hole), The top surface of the second nozzle hole 11b having a conical-stage shape is a ring shape having a first nozzle hole lie as a center, and one of the first electrode layers forms the upper bottom 11by to be exposed. Therefore, the first nozzle The diameter of the communication hole iibx (substantially circular) of the hole Uc and the second nozzle hole lib is smaller than the diameter of the bottom surface of the second nozzle hole 11^ (in the above-mentioned communication hole and the second nozzle hole nb) Further, in addition to at least a part of the inner wall of the first nozzle hole 11c, a first electrode layer 25 serving as an extending portion 25b is formed at a peripheral portion of the first nozzle hole 1lc and the second nozzle hole 丨lb. Since the oxidized stone constituting the first nozzle layer (7) is processed in the second nozzle hole 11b described later, the dry-type plasma of the oxygen-containing plasma exhibits high resistance, so that the first electrode layer is not formed as an extension portion of 2%. The first nozzle layer 1G or the first nozzle hole lle is exposed even in the second nozzle hole In the case of etching, it is hardly etched, and the shape of the first nozzle hole uc is not deformed. Conversely, when the first nozzle layer 10 is processed with the second nozzle hole Ub, the resistance is low, 95731.doc -44- Ϊ255232 material (such as In one embodiment, the first nozzle layer 10 and the second nozzle layer 20 are the same material, and the first electrode layer 25 is formed to cover all of the inner walls of the first nozzle hole Uc. That is, the first electrode layer 25 is in the first In the processing step of the two nozzle holes, the first nozzle hole Uc or the first nozzle layer 1 is protected from the function of the etched protective layer. Further, the inner wall of the second nozzle hole 丨1b is formed with the first electrode Layer 2 is connected to the second electrode layer 26. Further, a portion of the second electrode layer % is also disposed on the second nozzle layer 2 that forms the fluid supply surface 8〇b of the nozzle plate 80, and the body supply side surface is formed on the surface as shown in FIG. 13(4). The lead wires 26 & after processing the second electrode layer 26 are connected to a driving signal voltage applying means not shown. The liquid repellent layer 4 is formed of a polymer material having a fluoropolymer having a thickness of 0-05. Further, since the surface electrode layer 81 has high resistance to the first nozzle hole, the shape of the fluid discharge hole 9 is not deformed by the first nozzle hole. In addition, the shape of the fluid discharge hole 9 of the nozzle type plate which has a great influence on the spray accuracy is determined by the processing precision of the titanium film which is the surface electrode late 5 # m, so the fluid: the hole 9 is processed accurately. The degree is very high, so as to ensure a very high degree of spray precision, in order to improve the processing accuracy of the fluid discharge hole 9, while reducing the film thickness of the surface electrode layer 81, although a higher degree of accuracy can be obtained, The surface electrode layer is caused by the thickness of the surface electrode layer 81 being reduced. The rigidity of the body discharge hole 9 is reduced. The gentleman II is placed in contact with the surface electrode layer 81 to arrange the first nozzle layer 95731.doc -45 - 1255232, that is, the (four) surface electrode layer 81, which reduces the structural reliability of the surface electrode layer 81, and improves the fluid. The shape accuracy of the discharge hole 9. In addition, 'Because the first electrode sound B ▲ layer 25 for the brother: nozzle hole 111) means: south resistance, so the shape of the first nozzle hole Uc is not caused by the second nozzle hole and the large towel field 'cross shape, The sub-first nozzle layer 10 is not completely removed by the excessive processing of the second nozzle 1 b. The material used for the surface electrode layer 81 is not limited to a metal material mainly composed of platinum. As long as it is the etch of the first nozzle hole uc and the second spray 2 lib (4) and the sacrifice (10) (4) described later and the step of covering the liquid-repellent layer 4 in the & discharge hole 9: The silver inscription is highly resistant, that is, as long as it is a material resistant to fluorine-containing plasma, oxygen-containing plasma, nitric acid::milk:potassium aqueous solution, it can be processed according to sacrificial layer etching and hemp hole processing. And a combination of the second nozzle hole processing methods are used. Such as Esau, Bronze, Ming, Iron, Record, Gold, Ming, etc. as the main component to the coffin, can be selected by combining with the above-mentioned gas or narration agent. The material of the first nozzle layer 10, the second nozzle layer 20, the first electrode layer 25, and the first electrode layer 26 is not limited to the above, and a preferred combination of the material and the manufacturing method will be described later. Further, the second nozzle hole nb of the present embodiment is connected to the first nozzle hole. , the connecting hole (communication part) "!^ narrowing the shape of the truncated cone (cone shape), but the mouth is not limited to this. The nozzle type flat plate 80 of the modification shown in Fig. 14 is also a mouth. The so-called straight shape (circular shape) of the side wall of the first bird hole 1丨6 perpendicular to the stop layer 3. At this time, the fluid supply hole 12 95731.doc - 46 - 1255232 of the first nozzle hole 11b can be made smaller, and the degree of integration of the nozzle can be further improved. In addition, as shown in FIG. 14, the second electrode layer 26 may also be formed when the first "hanger" is the entire inner wall surface of the hole lib, and the reliability of the second electrode layer 26 with respect to electrical conduction is improved. One surface electrode 对应 corresponding to one of the Bama holes 1 1 is formed into one through hole 8 1 a, and it is also possible to form a plurality of through holes on one surface electrode layer 8 1 for One nozzle is a structure in which the hole 1 1 has a plurality of fluid discharge holes 9. In addition, 'the same can be the case of the nozzle type plate 8 of the first embodiment, and

The nozzle-nozzle hole 11c forms a + straight shape 侧壁 shape in which the side wall is perpendicular to the surface of the nozzle plate. At this time, since the processing precision of the first nozzle hole is doubled, the shape of the surface electrode layer 81 can be reduced, and the stress generated by the surface electric (four) 81 can be reduced. By forming the nozzle type plate zero of the structure of the present embodiment, in addition to the above items 1 to 5, the following effects can be exhibited. Since the U-shaped hole Ue forms a taper shape, the reliability of the coating property of the first electrode layer 25 formed in the first ejection hole lie is improved. Since the through hole 81a formed in the surface electrode layer 81 of the film becomes the fluid discharge hole 9', the processing accuracy is very high, and the shape of the fluid discharge hole 9 does not change due to the formation of the first electrode layer 25, so that the discharge is reliable. (Manufacturing Method of Nozzle Plate) A method for manufacturing a nozzle type plate 8 of the embodiment of the present invention. Fig. 15 (a) to (g) are explanatory views of a nozzle type flat plate 8 〇 process. 9573l.d0<-47- 1255232 f First, a sacrificial layer 5 is formed on the substrate 6 in the same manner as in the first embodiment (Fig. 15 (in this case, the thickness of the sacrificial layer 5 is further. Further, in the sacrificial layer 5G described above) The upper layer is formed by a method such as reading, and the surface electrode layer is partially formed in the nozzle hole by photolithography, and the shape of the through hole is formed into a shape of a through hole. Then, the shape of the surface electrode layer 8 1 and the fluid discharge hole 9 are simultaneously processed by a dry button engraving method. The above-mentioned dry type insect engraving system is at this time due to the reticle system and the chemically blunt material. With the use of argon __, the physical processing is processed by the dominant method. In addition, the mountain, - 7 because the processing system is ordered with very high precision 'is therefore using the high anisotropy condition. At this time, the shape of the surface cladding layer 81 is added to a substantially circular shape of 5 mm. Further, the fluid discharge hole 9 placed inside the surface electrode layer 81 is formed into a substantially circular shape of (5) diameter. 'At the sacrifice above On the surface electrode layer 81 and the surface electrode layer 81, the first nozzle layer 丨q including the oxygen cut film is formed by P_CVD ^. When the method is used, the lamp can be used for the gas composition, the gas pressure, and the plasma for film formation. The power is used to control the stress of the oxidized oxide film formed by the film, and the step portion is formed into a film (four). Therefore, the step portion of the surface electrode (10) does not cause cracks, etc., and the structural property of the film is sinful. Therefore, the reliability of the overall structurality of the nozzle type flat plate is improved (refer to FIG. 15 (&)). On the above-mentioned first nozzle layer 10, 'the light is made by light (four). Gas and oxygen reactive ion etch (RIE) processing, after processing 'by photoresist stripping (four) to photoresist (refer to Figure (10))). The cost of the square 95731.doc -48- 1255232 method, due to the plasma The activated fluorine selectivity reacts with the deuterium atom, so the etching rate of the antimony oxide is very high. Conversely, as described above, since the platinum-based chemically stable material, it hardly reacts with the activated fluorine. The speed is slow, whereby the etching can be accurately performed on the aforementioned surface The interface between the pole layer 81 and the first nozzle layer 1 is stopped. "In addition, the processing step is to set the speed of the oxidized stone eve and the photoresist to the same degree by using a plasma of fluorine-containing gas and oxygen. The ruthenium oxide is processed by the method of reflecting the shape of the photoresist used in the step of processing the second nozzle layer 2G in the first embodiment, and the first nozzle hole Uc is processed into a tapered shape. At this time, the 'first nozzle hole The shape of the joint portion of the base electrode layer 81 and the base electrode layer 81 is formed into a substantially circular shape having a diameter of four, and the opening diameter of the interface with the second nozzle layer 2 is formed into six divisions. Further, the shape of the first nozzle hole mountain is The fluid discharge hole 9 is processed to be larger than the fluid discharge hole 9, and the fluid discharge hole 9 is disposed in the pattern of the first nozzle hole. Further, since the above-mentioned first nozzle hole Uc only has to be bonded to the surface electrode layer 8

It can be 'so that in addition to the shape of the taper angle', it can also be a straight shape perpendicular to the nozzle face. Next, a titanium film is formed on the surface electrode layer by ion beam sputtering from the (4)th (4th) 1Q surface of the arrow direction. A first electrode layer 25 having a thickness is formed on a portion of the first nozzle hole He and the first nozzle layer 1A. At this time, the thickness of the first nozzle layer (4) and the first nozzle layer 1〇 must be considered to determine the direction of the human particles of the titanium particles, and the titanium film is prevented from being formed in the fluid discharge hole 9 of the surface electrode layer 81. Internal film formation. Further, in this case, the first electrode layer 25 is fixed by the substrate, and the above incident angle is not rotated, and the first nozzle layer is formed to be attached to the second nozzle hole to be described later. The first electrode layer 25 is formed entirely by the side wall of the substrate nozzle hole lie centering on the normal direction of the nozzle surface. For example, the first electrode layer 25 of the nozzle hole side wall can play the protective layer of the first nozzle hole llc during the working hours, and the _ electrode layer 25 is applied to the first shell layer 25 by using the dry etching method. 10 on the shape of the outer shape. This processing is carried out by a processing method performed when the second electrode layer 26 is processed in the first embodiment. That is, after forming a desired pattern with a positive photoresist, processing is performed by using a dry film of argon gas as a main component. At this time, the basket disposed at the interface between the first nozzle layer 1〇 and the second nozzle layer 2 is formed into a substantially circular shape having a diameter of 16 / m (see FIG. 15 (c). )). Next, a coating type polyimide resin film is formed on the first nozzle layer 10 by a thickness of 20 Å to form a second nozzle layer 20 (see Fig. 15 (4)). At this time, the above-mentioned coated type of polyimine resin was applied to the first nozzle layer 10 by a spin coating method, and was k for 2 hours. At this time, the fluid discharge hole 9 and the first nozzle "丨1 1 p +, Shangcai" are also buried by the water imine resin. Next, in the second nozzle layer, ^ ^ ^ ^ ^ ^ ^ ^ ^ is formed by photolithography to form a photoresist pattern (4), and a dry type (4) using a gas containing oxygen as a main component is performed, and on the second nozzle layer 20 The second (four) hole 1 lb of the taper shape (cone shape) is formed (refer to Fig. 15 (e)). Further, the above dry etching may be stopped as the layer 10, the electrode layer 25 or the surface electrode layer 81. That is, except for the first nozzle hole UC, the portion of the first nozzle layer 10 or the first electrode acoustic s 5 is not excessively dry etched 95731.doc -50 - 1255232. Further, the portion where the surface electrode layer 81 is exposed outside the one-outlet hole 9 is not excessively dry. That is, in the curing process of the second nozzle hole lib, the first nozzle hole llc and the fluid discharge hole 9 buried in the previous step by the polyimine grease are reproduced by removing the polyimide resin. The fluid discharge hole 9 is removed in a shape in which the second nozzle layer 2 is present in a shape determined by the pattern formed in the surface electrode layer 8], and the shape in which the previous step is buried by the polyimide resin is reproduced. Next, the photoresist pattern 7 is removed by using a photoresist stripping solution, and a two-electrode layer 26 is formed on the second nozzle layer 20 to contain a metal material containing titanium as a main component. In the case of tons, the ion beam sputtering method is used to suppress the scattering of titanium particles by argon atoms under the argon gas pressure of 〇·2 mT, and the substrate is tilted so that the granules are emitted from the direction of the arrow 2 and only formed in One side of the inner wall surface of the second nozzle layer 2, and a portion of the second electrode layer 26 is electrically formed with the first electrode layer

Short circuit (refer to Figure 15 (1)). The film thickness is 〇.5μπιβ, so that the second electrode layer 26 is opened by injecting the titanium particles from the oblique direction, so that the second electrode layer 26 can be prevented from adhering to the fluid discharge hole 9, thereby preventing the fluid discharge hole 9 from being formed. Shape: change and blockage.

-, the human spirit % of the above-mentioned electrode layer 26 is processed, this step is the same as the first type of yoke 幵, so it is omitted. The shape of the second electrode layer 26 formed on the second nozzle layer is a circular shape having a substantially radial shape. Then, the nozzle plate 80 is removed from the substrate 6 by etching only the sacrificial layer 50' in an aqueous solution containing nitric acid and water as a main component (Fig. 15(g)). As before =, the ruthenium oxide of the first nozzle layer 10 is formed, the polyimine layer of the second nozzle layer 20 is formed and the platinum forming the surface electrode layer 81, and the first electrode 95731.doc • 51 - 1255232 layer is formed. The titanium of the second electrode layer 25 and the second electrode layer 26 is hardly etched by the etching liquid of the sacrificial layer, so that the shape change and the reliability of the structural property are not deteriorated by the etching of the sacrificial layer 5〇. Next, a liquid repellent layer 4 is formed on the surface of the first nozzle layer 1 (Fig. 15 (g)). At this time, a fluoropolymer is used in consideration of the convenience of coating, and it is applied to the surface of the first nozzle layer 1 by a stamping method, and the liquid repellent layer 4 is formed of a polymer film. In addition, in the step of covering the first nozzle hole 丨 "in the liquid repellent layer, after forming the liquid repellent layer, using an oxygen-containing plasma, by dry etching from the second nozzle hole 1 lb side Therefore, the degree of damage of the nozzle type flat plate can be minimized. In the present embodiment, the step cover is removed by dry etching using an oxygen-containing plasma. However, in the present embodiment, as described above There is a surface electrode layer 81 having high resistance to dry etching using an oxygen-containing plasma on the fluid discharge surface. Since the surface electrode layer 81 determines the shape of the fluid discharge hole 9, the shape of the fluid discharge hole 9 is not caused by the above dry type. It is changed by etching. Thus, a nozzle hole of a very high precision can be formed. Specifically, each of the fluid discharge holes 9 of the nozzle type plate 8 having the two fluid discharge holes 9 formed by the procedure of the embodiment is evaluated. In the shape, the machining can be performed with very high precision with a deviation of only ± 〇. 丨 5 ❿. In addition, the nozzle plate 80 is very flat and its warpage is also below 1 〇 μηη. The sacrificial layer of the grievance 5 uses nickel, the surface electrode layer $ ^ uses platinum, the first nozzle layer 10 uses yttrium oxide, the second nozzle layer 2 醯 uses polyimide resin, and the first electrode layer 25 uses titanium, The second electrode layer 26 is made of titanium, but is not limited to the combination. 95731.doc -52- 1255232 The sacrificial layer 50 can be used in addition to the surface electrode layer η, the first nozzle layer 10, and the second nozzle. A combination of materials on the layer 20, and a material which is soluble in an aqueous solution of nitric acid or KOH, such as aluminum or copper, and a method of forming the sacrificial layer 5, in addition to electroplating, may also use an evaporation method or a splash depending on the material. Injection method, coating method, etc. The first layer 20 and the second electrode layer 26 may be damaged by etching by the sacrificial layer 5 。. However, the first nozzle layer or the surface electrode layer 8 to be described later is considered. The etching selectivity of the crucible must be an organic resin which can be etched using an oxygen-containing plasma. Further, when an organic resin having a molecular structure of a molecular chain bridging reaction is used, the heat resistance of the second nozzle layer 2 And high environmental resistance, can improve the nozzle type Further, the first nozzle layer 1 and the first electrode layer 25 may be made of a material having high etching resistance to the etching of the sacrificial layer 5 and the second nozzle hole lib. Further, the surface electrode layer 8 can be used for sacrifice. The material of the layer 5 _, the second nozzle hole ub and the first nozzle hole 11C have high etching resistance. Fig. 16 shows the materials used (sacrificial layer, surface electrode layer, first nozzle layer, second nozzle layer, A preferred combination example of the first electrode layer, the first electrode layer formation region, and the second electrode layer) and the processing method (fluid discharge hole, first nozzle hole, second nozzle hole, and sacrificial layer). The first nozzle layer 1G or the second nozzle layer 2G can constitute a nozzle layer by a combination of an organic resin such as a polyimide and an inorganic material such as a cerium oxide compound. However, if the combination of oxidized stone sulphate/oxidized sulphur stone and the combination of polydamine and polyimine is used in the second nozzle hole processing, the first nozzle layer 10 will be damaged when combined. The inner wall of the nozzle hole lle is integrally formed with a 95731.doc -53 - 1255232 first electrode layer 25 to protect the first nozzle hole iu. 2: Bu: The implementation form is to completely remove the sacrificial layer 5 by etching, without completely removing the sacrificial layer 5〇, by removing only the portion of the sacrificial layer that is in contact with the nozzle layer H) The nozzle plate 80 can be removed from the substrate 6. It is also possible to use a lanthanum high score. Further, the liquid repellency layer 4 is not limited to a fluoropolymer film and DLC (like diamond carbon). The nozzle plate 80 is used by using the above processing steps. The above-described 1 to 7 functions can be produced. Further, the structure in which the liquid repellent layer 4 is not formed can be employed as described in the respective embodiments. By not forming the liquid repellent layer 4 on the surface electrode layer 81 or the first nozzle layer, the shape accuracy of the fluid discharge hole 9 is further improved. Further, each of the above embodiments may be a so-called laminated film comprising a plurality of thin films including a surface electrode layer 81, a first electrode layer 25, a second electrode layer 26, and a metal film containing the above-mentioned material as a main component. In addition, each of the above embodiments describes a method of manufacturing a nozzle type flat plate by using a sacrificial layer 5 . 50 on the substrate 6 and etching the sacrificial layer 5. 5 ,, but otherwise The first nozzle layer 1·10 may be directly formed on a substrate such as a nickel plate or the like which may be etched in the same manner as the etching of the sacrificial layer 5.50. In addition, the present invention is not limited to the above-described various embodiments, and various modifications can be made without departing from the scope of the invention, and the embodiments obtained by separately combining the technical means of the different embodiments are also included in the technical scope of the present invention. Inside. 9573 l.doc -54- 1255232

As described above, the nozzle type flat plate of the present invention is provided in an electrostatic attraction type fluid discharge device that discharges a fluid charged by application of a voltage from a fluid discharge hole at the tip end of the nozzle by electrostatic attraction, and has a plurality of nozzle holes. a structure having: a first layer of a thin layer having a first nozzle hole, and 酉: placed in a fluid row; and at least a second nozzle layer, the system 7 is abundant a fluid supply side of a nozzle layer, thicker than the first nozzle layer: and communicating with the first nozzle hole, and having a second nozzle hole with a nozzle hole portion of the first nozzle hole; and electrically connected thereto a first electrode layer on the inner wall of the first nozzle hole and a second electrode layer formed on the inner wall of the second nozzle hole. Since the nozzle type plate of the above configuration is on the first nozzle layer of the thin layer to the second nozzle layer of the thickness layer of the stack, the strength and rigidity of the nozzle plate itself can be ensured by the second nozzle layer. The thickness of the first nozzle layer can be made sufficiently thin. By reducing the layer thickness, the first nozzle hole formed in the first nozzle layer can form a pore diameter of, for example, 1 〇/xm or less, and can be ultrafine

The first inner wall of the first bore has a first electrode 1' formed stably in the layer thickness direction. The opening of the first nozzle hole of the fluid discharge surface is used as a fluid discharge hole to form a first pole to the vicinity of the fluid discharge hole. As a result, the resistance R inside the nozzle can be greatly reduced, and the discharge frequency of the fluid can be increased, and the recording medium can be drawn at a high speed. And the first electrode layer of the second nozzle hole formed in this way is electrically connected to the second electrode layer formed on the first nozzle hole, so that the driving can be supplied from the fluid discharge side of the nozzle plate via the second electrode layer. Therefore, the lead-out wiring for supplying the driving signal to the first electrode layer does not approach the medium, and the recording medium is not caused by the lead-out wiring of the present invention. :,hurt. The first nozzle layer and the second nozzle-electrode-electrode layer are on the nozzle layer, upper...: extending from the first nozzle hole to the eighth disk, and the electrode layer is extended to the first nozzle layer The knife is electrically connected to the electrode layer of the brother. In the above configuration, since the first electrode acoustic Sun's layer is on the dice layer and the second nozzle surface, extending from the first nozzle hole to the first nozzle layer, the second electrode layer is in the extension portion and the first The electric shield is electrically connected, so the connection between the first lightning layer and the second electrode layer is not in the section of the a ^ package, but is in the surface clock of the electricity. Therefore, although the structure of each (four) electrode layer is also connected, the electrical connection reliability of each electrode layer is high, and the dangerous discharge reliability of effectively applying the driving signal to the first electrode layer due to disconnection or the like can be greatly reduced. . Further, the nozzle type step of the present invention may constitute that the first electrode layer is formed on the inner wall of the first nozzle hole.甩 Since the above structure is integrally formed with the first electrode layer on the inner wall of the first nozzle hole, a uniform electric field can be applied to the fluid in the fluid discharge hole. In the case of a structure having a plurality of fluid discharge holes on the fluid discharge surface of the mouthpiece plate, the formation positions of the fluid discharge holes in the Taylor wire are not = 峨, but the formation of the Taylor connection of each fluid discharge hole is The spray accuracy can be improved. In addition, the nozzle plate of the present invention may further comprise an interface of the first electrode layer at the interface between the first nozzle layer and the second nozzle layer, extending from the first nozzle hole to the first nozzle layer, and the second nozzle hole An opening portion on the side communicating with the first nozzle hole 95731.doc - 56 - 1255232 is provided in a portion of the first electrode layer extending to the first nozzle layer. - because the above-mentioned structure is at the interface between the first nozzle layer and the second nozzle layer, and the portion of the second electrode hole that extends to the first nozzle layer is disposed, and the second nozzle hole is disposed at the opening side of the communication side with the nozzle-nozzle hole, Therefore, when the second nozzle hole is reinforced, the extension portion of the first electrode layer functions as a stop portion, and the first nozzle hole or the first nozzle layer is prevented from being formed by the second nozzle hole. It is deformed and damaged. As described above, when the first nozzle layer outside the extended portion of the first electrode layer is formed, the 'm layer is separated from the nozzle type flat plate. By the above configuration, the nozzle type flat plate can be stably manufactured. The nozzle plate of the present invention may further comprise the first nozzle hole and the opening portion on the fluid discharge side being larger than the fluid supply side. The above structure forms a first nozzle hole and/or a second nozzle hole and has a tapered shape in which the body discharge side is enlarged, and the inner wall surface of the bellows hole is the first nozzle layer or the second nozzle layer. Each of the forms, a nozzle hole or a flute + 纟 face constitutes an obtuse angle. Thereby, when the first or first layer of the inner wall surface of the nozzle hole is formed to the surface of each nozzle layer, the risk of disconnection of the inner wall surface and the nozzle layer electrode layer is low. ^ , Heart 烕 ^ package high reliability electrode sound.卜, supply of liquid to the nozzle 曰 危 危 π 则 则 则 则 ^ ^ ^ ^ ^ ^ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ Further, the nozzle nozzle hole of the present invention and the boring plate may further comprise a surface electrode layer of the first, the nozzle hole, and the w/hole in the discharge side of the first shell hole. The discharge side opening portion, the through hole and the first nozzle hole 95731.doc - 57 - 1255232 l, and the surface electrode layer is electrically connected to the first electrode layer. In the above configuration, since the through hole provided in the surface electrode layer of the fluid discharge surface of the nozzle type plate becomes the fluid discharge &>, the surface discharge layer can be etched to process the fluid discharge hole which greatly affects the accuracy of the discharge fluid. Thereby, the fluid discharge side opening portion of the first nozzle hole constituting the first electrode layer formed on the inner wall serves as a fluid discharge hole, and the shape accuracy of the fluid discharge hole is more stable, and the money accuracy is more stabilized. y In addition, the nozzle plate of the present invention may further comprise a second electrode layer closest to the second nozzle layer on the supply side, wherein the fluid supply in the second nozzle layer is reversed, and the adjacent nozzle holes are electrically connected. Separation. In the above configuration, the second electrode layer of the second nozzle layer on the near fluid supply side of the nozzle plate having a plurality of nozzle holes is electrically separated from the adjacent nozzle holes on the fluid supply side of the second nozzle layer. Therefore, several nozzle holes can be driven independently, and high resolution can be drawn. In addition, the nozzle plate of the present invention can further form the second electrode layer of the second nozzle layer closest to the fluid supply side, and the fluid supply in the nozzle layer is opposite to that of the nozzle layer. . The surface is patterned by the surface to form the lead-out. The above structure is utilized because the first electrode layer closest to the second nozzle layer on the fluid supply side is used, and the line on the second nozzle layer can be taken as the lead-side surface. Distribution Separation of the second electrician [steps simultaneously in the process of adjoining the nozzle hole section becomes a step:: system: = and the distribution of the nozzle _ the inner wall of the nozzle hole _ * formed in the second di-electrode layer and the extraction Since the wiring system is formed by the same electrode layer and 95731.doc -58 - 1255232 is formed, the connection reliability between the second electrode layer and the lead wiring is very high. Further, the nozzle type flat plate of the present invention may further comprise a diameter of the opening of the fluid discharge side of the nozzle hole or a diameter of the through hole formed in the surface electrode layer of 8 pm or less. = As described above, a local electric field is generated by forming the diameter of the discharge hole of the nozzle to a fine diameter of 〜1 to 25 Am, and # is finely nozzleed to lower the driving voltage at the time of discharge. Such a reduction in driving voltage is extremely advantageous for miniaturization of the device and high density of the nozzle. Of course, by lowering the driving voltage, it is also possible to: drive a low-voltage drive driver with high cost efficiency, and also improve the safety of use. Further, in the above discharge model, since the electric field intensity required for discharge depends on the intensity of the local concentrated electric field, it is not necessary to have the opposite electrode. That is, the insulating substrate or the like can be printed without the need of the counter electrode, the elasticity of the device structure is increased, and the thick insulator can be printed. Wherein, as described above, by setting the diameter of the fluid discharge hole of the nozzle to be φ8 μm or less as described above, the electric field intensity distribution is effectively concentrated in the vicinity of the discharge face of the fluid discharge hole, and the distance from the opposite electrode to the fluid discharge hole The interaction does not affect the electric field intensity distribution, and therefore is not affected by the positional accuracy of the opposing electrode, the deviation of the material properties of the recording medium, and the thickness deviation, so that stable fluid discharge can be performed. Further, by effectively concentrating the electric field intensity distribution in the vicinity of the discharge surface of the fluid discharge hole, a strong electric field is stably formed in the narrow region, and an extremely small amount of fluid can be surely discharged, so that the printed image can be made to have a high resolution. As described above, the nozzle plate manufacturing method of the present invention has a sacrificial layer formed on the substrate by 95731.doc -59 - 1255232; on the upper nozzle layer; on the upper ϋ + this (four) I, the + A plurality of first nozzle holes are formed on a mouth layer. The first nozzle is a hole, and the shell is a hole, and a first layer is formed on the inner wall surface of each of the first nozzle holes of -, . Processing the above-mentioned first ... - 1 mouth hole circumference also includes the remaining first f E 曰, on the above-mentioned brother-nozzle layer, the second 嗔 mouth "... part is formed to form a second a nozzle layer; the second nozzle hole is arranged in the upper and the second nozzle holes, and the second nozzle holes are housed in the opening portion on the body discharge side and remain on the first nozzle layer: the electrode layer portion; The inner wall surface of each of the upper holes is formed on the first layer, and includes the second nozzles: the second electrode layer; and the second electrode layer is processed by electrically separating the adjacent second nozzle holes. He bird hole spray::, ί rigid w on the substrate 'via the sacrificial layer, sequentially stacking the first - negative layer" brother an electrode sound, flute - + ^ no layer brother The mouth layer and the second electrode layer. After the formation of the photoresist pattern by the light engraving technique, since it can be processed into a desired shape by dry quoting, it can be &# ff mouth hole, flute + some shape accuracy Forming the first-spraying-heming hole, the first electrode layer and the second electrode layer. : Externally, since the fluid discharge surface of the nozzle plate is passed to the final stage of the step, in the nozzle plate manufacturing step, the fluid In addition, the hole is not deformed and deformed. Therefore, the manufacturing rate of the nozzle plate is further improved. The method for manufacturing the nozzle plate of the present invention further forms a sacrificial layer on the substrate and a first spray layer on the sacrificial layer. Forming a surface electrode layer on the sacrificial layer between the steps, separating the surface electrode layer corresponding to the formation portion of the nozzle hole portion, and forming a through hole in each of the separation portions 95731.doc - 60 - 1255232; forming a sacrificial layer The first step also includes the step of separating the surface + the blast layer, and the surface of the surface is formed on the pole layer to form the first _. The nozzle of the structure is made of a flat plate, and the surface electrode on the a layer is on the force ', because it can be formed The shape of the sacrificial body discharge hole is not deformed by the unevenness (such as the film thickness distribution) formed in the first: = flow, and: the internal cavity - the fluid discharge hole of the electrode layer The manufacturing method has the higher precision (4) and the second invention. Further, the step of the electrode layer can be applied to the surface of the nozzle plate from the 钭 to the incident film forming surface. The nozzle-type flat plate is formed into the above-mentioned first electrode; the bovine- & method, the step-in step can also be in the step of forming the jade layer, on the surface of the nozzle-type flat plate, from the incident film-forming particles. That is, the oblique direction of the object is an electrode formed by incident film-forming particles in an oblique direction: the adhesion of the side wall of the nozzle hole is good. Furthermore, for the Saki or the second;):: The electrode layer does not form an electrode layer. Therefore, the inside of the first nozzle hole when forming the second electrode layer, and the through hole of the electrode surface of the bungee electrode can be formed. A part of the pole layer is formed in the shadow of the surface to form a film. It is dreamed that the region where the electrode layer is not desired to be formed in the temple is the region where the electrode layer is not formed: the region where the electrode layer is formed can be set and the adhesion of the electrode layer forming the inside of the electrode layer can be improved. ,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, (4) The high resistance is 2 9573 l.doc -61 - I255232. In this case, since the first electrode layer can accurately stop the etching of the second nozzle hole shape t, the first nozzle hole and the first nozzle layer do not A nozzle-type flat plate having a high shape accuracy can be manufactured by being damaged by excessive money processing of the second heel hole processing. In addition, the manufacturing method of the nozzle type flat plate of the present invention may further select the etching resistance to the surface electrode layer to be used in the step of forming the first nozzle hole and the step of forming the second nozzle hole. The conditions for the high resistance to etching of the first and second layer of the mouthpiece are compared. In this way, the surface layer is not damaged by the excessive nicking when the first nozzle hole is formed or the excessive buttoning when the second nozzle hole is formed. Therefore, the fluid discharge hole including the through hole of the surface electrode layer is not deformed by excessive (four): the spray precision is deteriorated, and the nipple type plate having high spray accuracy can be stably manufactured. Further, the manufacturing method of the nozzle type flat plate of the present invention is further carried out by the step of: the step of separating the second electrode layer by using a dry type. Because of the separation process of the second electrode layer by the dry type, the shape of the crucible is high, and since the processed layer is removed in a gaseous state: the crucible material is thus prevented from being processed by the accompanying processing such as cutting shoulders. The dust invades the nozzle hole and blocks the nozzle hole. Therefore, it is possible to stably manufacture a nozzle type plate which discharges a sinful sputum. In the case of the Besch method, it is transferred to - a - household, 钿j-like or consistent example, which merely indicates that the present invention::: intra-surgical" should not be interpreted narrowly to be limited to the specific example. The spirit and the scope of the patent application described below can be implemented as various changes in each of the singularities of the s. BRIEF DESCRIPTION OF THE DRAWINGS The electric field intensity of the nozzle is calculated. Fig. 1 is an explanatory view of the basic discharge model of the present invention. Fig. 2 is a graph showing the results of model calculation showing the relationship between the surface tension pressure and the electrostatic pressure and the nozzle diameter. Fig. 3 is a model calculation result showing the correlation between the discharge pressure and the nozzle diameter. Fig. 4 is a model calculation result showing the correlation between the discharge limit voltage and the nozzle diameter. Fig. 2 shows the relationship between the droplet and the substrate. A diagram showing the relationship between the image power and the distance between the nozzle and the substrate. Fig. 6 is a graph showing a model calculation of the correlation between the flow rate from the nozzle and the applied voltage. Fig. 7 (a) and Fig. 7 (c) are diagrams showing a limb of a nozzle type plate according to an embodiment of the present invention. Fig. 7 (b) is a cross-sectional view taken along line A-A of Fig. 7 (a). Fig. 8 is an explanatory view showing a portion where the first electrode layer and the second electrode layer of the nozzle type flat plate are connected. Fig. 9 is a cross-sectional view corresponding to the modification of the nozzle type flat plate of the embodiment, and is equivalent to Fig. 7(c). ', Θ 10 (a) to Fig. 1 (1) are explanatory views showing a method of manufacturing the nozzle-type flat plate of the present embodiment by a cross-sectional structure. Figs. 11(a) to 11(c) are views for further explaining the steps shown in Fig. 10(e) by the cross-sectional structure of the nozzle type flat plate. 95731.doc -63- 1255232 Fig. 12 is an explanatory view showing a preferred combination of materials for use in each layer and a processing method when the nozzle type flat plate of the present embodiment is manufactured. Fig. 13 (a) and Fig. 13 (C) are perspective views showing a nozzle type flat plate according to another embodiment of the present invention, and Fig. 13 (b) is a line sectional view taken along line B-B of Fig. 13 (a). Fig. 14 is a cross-sectional view showing a modification of the nozzle type flat plate of another embodiment, and corresponds to Fig. 13 (c). Fig. 15 (a) to Fig. 15 (g) are explanatory views showing a method of manufacturing the above-described nozzle type flat plate according to another embodiment by a cross-sectional structure. Fig. 16 is an explanatory view showing a preferred combination of materials and force σ of each layer in the manufacture of a nozzle type flat plate according to another embodiment. Figure 17 is a schematic cross-sectional view showing a conventional electrostatic attraction type ink jet apparatus. Fig. 18 (a) to Fig. 18 (c) are explanatory diagrams of the ink jet dream shown in Fig. 18 . ...The ink is formed - the moon is shown in Fig. 19 is the other static moon π 贝 贝 贝 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 + + + + + + + + + Figure. Fig. 21 is a schematic cross-sectional view of Fig. 21, Fig. 19 is a diagram showing the ink discharge of the ink jet apparatus shown in Fig. 19, and an illustration of the application of the ink jet apparatus to the nozzle portion. Figure 23 is an explanatory view of the principle of Figure 19. An illustration of the principle. In the case of a voltage, the ink jet device forms a fine particle body in the nozzle portion. Figs. 24(a) to 24(c) are explanatory diagrams of the ink jet device f shown in Fig. 19. Set w to form the meniscus. Figure 2 5 (a) is the static Lei Ming drawing, the schematic diagram of the St. k body discharge device 95731.doc -64- 1255232 25 (b) is its equivalent circuit. Figure 26 is a side cross-sectional view showing a prior art nozzle plate for an electrostatic attraction type ink jet device. Figure 27 is a cross-sectional view showing the construction of a recording head portion of a conventional electrostatic attraction type ink jet device. Figure 28 is a partially enlarged cross-sectional plan view showing the ink discharge hole of the recording head portion of the electrostatic attraction type ink-jet device of Figure 27; [Description of main component symbols] 1 First nozzle layer 2 No. 2 nozzle layer 4 Liquid repellent film 5 Sacrificial layer 8 Nozzle plate 9 Fluid discharge hole 10 First nozzle layer 11 Nozzle hole (nozzle hole portion) 11a First nozzle hole 11c first nozzle hole lib second nozzle hole 20 second nozzle layer 25 first electrode layer 25b extension (extended first electrode layer portion) 26 second electrode layer 50 sacrificial layer 95731.doc -65- 801255232 81 nozzle type Flat surface electrode layer

95731.doc -66 TM

Claims (1)

1255232 X. Patent application scope: 1. The nozzle type flat plate is set in the electrostatic suction type from the front end of the nozzle, and the body discharge hole is charged by the electrostatic absorption voltage. ^# And the body that has been discharged by the application, the first one having a plurality of nozzles having a thin layer is known as being placed on the fluid discharge side; and the shell hole is provided with at least one layer The two nozzle layer, the most fluid supply side of the layer, is more than the above 篦+ θ, and the Μ — nozzle layer mouth is connected, the 'Hou mouth layer is thick, and the above-mentioned 啧 啧 = pass and have the same - The nozzle hole constitutes a "hole portion": electrically connected to the second electrode layer of the first nozzle film on the inner wall of the second nozzle hole. "% pole layer and into 2. The nozzle layer of the request item The second sneezes the τ interface of the electrode layer on the first nozzle layer, and extends from the first nozzle hole to the second electrode layer to electrically connect to the first nozzle layer and the electrode layer. 3- If the request item is in the nozzle type, the tenth pull/, middle and upper "-electrode layer is formed in Shanghe The inner wall of the hole of the round. 4. The nozzle type of the request item 1 /, the middle electrode layer of the above-mentioned first, the bird layer and the second mouth; the interface of the #1, the horse layer, the extension from the nozzle hole to the A 3 1 a nozzle-type flat plate having a first electrode layer portion I and a first electrode layer portion I on the first nozzle layer, wherein the first nozzle hole is in contact with the first nozzle hole, wherein the first nozzle hole is And/or the second 95731.doc 1255232, the nozzle hole is formed larger than the fluid discharge side by the opening on the fluid supply side. 6. a nozzle-type flat plate according to claim 1, wherein a surface electrode layer having a through hole is disposed on a fluid discharge side of the first nozzle hole to block a fluid discharge side opening portion of the first nozzle hole, the through hole and the A nozzle hole communicates ' and the surface electrode layer is electrically connected to the first electrode layer. 7. The nozzle plate of claim 1, wherein the second electrode layer of the first layer of the nozzle layer on the fluid supply side is on the fluid supply side of the second nozzle layer, and is electrically connected between adjacent nozzle holes. Separation. 8. The mouthpiece type plate of claim 7, wherein the J electrode layer of the second nozzle layer most on the fluid supply side is also formed on a fluid supply side surface of the second nozzle layer, and the surface is patterned The lead wiring is formed. 9. The nozzle plate of claim 1, wherein the diameter of the opening Deng of the fluid row J of the first nozzle hole is less than or equal to 8 / m of the through hole formed in the surface electrode layer. 〇 a method for manufacturing a nozzle type flat plate, comprising: forming a sacrificial layer on a substrate; forming a first nozzle layer on the sacrificial layer; forming a plurality of first nozzle holes in the first nozzle layer And forming, on the first nozzle layer, an inner wall surface of each of the nozzle holes of the + 匕3, forming a first electrode layer; and: “processing the inner wall of each first nozzle hole and the periphery of each first nozzle hole The first electrode layer; on the first nozzle layer, the first electrode layer portion is also formed to form a second nozzle layer; 95731.doc -2 - 1255232, a plurality of second nozzles on the layer The hole is formed by exposing the fluid of each of the second nozzle holes to the opening of each of the first electrode layers remaining in the first nozzle layer; and on the second spray layer of the earth The inner wall surface of the second nozzle hole is made up of an electrode layer; and the second electrode layer is processed by electrically separating between the adjacent second nozzle holes. 11. Manufacture of the nozzle plate according to claim H) Method, in which Between the step of forming the sacrificial layer on the substrate and the step of forming the first nozzle layer on the sacrificial layer, the surface of the sacrificial layer is formed on the sacrificial layer to separate the surface, and the surface is separated. a step of forming a through-hole in each of the separation portions; and forming a first nozzle layer in the step of forming the first layer of the sacrificial layer and the layer of tantalum, and also including the separated surface electrode layer. 12. The method according to claim 1, wherein in the step of forming the second electrode layer, the film-forming particles are incident on the surface of the nozzle-type flat plate from the oblique direction. 13. The nozzle-type flat plate of claim U In the manufacturing method, in the step of forming the first electrode layer, the surface of the nozzle-type ten-plate is incident into the moon-shaped particle from the oblique direction. 14. The manufacturing method of the nozzle-type flat plate of claim (7) or 丨丨 + + + In the above step 成> in the step of the second brother's mouth, the etching is used, and the electrode layer of the returning electrode is more resistant to etching than the second nozzle layer. The ten-high resistance strip is 95731.doc 1255232 1 5. The method for manufacturing a nozzle type flat plate according to claim 11, wherein the step of forming the first spray b and the step of forming the second nozzle hole are performed by etching, and the surface electrode layer is resistant to etching. Compared with the first and second sprays 16. The condition that the mouth layer is highly resistant to etching. For example, the method of the nozzle type Gans L of the item 1 or the ,, the step of the electro-blade "two-electrode layer" Use dry money to engrave. 95731.doc