US20140112650A1 - Cartridge heater apparatus - Google Patents

Cartridge heater apparatus Download PDF

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Publication number
US20140112650A1
US20140112650A1 US13/656,113 US201213656113A US2014112650A1 US 20140112650 A1 US20140112650 A1 US 20140112650A1 US 201213656113 A US201213656113 A US 201213656113A US 2014112650 A1 US2014112650 A1 US 2014112650A1
Authority
US
United States
Prior art keywords
tube
cartridge
heating cartridge
heating
heater apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US13/656,113
Other languages
English (en)
Inventor
Budd E. Faulkner
Mark Kollin ROMEO
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Vacuum LLC
Original Assignee
Edwards Vacuum LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Vacuum LLC filed Critical Edwards Vacuum LLC
Priority to US13/656,113 priority Critical patent/US20140112650A1/en
Assigned to EDWARDS VACUUM, INC. reassignment EDWARDS VACUUM, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: FAULKNER, BUDD E, ROMEO, MARK KOLLIN
Priority to PCT/US2013/065196 priority patent/WO2014062777A1/fr
Priority to EP13846809.5A priority patent/EP2910083A4/fr
Publication of US20140112650A1 publication Critical patent/US20140112650A1/en
Assigned to EDWARDS VACUUM LLC reassignment EDWARDS VACUUM LLC CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). Assignors: EDWARDS VACUUM, INC.
Abandoned legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H3/00—Air heaters
    • F24H3/02—Air heaters with forced circulation
    • F24H3/04—Air heaters with forced circulation the air being in direct contact with the heating medium, e.g. electric heating element
    • F24H3/0405—Air heaters with forced circulation the air being in direct contact with the heating medium, e.g. electric heating element using electric energy supply, e.g. the heating medium being a resistive element; Heating by direct contact, i.e. with resistive elements, electrodes and fins being bonded together without additional element in-between
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L53/00—Heating of pipes or pipe systems; Cooling of pipes or pipe systems
    • F16L53/30—Heating of pipes or pipe systems
    • F16L53/35—Ohmic-resistance heating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H9/00—Details
    • F24H9/18—Arrangement or mounting of grates or heating means
    • F24H9/1854—Arrangement or mounting of grates or heating means for air heaters
    • F24H9/1863—Arrangement or mounting of electric heating means
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/40—Heating elements having the shape of rods or tubes
    • H05B3/42—Heating elements having the shape of rods or tubes non-flexible

Definitions

  • This invention relates to a cartridge heater apparatus, in which a heating cartridge is securely inserted into a tube for controllably heating the fluid passing through the tube.
  • a cartridge heater is typically constructed by an electrical resistor coated with a layer of insulation material that tends to be low in electrical conductivity, but high in thermal conductivity.
  • the cartridge heater is connected to a power supply for the electrical resistor to convert the electric power provided by the power supply into heat.
  • a cylinder is one of the most popular, commercially-available configurations, which provides a convenient, point-of-use heating solution.
  • the cartridge heater can be easily inserted into a tube in a manner that a passage space between cartridge heater and the wall of the tube is provided to enable a fluid stream to pass through, thereby absorbing the heat generated by the cartridge heater.
  • This type of cylinder-shaped cartridge heater is often called the single-pass cartridge heater.
  • a system used in manufacturing semiconductor devices typically includes, among other things, a process tool, a vacuum pump arrangement having a booster pump and a backing pump, and an abatement device.
  • the process tool typically includes a process chamber, in which a process step, such as Chemical Vapor Deposition (CVD), Atomic Layer Deposition (ALD), oxidation, ion implantation, etching, lithography, etc., takes place to construct a predetermined microstructure on a semiconductor substrate placed therein.
  • the vacuum pump arrangement is connected to the process tool for evacuating the process chamber to create a vacuum environment required by the process step in the process chamber.
  • the gas evacuated from the process chamber by the vacuum pump arrangement is typically directed to the abatement device connected to an exhaust outlet of the vacuum pump arrangement via a tube or pipeline.
  • the abatement device destroys or decomposes the harmful or toxic components of the gas exhausted from the vacuum pump arrangement, so as to make it safe to be released to the environment.
  • a single-pass cartridge heater is inserted into the, tube for heating up the exhaust gas passing through the tube in the tube, the single-pass cartridge heater is air-tightly secured by a nut at a first end of the cartridge heater.
  • the single-pass cartridge heater extends inside and along the tube from the first end in a cantilever manner.
  • the diameter of the single-pass cartridge heater is made smaller than the inner diameter of the tube, such that a passage space is formed between the single-pass cartridge heater and the tube.
  • the gas exhausted from the vacuumpump arrangement is introduced into the tube and passes though the passage space into the abatement device.
  • the single-pass cartridge heater is controlled to heat up the exhaust gas, so as to keep its temperature in an appropriate range.
  • a cartridge heater apparatus includes a tube; a heating cartridge adapted to be inserted into the tube for heating fluid passing through a passage space between the heating cartridge and the tube, the heating cartridge being secured at a first end thereof in a cantilever manner; and means for supporting the heating cartridge in the tube at a location distant from the first end, without blocking the fluid passing through the passage space between the heating cartridge and the tube.
  • a system in accordance with some other embodiments of the invention, includes a process chamber; a vacuum pump arrangement connected to an outlet of the process chamber for evacuating fluid from the process chamber; an abatement device connected to an outlet of the vacuum pump arrangement via a tube for treating exhaust fluid emitted from the vacuum pump arrangement; a heating cartridge adapted to be inserted into the tube for heating the exhaust fluid passing through a passage space between the heating cartridge and the tube, the heating cartridge being secured at a first end thereof in a cantilever manner; and means for supporting the heating cartridge in the tube at a location distant from the first end, without blocking the exhaust fluid passing through the passage space between the heating cartridge and the tube.
  • FIG. 1 illustrates a schematic diagram showing a semiconductor manufacturing system in accordance with some embodiments of the present invention.
  • FIG. 2 illustrates a side view of a cartridge heater apparatus in accordance with some embodiments of the present invention.
  • FIG. 3 illustrates a cross-sectional view of the cartridge heater apparatus along an axial direction thereof in accordance with some embodiments of the invention.
  • FIG. 4 illustrates a cross-sectional view of the cartridge heater apparatus in a radial direction thereof in accordance with some embodiments of the invention.
  • FIG. 5 illustrates a cross-sectional view of another cartridge heater apparatus in a radial direction thereof in accordance with some embodiments of the invention.
  • FIG. 6 illustrates a cross-sectional view of yet another cartridge heater apparatus in a radial direction in accordance with some embodiments of the invention.
  • the present disclosure is directed to a cartridge heater apparatus, which includes without limitation a tube, and a heating cartridge adapted to be inserted into the tube for heating a fluid stream passing through the tube.
  • a cartridge heater apparatus which includes without limitation a tube, and a heating cartridge adapted to be inserted into the tube for heating a fluid stream passing through the tube.
  • the heating cartridge is secured at a first end thereof in a cantilever manner.
  • the cartridge heater apparatus is provided with means for supporting the heating cartridge in the tube at a location distant from the first end of the heating cartridge. This additional location of support prevents excessive contact between the heating cartridge and the inner wall of the tube that may be caused by the manufacturing tolerances of the heating cartridge or deformation of the same over time.
  • the cartridge heater apparatus can be made safer by reducing or eliminating the hot surface areas of the tube caused by the excessive contact, which otherwise would have occurred if there had been no such supporting means.
  • the temperature distribution of the fluid stream in the tube can be more accurately controlled by adjusting the power supplied to the heating cartridge.
  • the cartridge heater apparatus can be used to keep the temperature of certain exhaust gases produced by a semiconductor manufacturing process in a desired range.
  • One particular application of the cartridge heater apparatus is the semiconductor manufacturing process. It is noted that besides semiconductor manufacturing processes, the cartridge heater apparatus can be applied in any situations where a point-of-use, single-pass heating cartridge is needed to control the temperature of a fluid stream in a tube.
  • FIG. 1 illustrates a schematic view of a semiconductor processing system 10 , in which a cartridge heater apparatus in accordance with some embodiments of the invention can be applied.
  • the system 10 includes without limitation a process chamber 12 and a vacuum pump arrangement 20 connected thereto in series.
  • the vacuum pump arrangement 20 draws gases out of the process chamber 12 and creates a vacuum environment in it to carry out certain processes, such as depositions, oxidation, etching, ion implantation, epitaxy, lithography, etc.
  • the gases can be introduced into the process chamber 12 from one or snore gas sources, such as the ones designated by 14 a and 14 b in this figure.
  • the gas sources 14 a and 14 b can be connected to the process chamber 12 via control valves 16 a and 16 b, respectively.
  • the timing of introducing various gases into the process chamber 12 can be controlled by selectively turning on or off the control valves 16 a and 16 b,
  • the flow rate of the gas introduced from the gas source 14 a or 14 b into the process chamber 12 can be controlled by adjusting the fluid conductance of the control valves 16 a or 16 b, respectively.
  • the vacuum pump arrangement 20 might include a booster pump 22 and a backing pump 24 connected together in series.
  • the inlet of the booster pump 22 is connected to the outlet of the process chamber 12 .
  • the outlet of the booster pump 22 is connected to the inlet of the backing pump 24 .
  • the outlet of the hacking pump 24 might be connected to an abatement device 26 where the exhaust gases emitted from the backing pump 24 are treated in order to reduce the harmful impact the exhaust gases might have on the environment.
  • the abatement device 26 can be one of various types, such as a thermal processing unit, plasma reactor, microwave reactor, wet scrubber, or combination thereof.
  • a tube 28 is disposed between the outlet of the backing pump 24 and the inlet of the abatement device 26 as a conduit for the exhaust gases to flow from the backing pump 24 to the abatement device 26 .
  • a heating cartridge 30 can be inserted into the tube 28 in such a manner that there is sufficient passage space between the heating cartridge 30 and the tube 28 for the exhaust gases to pass from the backing pump 24 to the abatement device 26 without being blocked.
  • the heating cartridge 30 can be constructed by at least one electrical resistor (not shown in the figure) enclosed by a layer of insulation material, which tends to be high in thermal conductivity and low in electrical conductivity.
  • the heating cartridge 30 is electrically connected to a power supply 32 , which powers the electrical resistor to generate heat.
  • a thermal couple (not shown in the figure) can be attached to the tube 30 to generate a signal indicative of the temperature of the exhaust gas in the tube 28 .
  • the thermal couple can be electrically connected to a controller 34 to control the power provided by the power supply 32 to the heating cartridge 30 in response to the signal, thereby keeping the temperature of the exhaust gas in a desired range.
  • the heating cartridge 30 When the heating cartridge 30 is inserted in the tube 28 , the heating cartridge 30 is secured at a first end thereof in a cantilever manner. Means is provided to support the heating cartridge 30 in the tube 28 at a location distant from the first end of the heating cartridge 30 .
  • the tube 28 , heating cartridge 30 , and supporting means are collectively referred to as the cartridge heater apparatus in this disclosure, regardless whether they are assembled together as a ready-to-use apparatus or separated in the form of a kit.
  • the cartridge heater apparatus in this disclosure is also used to more broadly refer to a collection of any other components in support of or in addition to the tube 28 , heating cartridge 30 , and supporting means.
  • FIG. 2 illustrates a side view of a cartridge heater apparatus 50 in accordance with some embodiments of the present invention.
  • the cartridge heater apparatus 50 includes without limitation the tube 28 , which has an inlet 52 adapted to receive the exhaust gas from the backing pump 24 or from the vacuum pump arrangement 20 in cases where the backing pump 24 is omitted from the vacuum pump arrangement 20 , and an outlet 54 adapted to emit the exhaust gas to the abatement device 26 .
  • a heating cartridge 30 is inserted inside the tube 28 . Referring to FIGS. 2 and 3 simultaneously, the heating cartridge 30 is secured by a nut to the tube 28 in a cantilever manner at a first end designed by numeral 30 a.
  • the diameter of the heating cartridge 30 is smaller than the inner diameter of the tube 28 , such that a passage space is formed between the heating cartridge 30 and the inner surface of the tube 28 .
  • Means 58 for supporting the heating cartridge 30 in the tube 28 is provided at a location distant from the first end 30 a thereof, without blocking the passage space between the heating cartridge 30 and the tube 28 .
  • the supporting means 58 takes the form of at lease one recessed portion on an inner wall of the tube 28 in contact with the heating cartridge 30 inserted therein. It is noted that the supporting means 58 may take other forms as long as it holds the heating cartridge 30 in the tube 28 , without blocking the passage space between the heating cartridge 30 and the inner surface of the tube 28 .
  • the inlet 52 is disposed at a location between the first end 30 a of the heating cartridge 30 and the supporting means 58 . As the first end 30 a of the heating cartridge 30 is sealed by the nut 56 , the exhaust gas emitted from the vacuum pump arrangement 20 flows into the tube 28 via the inlet 52 , through the passage space by veer the heating cartridge 30 and the tube 28 , and out of the tube 28 via the outlet 54 .
  • the heating cartridge 30 is constructed by a cylinder or otherwise shaped body enclosing an electrical resistor (not shown in the figures).
  • the body is made of at least a material that is low in electrical conductivity but high in thermal conductivity.
  • the electrical resistor is connected to the power supply 32 via a cable 60 and a connector 62 .
  • the electrical resistor generates heat to maintain or increase the temperature of the exhaust gas passing though the passage space between the heating cartridge 30 and the inner surface of the tube 28 at or to a predetermined level, thereby ensuring proper functioning of the abatement device 26 connected to the outlet 54 of the tube 28 , and preventing undesired particulates generated from the exhaust gas due to a drop of temperature from being accumulated in the tube 28 .
  • a thermal couple 70 is fluidly connected to the exhaust gas in the tube 28 via a tube 72 .
  • the thermal couple 70 can be plugged into the controller 34 , or connected to the same via a connector.
  • the thermal couple 70 generates a first signal indicative of the temperature of the exhaust gas in the tube 28 .
  • the controller 34 in turn controls the power supply 32 in response to the first signal received from the thermal couple 70 . If the temperature of the exhaust gas exceeds a predetermined threshold, the controller 34 will direct the power supply 32 to cut off the power supplied to the heating cartridge 30 , thereby preventing the exhaust gas in the tube 2 . 8 from overheating.
  • an over-temperature protection switch 74 can also be provided to protect the tube 28 from overheating.
  • the over-temperature protection switch 74 is attached to the outer surface of the tube 28 and not in direct contact with the exhaust gas in the tube 28 .
  • the over-temperature protection switch 74 can be electrically connected to the controller 34 via a connector 78 .
  • the over-temperature protection switch 78 generates a second signal indicative of the temperature of the tube 28 . If temperature of the tithe 28 exceeds a predetermined threshold, the controller 34 will direct the power supply 32 to cut off the power supplied to the heating cartridge 30 , thereby preventing the tube 28 from overheating.
  • the over-temperature protection switch 74 protects the tube 28 from overheating even when there is insufficient amount of the exhaust gas in the tube 28 to trigger the thermal couple 70 to generate a signal that cuts off the power from the power supply 32 to the heating cartridge 30 .
  • One of the advantages of the cartridge heater apparatus 50 in accordance with some embodiments of the invention is to avoid undesired, excessive contact between the heating cartridge 30 and the inner surface of the tube 28 , thereby ensuring safety and efficient operation, which might be adversely affected by the tube 28 being overheated.
  • the supporting means 58 supports the heating cartridge 30 at a location separate from the first end 30 a thereof, and in addition to the nut 56 that secures the heating cartridge 30 in a cantilever manner. As such, any excessive contact between the body of the heating cartridge 30 and the inner surface of the tube 28 caused by manufacturing tolerances or warping of the heating cartridge 30 can be avoided.
  • FIGS. 4-6 illustrate various supporting means in accordance with some embodiments of the invention.
  • FIG. 4 illustrates a cross-sectional view along the line C-C in FIG. 2 .
  • the supporting means 58 is configured in the form of a number of recessed portions on the inner wall of the tube 28 .
  • the number of the recessed portions 58 a can vary depending on design choices. In some embodiments of the invention, three or more recessed portions 58 a might be spread around the heating cartridge 30 at the same location in an axial direction of the tube 28 to support the heating cartridge 30 . In some other embodiments of the invention, only one or two recessed portions 58 a might be implemented ted to support the heating cartridge 30 .
  • the recessed portions 58 a can be integral parts of the tube 28 in some embodiments of the invention.
  • the recessed portions 58 a can be made by pressing the tube 28 with pointed forces to create dimples capable of holding the heating cartridge 30 in the tube 28 .
  • the recessed portions 58 a can be made by attaching small objects to the inner surface of the tube 28 .
  • FIG. 5 illustrates a cross-sectional view of supporting means 80 in accordance with sonic embodiments of the invention.
  • the supporting means 80 is configured in the form of a number of protrusions 80 a on the surface of the heating cartridge 30 .
  • the number of the protrusions 80 a can vary depending on design choices. In some embodiments of the invention, three or more protrusions 80 a might be spread around the heating cartridge 30 at the same location in an axial direction of the same. In some other embodiments of the invention, only one or two protrusions 80 a might be implemented to support the heating cartridge 30 .
  • the protrusions 80 a can be integral parts of the heating cartridge 30 in some embodiments of the invention.
  • the protrusions 80 a can be made by molding or machining the heating cartridge 30 into a profile having pointed contacts with the inner surface of the tube 28 via the protrusions 80 a.
  • the protrusions 80 a can be made by attaching small objects to the outer surface of the heating cartridges 30 .
  • FIG. 6 illustrates a cross-sectional view of supporting means 90 in accordance with some embodiments of the invention.
  • the supporting means 90 is configured in the form of a spacer 90 a inserted between the heating cartridge 30 and the inner wall of the tube 28 .
  • the spacer 90 a has a number of openings 90 b, which allow the exhaust gas to pass therethrough, such that the gas flow from the inlet 52 to the outlet 54 of the tube 28 is not blocked by the spacer 90 a.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Chemical Vapour Deposition (AREA)
US13/656,113 2012-10-19 2012-10-19 Cartridge heater apparatus Abandoned US20140112650A1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US13/656,113 US20140112650A1 (en) 2012-10-19 2012-10-19 Cartridge heater apparatus
PCT/US2013/065196 WO2014062777A1 (fr) 2012-10-19 2013-10-16 Appareil d'élément chauffant de cartouche
EP13846809.5A EP2910083A4 (fr) 2012-10-19 2013-10-16 Appareil d'élément chauffant de cartouche

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US13/656,113 US20140112650A1 (en) 2012-10-19 2012-10-19 Cartridge heater apparatus

Publications (1)

Publication Number Publication Date
US20140112650A1 true US20140112650A1 (en) 2014-04-24

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ID=50485428

Family Applications (1)

Application Number Title Priority Date Filing Date
US13/656,113 Abandoned US20140112650A1 (en) 2012-10-19 2012-10-19 Cartridge heater apparatus

Country Status (3)

Country Link
US (1) US20140112650A1 (fr)
EP (1) EP2910083A4 (fr)
WO (1) WO2014062777A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140273385A1 (en) * 2013-03-12 2014-09-18 Taiwan Semiconductor Manufacturing Company, Ltd. Interface for metal gate integration
CN113330219A (zh) * 2019-02-14 2021-08-31 普发真空公司 干式粗真空泵

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US2343542A (en) * 1944-03-07 Heat extractor
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US2103434A (en) * 1935-09-06 1937-12-28 Robert H Pennebaker Oil filter
US2259433A (en) * 1937-11-15 1941-10-14 Hoover Co Heat exchanger
US3453840A (en) * 1966-07-02 1969-07-08 Sanyo Electric Co Tube-within-a-tube type heat exchangers
US4585059A (en) * 1980-01-15 1986-04-29 H & H Tube & Mfg. Co. Heat transfer tube assembly
US5740315A (en) * 1992-06-30 1998-04-14 Kabushiki Kaisha Komatsu Seisakusho Fluid heating apparatus
US5371830A (en) * 1993-08-12 1994-12-06 Neo International Industries High-efficiency infrared electric liquid-heater
US5375654A (en) * 1993-11-16 1994-12-27 Fr Mfg. Corporation Turbulating heat exchange tube and system
US5872890A (en) * 1994-10-27 1999-02-16 Watkins Manufacturing Corporation Cartridge heater system
US6205292B1 (en) * 1996-04-03 2001-03-20 Steag Microtech Gmbh Fluid heater
US6080973A (en) * 1999-04-19 2000-06-27 Sherwood-Templeton Coal Company, Inc. Electric water heater
US6421913B1 (en) * 2000-01-19 2002-07-23 Delphi Technologies, Inc. Retention feature for assembling a pole pieces into a tube of a fuel injector
US6920917B2 (en) * 2002-12-10 2005-07-26 Matsushita Electric Industrial Co., Ltd. Double-pipe heat exchanger
US7011150B2 (en) * 2004-04-20 2006-03-14 Tokyo Radiator Mfg. Co., Ltd. Tube structure of multitubular heat exchanger
US7565065B2 (en) * 2004-10-26 2009-07-21 Nippon Pillar Packing Co., Ltd. Fluid heater and fluid heating apparatus
US20110129205A1 (en) * 2009-11-30 2011-06-02 Emerson Electric Co. Flow-through heater
US9091487B2 (en) * 2010-08-18 2015-07-28 Halla Visteon Climate Control Corporation Double pipe type heat exchanger and method for manufacturing the same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140273385A1 (en) * 2013-03-12 2014-09-18 Taiwan Semiconductor Manufacturing Company, Ltd. Interface for metal gate integration
US9105578B2 (en) * 2013-03-12 2015-08-11 Taiwan Semiconductor Manufacturing Company, Ltd. Interface for metal gate integration
CN113330219A (zh) * 2019-02-14 2021-08-31 普发真空公司 干式粗真空泵

Also Published As

Publication number Publication date
EP2910083A1 (fr) 2015-08-26
WO2014062777A1 (fr) 2014-04-24
EP2910083A4 (fr) 2016-06-01

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